Patents by Inventor David R. Peale
David R. Peale has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20110122398Abstract: In one embodiment, a radiation based analysis system comprises a first radiation source to generate first radiation having a wavelength outside the visible spectrum, a second radiation source to generate second radiation having a wavelength within the visible spectrum, and a waveguide coupler to couple a portion of the first radiation and a portion of the second radiation into a combined radiation beam such that the first radiation and the second radiation follow a path that is substantially coaxial.Type: ApplicationFiled: February 3, 2011Publication date: May 26, 2011Applicant: KLA-TENCOR CORPORATIONInventor: David R. Peale
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Patent number: 7916985Abstract: In one embodiment, a radiation based analysis system comprises a first radiation source to generate first radiation having a wavelength outside the visible spectrum, a second radiation source to generate second radiation having a wavelength within the visible spectrum, and a waveguide coupler to couple a portion of the first radiation and a portion of the second radiation into a combined radiation beam such that the first radiation and the second radiation follow a path that is substantially coaxial.Type: GrantFiled: August 24, 2007Date of Patent: March 29, 2011Assignee: KLA-Tencor CorporationInventor: David R. Peale
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Publication number: 20090067797Abstract: An integrated optical planar waveguide chip comprising materials and structures such as substrates, adhesives, capping materials, and waveguide structures which are absorbing at the wavelength of the working radiation.Type: ApplicationFiled: September 6, 2007Publication date: March 12, 2009Applicant: KLA-TENCOR TECHNOLOGIES CORPORATIONInventor: David R. Peale
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Patent number: 7433047Abstract: Runout characterization is performed on a moving body by positioning a light source and optical sensor at a nominal distance from the moving body, with a beam directed from the light source against a surface of the moving body. The reflected light is detected at a sampling rate with the optical sensor as the moving body moves, and a data stream of the measurements over time is stored. In the case where an interferometer is used as the optical sensor, relative distance measurements are made. The data stream is analyzed to detect repeating signatures in the data stream, where the signatures represent features on the surface of the moving body. At least one of the features is selected as a reference, and the data stream is processed into segments based on the reference, where each segment represents one period of motion of the moving body. The data segments are overlaid on top of each other to produce ordered sets of data points within the segments.Type: GrantFiled: February 16, 2007Date of Patent: October 7, 2008Assignee: KLA-Tencor CorporationInventors: David R. Peale, Dieter E. Mueller, Kyle A. Brown
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Publication number: 20080198385Abstract: In one embodiment, a radiation based analysis system comprises a first radiation source to generate first radiation having a wavelength outside the visible spectrum, a second radiation source to generate second radiation having a wavelength within the visible spectrum, and a waveguide coupler to couple a portion of the first radiation and a portion of the second radiation into a combined radiation beam such that the first radiation and the second radiation follow a path that is substantially coaxial.Type: ApplicationFiled: August 24, 2007Publication date: August 21, 2008Applicant: KLA-TENCOR TECHNOLOGIES CORPORATIONInventor: David R. Peale
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Patent number: 7333690Abstract: A multi-port planar evanescent coupler having N inputs and M outputs, where both N and M are each no less than three, formed of combinations of at least one of at least one planar evanescent 2×2 coupler and at least one planar evanescent 3×3 coupler subunits, with phase shifting segments in selected waveguides disposed between the planar evanescent coupler subunits. The multi-port planar evanescent coupler can be used in phase measurement and detection devices, such as interferometers, optical receivers, and laser gyroscopes.Type: GrantFiled: March 24, 2006Date of Patent: February 19, 2008Assignee: KLA-Tencor Technologies CorporationInventors: David R. Peale, Harald Hess
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Patent number: 6690849Abstract: An optical switch includes a plurality of first optical fibers, a plurality of second optical fibers, a first MEMS array, and a second MEMS array. The first MEMS array is optically coupled with the first optical fibers to receive optical signals from the first optical fibers and to direct the optical signals, wherein the first MEMS array defines a first array incidence angle between a normal direction to the first MEMS array and a direction of the received optical signals. The second MEMS array is optically coupled with the first MEMS array to receive the directed optical signals and to re-direct the directed optical signals with the second optical fibers wherein the second MEMS array defines a second array incidence angle between a normal direction to second MEMS array and a direction of the re-directed optical signals. The configuration of the components is provided to provide reduced optical losses.Type: GrantFiled: January 5, 2001Date of Patent: February 10, 2004Assignee: Tellium, Inc.Inventors: Jerry I. Dadap, Jr., Nicolas H. Bonadeo, Chauhan Daniel Lee, Keren Bergman, Igal Brener, David R. Peale, Kophu Chiang
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Patent number: 6633693Abstract: A temperature control system is provided for an optical switch including steerable micro-mirrors. The system includes at least one sensor and associated sensing circuitry for measuring the temperature of a micro-mirror or a region of a substrate near a micro-mirror. The system also includes a controller that responds to a signal provided by the sensing circuitry. The controller response may include activating heating or cooling devices the region that is sensed to adjust the temperature of the region.Type: GrantFiled: March 27, 2001Date of Patent: October 14, 2003Assignee: Tellium, Inc.Inventors: David R. Peale, Walter Framski, Lih Lin
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Patent number: 6480645Abstract: A structure and method for an optical switch is provided that includes providing sidewall electrodes with steerable micro-mirrors to position and control micro-mirror movement. The structure and method includes using the sidewall electrodes in conjunction with electrodes underlying a micro-mirror to sense capacitance present between a micro-mirror and underlying electrodes and/or sidewall electrodes, and driving the electrodes underlying the micro-mirror and the sidewall electrodes to move the micro-mirror into an angular position. The electrode structures and methods of driving them may be used in systems with closed loop feedback control to reduce transient mirror settling time and provide substantial immunity to system perturbations when micro-mirrors switch an optical signal from an input fiber to an output fiber of the optical switch, or when a micro-mirror is held at an angular position over long time scales.Type: GrantFiled: January 30, 2001Date of Patent: November 12, 2002Assignee: Tellium, Inc.Inventors: David R. Peale, Patrick Breckow Chu, Sangtae Park, Nicolas H. Bonadeo, Shi-Sheng Lee, Ming-Ju Tsai
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Patent number: 5625617Abstract: Near-field optical apparatus according to the invention contains a novel semiconductor laser photon source. The source is capable of providing substantially higher photon flux than prior art near field sources, potentially facilitating read-out rates in the megahertz range in exemplary near-field data storage and retrieval apparatus. The novel source comprises a non-uniform laser emission face, with the emission face configured such that at least 50% of the total radiation emission is from a small (first) region of the emission face, of width less than .lambda..sub.s /2, where .lambda..sub.s is the emission wavelength of the laser. In an exemplary embodiment, a multilayer coating is provided on the emission face, such that radiation emission from the face is relatively low. A recess is formed in the coating such that substantial radiation emission from the recess occurs. The recess constitutes the first region.Type: GrantFiled: September 6, 1995Date of Patent: April 29, 1997Assignee: Lucent Technologies Inc.Inventors: Leslie C. Hopkins, Cherry A. Murray, Afshin Partovi, David R. Peale, Hsi-jen J. Yeh, George J. Zydzik