Patents by Inventor David Oberlitner

David Oberlitner has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Semiconductor processing using vapor mixtures
    Patent number: 6319841
    Abstract: Processing methods and systems using vapor phase processing streams made from a liquid phase source and feed gas. Some versions use multiple liquid sources and multiple vapor generators which each produce vapors which are mixed. Some of the vapor generators use metering pumps to inject a controlled flow of liquid into a controlled flow of feed gas. In some embodiments the vapors are exsiccated to reduce saturation before being introduced as a processing chamber vapor mixture into a processing chamber. The semiconductor pieces are preferably rotated within the processing chamber and can be processed in batches.
    Type: Grant
    Filed: October 24, 2000
    Date of Patent: November 20, 2001
    Assignee: Semitool, Inc.
    Inventors: Eric J. Bergman, Robert W. Berner, David Oberlitner
  • Semiconductor processing using vapor mixtures
    Patent number: 6162734
    Abstract: Processing methods and systems using vapor phase processing streams made from a liquid phase source and feed gas. Some versions use multiple liquid sources and multiple vapor generators which each produce vapors which are mixed. Some of the vapor generators use metering pumps to inject a controlled flow of liquid into a controlled flow of feed gas. In some embodiments the vapors are exsiccated to reduce saturation before being introduced as a processing chamber vapor mixture into a processing chamber. The semiconductor pieces are preferably rotated within the processing chamber and can be processed in batches.
    Type: Grant
    Filed: July 1, 1999
    Date of Patent: December 19, 2000
    Assignee: Semitool, Inc.
    Inventors: Eric J. Bergman, Robert W. Berner, David Oberlitner
  • Semiconductor processing using vapor mixtures
    Patent number: 5954911
    Abstract: Processing methods and systems using vapor phase processing streams made from a liquid phase source and feed gas. Some versions use multiple liquid sources and multiple vapor generators which each produce vapors which are mixed. Some of the vapor generators use metering pumps to inject a controlled flow of liquid into a controlled flow of feed gas. In some embodiments the vapors are exsiccated to reduce saturation before being introduced as a processing chamber vapor mixture into a processing chamber. The semiconductor pieces are preferably rotated within the processing chamber and can be processed in batches.
    Type: Grant
    Filed: February 26, 1996
    Date of Patent: September 21, 1999
    Assignee: Semitool, Inc.
    Inventors: Eric J. Bergman, Robert W. Berner, David Oberlitner