Patents by Inventor David M. Kallus

David M. Kallus has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • System and method for integrated data transfer, archiving and purging of semiconductor wafer data
    Patent number: 7346883
    Abstract: A system for the integrated archiving, restoring, purging, importing and exporting of semiconductor wafer data, the system including a data acquisition system for acquiring scan data from differing types of semiconductor wafer scanning tools such as wafer dimensional tools, wafer inspection tools, and wafer nanotopography tools, a buffer system for providing temporary storage for scan data transmitted over a network from the data acquisition system and for providing fault tolerance, a server system for providing storage for the scan data transmitted from the buffer system and converting the scan data into a format used by and stored in a database management system; and an analysis system client station including a display and communicating with the server system over the network, the analysis system and the server system managing the purging, archiving, restoring, importing and exporting of scan data.
    Type: Grant
    Filed: July 8, 2005
    Date of Patent: March 18, 2008
    Assignee: KLA-Tencor Technologies Corporation
    Inventors: Jay Keck, David M. Kallus, Daniel P. Croft, Zachary J. Vergow, Daniel K. Kesler
  • System and method for searching for patterns of semiconductor wafer features in semiconductor wafer data
    Patent number: 7343583
    Abstract: A system for the integrated archiving, restoring, purging, importing and exporting of semiconductor wafer data, the system including a data acquisition system for acquiring scan data from differing types of semiconductor wafer scanning tools such as wafer dimensional tools, wafer inspection tools, and wafer nanotopography tools, a buffer system for providing temporary storage for scan data transmitted over a network from the data acquisition system and for providing fault tolerance, a server system for providing storage for the scan data transmitted from the buffer system and converting the scan data into a format used by and stored in a database management system; and an analysis system client station including a display and communicating with the server system over the network, the analysis system and the server system managing the purging, archiving, restoring, importing and exporting of scan data.
    Type: Grant
    Filed: July 8, 2005
    Date of Patent: March 11, 2008
    Assignee: KLA-Tencor Technologies Corporation
    Inventors: Jay Keck, David M. Kallus, Bryan W. Smith, Zachary J. Vergow