Patents by Inventor David Morrell

David Morrell has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11885036
    Abstract: A ribbon is formed such that the ribbon floats on a melt using a cold initializer facing an exposed surface of the melt. The ribbon is single crystal silicon. The ribbon is pulled from the silicon melt at a low angle off the melt surface. The ribbon is formed at a same rate as the pulling. The ribbon is separated from the melt at a wall of the crucible where a stable meniscus forms. The ribbon has a thickness between a first surface and an opposite second surface from 50 ?m to 5 mm. The ribbon includes a first region extending a first depth from the first surface. The first region has a reduced oxygen concentration relative to a bulk of the ribbon.
    Type: Grant
    Filed: August 9, 2020
    Date of Patent: January 30, 2024
    Inventors: Jesse S. Appel, Alison Greenlee, Nathan Stoddard, Peter Kellerman, Parthiv Daggolu, Alexander Martinez, Saeed Pirooz, Brandon Williard, Charles Bowen, Brian McMullen, David Morrell, Dawei Sun
  • Patent number: 11864299
    Abstract: A system and method for reducing charge on a workpiece disposed on a platen is disclosed. The system includes an ionizer to generate ionized gas from the source of backside gas. The ionizer may be used to introduce ionized gas into the backside gas channels of the platen. A controller is used to selectively allow backside gas and/or ionized gas into the backside gas channels. In certain embodiments, the platen also includes an exhaust channel in communication with an exhaust valve to ensure that the pressure within the volume between the top surface of the platen and the workpiece is maintained in a desired range. In one embodiment, the system includes a valving system in communication with the source of backside gas and also in communication with the ionizer. In another embodiment, the amount of ionization performed by the ionizer is programmable.
    Type: Grant
    Filed: May 10, 2022
    Date of Patent: January 2, 2024
    Assignee: Applied Materials, Inc.
    Inventors: David Morrell, Dawei Sun, Qin Chen
  • Publication number: 20230371160
    Abstract: A system and method for reducing charge on a workpiece disposed on a platen is disclosed. The system includes an ionizer to generate ionized gas from the source of backside gas. The ionizer may be used to introduce ionized gas into the backside gas channels of the platen. A controller is used to selectively allow backside gas and/or ionized gas into the backside gas channels. In certain embodiments, the platen also includes an exhaust channel in communication with an exhaust valve to ensure that the pressure within the volume between the top surface of the platen and the workpiece is maintained in a desired range. In one embodiment, the system includes a valving system in communication with the source of backside gas and also in communication with the ionizer. In another embodiment, the amount of ionization performed by the ionizer is programmable.
    Type: Application
    Filed: May 10, 2022
    Publication date: November 16, 2023
    Inventors: David Morrell, Dawei Sun, Qin Chen
  • Patent number: 11665786
    Abstract: A solid state heater and methods of manufacturing the heater is disclosed. The heater comprises a unitary component that includes portions that are graphite and other portions that are silicon carbide. Current is conducted through the graphite portion of the unitary structure between two or more terminals. The silicon carbide does not conduct electricity, but is effective at conducting the heat throughout the unitary component. In certain embodiments, chemical vapor conversion (CVC) is used to create the solid state heater. If desired, a coating may be applied to the unitary component to protect it from a harsh environment.
    Type: Grant
    Filed: December 5, 2019
    Date of Patent: May 30, 2023
    Assignee: Applied Materials, Inc.
    Inventors: David Morrell, Dawei Sun
  • Publication number: 20220316087
    Abstract: A ribbon is formed such that the ribbon floats on a melt using a cold initializer facing an exposed surface of the melt. The ribbon is single crystal silicon. The ribbon is pulled from the silicon melt at a low angle off the melt surface. The ribbon is formed at a same rate as the pulling. The ribbon is separated from the melt at a wall of the crucible where a stable meniscus forms. The ribbon has a thickness between a first surface and an opposite second surface from 50 ?m to 5 mm. The ribbon includes a first region extending a first depth from the first surface. The first region has a reduced oxygen concentration relative to a bulk of the ribbon.
    Type: Application
    Filed: August 9, 2020
    Publication date: October 6, 2022
    Inventors: Alison Greenlee, Nathan Stoddard, Jesse S. Appel, Peter Kellerman, Parthiv Daggolu, Alexander Martinez, Saeed Pirooz, Brandon Williard, Charles Bowen, Brian McMullen, David Morrell, Dawei SUN
  • Publication number: 20210176824
    Abstract: A solid state heater and methods of manufacturing the heater is disclosed. The heater comprises a unitary component that includes portions that are graphite and other portions that are silicon carbide. Current is conducted through the graphite portion of the unitary structure between two or more terminals. The silicon carbide does not conduct electricity, but is effective at conducting the heat throughout the unitary component. In certain embodiments, chemical vapor conversion (CVC) is used to create the solid state heater. If desired, a coating may be applied to the unitary component to protect it from a harsh environment.
    Type: Application
    Filed: December 5, 2019
    Publication date: June 10, 2021
    Inventors: David Morrell, Dawei Sun
  • Patent number: 10801125
    Abstract: An apparatus for controlling heat flow within a melt. The apparatus may include a crucible configured to contain the melt where the melt has an exposed surface. The apparatus may also include a heater disposed below a first side of the crucible and configured to supply heat through the melt to the exposed surface, and a heat diffusion barrier assembly comprising at least one heat diffusion barrier disposed within the crucible and defining an isolation region in the melt and an outer region in the melt.
    Type: Grant
    Filed: July 16, 2019
    Date of Patent: October 13, 2020
    Inventors: Peter L. Kellerman, Frederick M. Carlson, David Morrell, Ala Moradian, Nandish Desai
  • Publication number: 20190338442
    Abstract: An apparatus for controlling heat flow within a melt. The apparatus may include a crucible configured to contain the melt where the melt has an exposed surface. The apparatus may also include a heater disposed below a first side of the crucible and configured to supply heat through the melt to the exposed surface, and a heat diffusion barrier assembly comprising at least one heat diffusion barrier disposed within the crucible and defining an isolation region in the melt and an outer region in the melt.
    Type: Application
    Filed: July 16, 2019
    Publication date: November 7, 2019
    Inventors: Peter L. Kellerman, Frederick M. Carlson, David Morrell, Ala Moradian, Nandish Desai
  • Patent number: 10468876
    Abstract: Embodiments of the disclosure include a fault current limiter (FCL) providing symmetrical electrostatic shielding. In some embodiments, a FCL includes a superconductor maintained at a first voltage greater than zero voltage, and an enclosure containing the superconductor, the enclosure maintained at a second voltage greater than zero voltage, wherein the second voltage is different from the first voltage. The FCL may include an electrical connection directly coupling the superconductor and the enclosure, wherein the electrical connection enables each of a plurality of current limiting modules of the superconductor to receive, during a fault condition, an equal or unequal sub-portion of a total voltage drop.
    Type: Grant
    Filed: April 24, 2017
    Date of Patent: November 5, 2019
    Assignee: VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
    Inventors: Piotr Lubicki, Saeed Jazebi, David Morrell, George Emmanuel, Paul Murphy
  • Publication number: 20190284715
    Abstract: An apparatus for controlling heat flow within a melt. The apparatus may include a crucible configured to contain the melt where the melt has an exposed surface. The apparatus may also include a heater disposed below a first side of the crucible and configured to supply heat through the melt to the exposed surface, and a heat diffusion barrier assembly comprising at least one heat diffusion barrier disposed within the crucible and defining an isolation region in the melt and an outer region in the melt.
    Type: Application
    Filed: March 27, 2014
    Publication date: September 19, 2019
    Applicant: VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
    Inventors: Peter L. Kellerman, Frederick M. Carlson, David Morrell, Ala Moradian, Nandish Desai
  • Patent number: 10415151
    Abstract: An apparatus for controlling heat flow within a melt. The apparatus may include a crucible configured to contain the melt where the melt has an exposed surface. The apparatus may also include a heater disposed below a first side of the crucible and configured to supply heat through the melt to the exposed surface, and a heat diffusion barrier assembly comprising at least one heat diffusion barrier disposed within the crucible and defining an isolation region in the melt and an outer region in the melt.
    Type: Grant
    Filed: March 27, 2014
    Date of Patent: September 17, 2019
    Assignee: VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC
    Inventors: Peter L. Kellerman, Frederick M. Carlson, David Morrell, Ala Moradian, Nandish Desai
  • Patent number: 10396548
    Abstract: Embodiments of the disclosure provide a current protection device for a fault current limiter, the current protection device including a detection circuit electrically coupled between a current transformer and a pneumatic timer, and an electrical vacuum interrupter (EVI) coupled to a pneumatic cylinder. In some embodiments, the EVI includes a set of breaker contacts, wherein the pneumatic timer is communicatively coupled with the pneumatic cylinder to actuate a moveable contact of the set of breaker contacts. In some embodiments, the detection circuit is configured to detect a current of the current transformer, and to provide a control signal to the pneumatic cylinder to open or close the set of breaker contacts based on the detected current.
    Type: Grant
    Filed: January 30, 2017
    Date of Patent: August 27, 2019
    Assignee: VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
    Inventors: Scott W. Nickerson, Charles L. Stanley, David Morrell, Semaan Fersan, Saeed Jazebi, George Emmanuel
  • Patent number: 10179958
    Abstract: An apparatus for forming a crystalline sheet. The apparatus may include a crystallizer comprising a first gas channel and a second gas channel, wherein the first gas channel and second gas channel extend through the crystallizer to a lower surface of the crystallizer between an upstream edge and a downstream edge. The first gas channel may be disposed closer to the downstream edge than the second gas channel. A first gas source may be coupled to the first gas channel, where the first gas source comprises helium or hydrogen, and a second gas source may be coupled to the second gas channel, where the second gas source does not contain hydrogen or helium.
    Type: Grant
    Filed: March 10, 2017
    Date of Patent: January 15, 2019
    Assignee: VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC
    Inventors: Peter L. Kellerman, Brian D. Kernan, Frederick M. Carlson, Dawei Sun, David Morrell
  • Publication number: 20180309288
    Abstract: Embodiments of the disclosure include a fault current limiter (FCL) providing symmetrical electrostatic shielding. In some embodiments, a FCL includes a superconductor maintained at a first voltage greater than zero voltage, and an enclosure containing the superconductor, the enclosure maintained at a second voltage greater than zero voltage, wherein the second voltage is different from the first voltage. The FCL may include an electrical connection directly coupling the superconductor and the enclosure, wherein the electrical connection enables each of a plurality of current limiting modules of the superconductor to receive, during a fault condition, an equal or unequal sub-portion of a total voltage drop.
    Type: Application
    Filed: April 24, 2017
    Publication date: October 25, 2018
    Applicant: Varian Semiconductor Equipment Associates, Inc.
    Inventors: Piotr Lubicki, Saeed Jazebi, David Morrell, George Emmanuel, Paul Murphy
  • Publication number: 20180219372
    Abstract: Embodiments of the disclosure provide a current protection device for a fault current limiter, the current protection device including a detection circuit electrically coupled between a current transformer and a pneumatic timer, and an electrical vacuum interrupter (EVI) coupled to a pneumatic cylinder. In some embodiments, the EVI includes a set of breaker contacts, wherein the pneumatic timer is communicatively coupled with the pneumatic cylinder to actuate a moveable contact of the set of breaker contacts. In some embodiments, the detection circuit is configured to detect a current of the current transformer, and to provide a control signal to the pneumatic cylinder to open or close the set of breaker contacts based on the detected current.
    Type: Application
    Filed: January 30, 2017
    Publication date: August 2, 2018
    Inventors: Scott W. Nickerson, Charles L. Stanley, David Morrell, Semaan Fersan, Saeed Jazebi, George Emmanuel
  • Patent number: 10030317
    Abstract: An apparatus may include a crucible configured to contain the melt, the melt having an exposed surface separated from a floor of the crucible by a first distance, a housing comprising a material that is non-contaminating to the melt, the housing comprising a plurality of sidewalls and a top that are configured to contact the melt, and a plurality of heating elements isolated from the melt and disposed along a transverse direction perpendicular to a pulling direction of the crystalline sheet, the plurality of heating elements being individually powered, wherein the plurality of heating elements are disposed at a second set of distances from the exposed surface of the melt that are less than the first distance, and wherein the plurality of heating elements are configured to vary a heat flux profile along the transverse direction when power is supplied individually to the plurality of heating elements.
    Type: Grant
    Filed: October 17, 2014
    Date of Patent: July 24, 2018
    Assignee: Varian Semiconductor Equipment Associates, Inc.
    Inventors: Peter L. Kellerman, Frederick M. Carlson, David Morrell, Brian Mackintosh, Nandish Desai
  • Patent number: 9957636
    Abstract: A crystallizer for growing a crystalline sheet from a melt may include a cold block having a cold block surface that faces an exposed surface of the melt, the cold block configured to generate a cold block temperature at the cold block surface that is lower than a melt temperature of the melt at the exposed surface. The system may also include a nozzle disposed within the cold block and configured to deliver a gas jet to the exposed surface, wherein the gas jet and the cold block are interoperative to generate a process zone that removes heat from the exposed surface at a first heat removal rate that is greater than a second heat removal rate from the exposed surface in outer regions outside of the process zone.
    Type: Grant
    Filed: March 27, 2014
    Date of Patent: May 1, 2018
    Assignee: VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
    Inventors: Peter L. Kellerman, Brian Mackintosh, Frederick M. Carlson, David Morrell, Ala Moradian, Nandish Desai, Dawei Sun, Frank Sinclair
  • Publication number: 20180080142
    Abstract: An apparatus for forming a crystalline sheet. The apparatus may include a crystallizer comprising a first gas channel and a second gas channel, wherein the first gas channel and second gas channel extend through the crystallizer to a lower surface of the crystallizer between an upstream edge and a downstream edge. The first gas channel may be disposed closer to the downstream edge than the second gas channel. A first gas source may be coupled to the first gas channel, where the first gas source comprises helium or hydrogen, and a second gas source may be coupled to the second gas channel, where the second gas source does not contain hydrogen or helium.
    Type: Application
    Filed: March 10, 2017
    Publication date: March 22, 2018
    Inventors: Peter L. Kellerman, Brian D. Kernan, Frederick M. Carlson, Dawei Sun, David Morrell
  • Publication number: 20180047864
    Abstract: A crystallizer for growing a crystalline sheet from a melt may include a cold block having a cold block surface that faces an exposed surface of the melt, the cold block configured to generate a cold block temperature at the cold block surface that is lower than a melt temperature of the melt at the exposed surface. The system may also include a nozzle disposed within the cold block and configured to deliver a gas jet to the exposed surface, wherein the gas jet and the cold block are interoperative to generate a process zone that removes heat from the exposed surface at a first heat removal rate that is greater than a second heat removal rate from the exposed surface in outer regions outside of the process zone.
    Type: Application
    Filed: March 27, 2014
    Publication date: February 15, 2018
    Applicant: Varian Semiconductor Equipment Associates, Inc.
    Inventors: Peter L. Kellerman, Brian Mackintosh, Frederick M. Carlson, David Morrell, Ala Moradian, Nandish Desai, Dawei Sun, Frank Sinclair
  • Patent number: 9587324
    Abstract: An apparatus for processing a melt may include a crucible configured to contain the melt, where the melt has an exposed surface that is separated from a floor of the crucible by a first distance. The apparatus may further include a submerged heater comprising a heating element and a shell disposed between the heating element and the melt, wherein the heating element does not contact the melt. The heating element may be disposed at a second distance with respect to the exposed surface of the melt that is less than the first distance.
    Type: Grant
    Filed: May 12, 2014
    Date of Patent: March 7, 2017
    Assignee: Varian Semiconductor Equipment Associates, Inc.
    Inventors: Frederick M. Carlson, Peter L. Kellerman, David Morrell, Brian Mackintosh, Nandish Desai