Patents by Inventor David Michael Rusinko, Jr.

David Michael Rusinko, Jr. has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Wafer processing apparatus having a tunable electrical resistivity
    Patent number: 7929269
    Abstract: An article with an etch resistant coating is disclosed. The article is a heating element, wafer carrier, or electrostatic chuck. The article has a base substrate made of a ceramic or other material, and further has one or more electrodes for resistance heating or electromagnetic chucking or both. The eth resistant coating has a plurality of regions made from materials having different electrical volume resistivities, such that the overall coating has a bulk resistivity that can be tailored by varying the relative size of each region.
    Type: Grant
    Filed: September 4, 2008
    Date of Patent: April 19, 2011
    Assignee: Momentive Performance Materials Inc.
    Inventors: David Michael Rusinko, Jr., Marc Schaepkens, Wanxue Zeng
  • WAFER PROCESSING APPARATUS HAVING A TUNABLE ELECTRICAL RESISTIVITY
    Publication number: 20100053841
    Abstract: An article with an etch resistant coating is disclosed. The article is a heating element, wafer carrier, or electrostatic chuck. The article has a base substrate made of a ceramic or other material, and further has one or more electrodes for resistance heating or electromagnetic chucking or both. The eth resistant coating has a plurality of regions made from materials having different electrical volume resistivities, such that the overall coating has a bulk resistivity that can be tailored by varying the relative size of each region.
    Type: Application
    Filed: September 4, 2008
    Publication date: March 4, 2010
    Applicant: MOMENTIVE PERFORMANCE MATERIALS INC.
    Inventors: David Michael Rusinko, JR., Marc Schaepkens, Wanxue Zeng
  • Container for evaporation of metal and method to manufacture thereof
    Patent number: 7494616
    Abstract: A refractory container for evaporating metals, having improved useful life and corrosion resistance properties, the evaporation surface of the container having a plurality of grooves formed at the bottom surface. The grooves have either a depth of at least 1.2 mm, a width of at least 1.75 mm, or an interval spacing of at least 2.2 mm between adjacent grooves (or centers of adjacent grooves), and combinations thereof.
    Type: Grant
    Filed: November 4, 2005
    Date of Patent: February 24, 2009
    Assignee: Momentive Performance Materials Inc.
    Inventors: David Michael Rusinko, Jr., Ajit Sane, Gary Zayas
  • Container for evaporation of metal and method to manufacture thereof
    Patent number: 7319079
    Abstract: A refractory container for evaporating metals, having significantly improved useful life and corrosion resistance properties, said container consists essentially of a refractory boride, boron nitride, and about 0.10 to 10 wt. % of a rare earth metal compound selected from one of an oxide, a nitride, a carbide, or mixtures thereof.
    Type: Grant
    Filed: September 24, 2004
    Date of Patent: January 15, 2008
    Inventors: David Michael Rusinko, Jr., Ajit Sane