Patents by Inventor David Mushell

David Mushell has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Pellicle frame and lithographic pellicle
    Patent number: 8467035
    Abstract: A pellicle frame is provided that includes a pellicle frame bar having a cross-section with a shape that has at least one triangular recess in at least one side edge of a quadrilateral having an upper edge and a lower edge parallel to each other and a cross-sectional area of no greater than 20 mm2. There is also provided a lithographic pellicle that includes a pellicle film stretched over one end face of the pellicle frame via a pellicle film adhesive, and that includes an exposure master plate adhesive on the other end face.
    Type: Grant
    Filed: June 21, 2010
    Date of Patent: June 18, 2013
    Assignees: Shin-Etsu Chemical Co., Ltd., Intel Corporation
    Inventors: Toru Shirasaki, Kishore Chakravorty, David Mushell, Grace Ng
  • Pellicle frame and lithographic pellicle
    Patent number: 8221944
    Abstract: A pellicle frame is provided that comprises a pellicle frame bar having a quadrilateral cross-section, wherein an upper edge and a lower edge of a basic quadrilateral forming said cross-section are parallel to each other and each of side edges of the basic quadrilateral has one quadrilateral recess. There is also provided a lithographic pellicle that includes a pellicle film stretched over one end face of the pellicle frame via a pellicle film adhesive, and that includes an exposure master plate adhesive on the other end face.
    Type: Grant
    Filed: June 21, 2010
    Date of Patent: July 17, 2012
    Assignees: Shin-Etsu Chemical Co., Ltd., Intel Corporation
    Inventors: Toru Shirasaki, Kishore Chakravorty, David Mushell, Grace Ng
  • Pellicle frame and lithographic pellicle
    Patent number: 8221945
    Abstract: A pellicle frame is provided that includes a pellicle frame bar having a cross-section with a shape that has a curved line-containing recess in at least one side edge of a quadrilateral having an upper edge and a lower edge parallel to each other and an area of no greater than 20 mm2.
    Type: Grant
    Filed: June 21, 2010
    Date of Patent: July 17, 2012
    Assignees: Shin-Etsu Chemical Co., Ltd., Intel Corporation
    Inventors: Toru Shirasaki, Kishore Chakravorty, David Mushell, Grace Ng
  • Use of soft adhesive to attach pellicle to reticle
    Patent number: 7901847
    Abstract: A pellicle is attached to a reticle by a soft adhesive. The distortion of the reticle is less than if a hard adhesive were used.
    Type: Grant
    Filed: December 8, 2008
    Date of Patent: March 8, 2011
    Assignee: Intel Corporation
    Inventors: David Mushell, Henry Yun
  • PELLICLE FRAME AND LITHOGRAPHIC PELLICLE
    Publication number: 20100328641
    Abstract: A pellicle frame is provided that includes a pellicle frame bar having a cross-section with a shape that has at least one triangular recess in at least one side edge of a quadrilateral having an upper edge and a lower edge parallel to each other and a cross-sectional area of no greater than 20 mm2. There is also provided a lithographic pellicle that includes a pellicle film stretched over one end face of the pellicle frame via a pellicle film adhesive, and that includes an exposure master plate adhesive on the other end face.
    Type: Application
    Filed: June 21, 2010
    Publication date: December 30, 2010
    Applicants: SHIN-ETSU CHEMICAL CO., LTD, INTEL CORPORATION
    Inventors: Toru SHIRASAKI, Kishore Chakravorty, David Mushell, Grace Ng
  • PELLICLE FRAME AND LITHOGRAPHIC PELLICLE
    Publication number: 20100330467
    Abstract: A pellicle frame is provided that includes a pellicle frame bar having a cross-section with a shape that has a curved line-containing recess in at least one side edge of a quadrilateral having an upper edge and a lower edge parallel to each other and an area of no greater than 20 mm2.
    Type: Application
    Filed: June 21, 2010
    Publication date: December 30, 2010
    Applicants: SHIN-ETSU CHEMICAL CO., LTD.,, INTEL CORPORATION
    Inventors: Toru Shirasaki, Kishore Chakravorty, David Mushell, Grace Ng
  • PELLICLE FRAME AND LITHOGRAPHIC PELLICLE
    Publication number: 20100330466
    Abstract: A pellicle frame is provided that comprises a pellicle frame bar having a quadrilateral cross-section, wherein an upper edge and a lower edge of a basic quadrilateral forming said cross-section are parallel to each other and each of side edges of the basic quadrilateral has one quadrilateral recess. There is also provided a lithographic pellicle that includes a pellicle film stretched over one end face of the pellicle frame via a pellicle film adhesive, and that includes an exposure master plate adhesive on the other end face.
    Type: Application
    Filed: June 21, 2010
    Publication date: December 30, 2010
    Applicants: SHIN-ETSU CHEMICAL CO., LTD., INTEL CORPORATION
    Inventors: Toru SHIRASAKI, Kishore Chakravorty, David Mushell, Grace Ng
  • Use of soft adhesive to attach pellicle to reticle
    Publication number: 20100143829
    Abstract: A pellicle is attached to a reticle by a soft adhesive. The distortion of the reticle is less than if a hard adhesive were used.
    Type: Application
    Filed: December 8, 2008
    Publication date: June 10, 2010
    Inventors: David Mushell, Henry Yun