Abstract: Methods and apparatus for obtaining a liquid material for an analysis. Provided are a sample container, a sample tube, a vacuum tube, and a vacuum generator. The sample tube forms a fluid path between the liquid to be sampled and the storage container. The vacuum tube forms a fluid path between the sample container and the vacuum generator. The vacuum generator creates a partial vacuum, or suction, which draws liquid material through the sample tube and into the sample container.

Abstract: Methods for determining the amount of at least one metal analyte present in a liquid or gas sample of a halosilane supply (e.g., a chlorosilane supply) are disclosed herein. A sample of a halosilane supply is contacted and reacted with an aqueous hydrofluoric acid solution to produce a liquid reaction mixture. Liquid from the liquid reaction mixture is evaporated under controlled temperature and pressure conditions to near dryness. The nearly-dry residue is prepared for spectral analysis. The presence of a detectable amount of at least one metal analyte is determined for the sample.

Abstract: An ultraclean evaporation system which includes a vessel formed of a fluoropolymer inert to hydrogen peroxide and having an impurity level less than the impurity level of samples to be analyzed therein, preferably perfluoroalkoxy (PFA). A radiant heater is spaced from the vessel for uniformly heating the contents of the vessel. A shield, manufactured of aluminum and coated with a fluoropolymer encases the vessel alone or in conjunction with the heater. An inert gas supply is coupled to the vessel with a coupler of fluoropolymer inert to hydrogen peroxide, preferably PFA. An output is provided from the vessel formed of a fluoropolymer inert to hydrogen peroxide, preferably PFA. An orifice is provided which is formed of a fluoropolymer inert to hydrogen peroxide, preferably PFA, for controlling the flow rate of the inert gas supply. The tubing has a length of at least about 3 meters. The vessel has a side wall and a bottom forming a corner and is disposed so that the corner is the lowest region of the vessel.

Abstract: An anhydrous ammonia gas sampler and concentration system (10) and method is disclosed that facilitates the collection and evaporation of large volumes of anhydrous ammonia in a safe, clean environment. The ammonia is collected and frozen in two containers (12, 14) connected in series and immersed in a liquid nitrogen bath (42). The frozen ammonia is evaporated through a very slow evaporation process after the containers are removed from the liquid nitrogen bath. The resultant contaminant concentrate provides the means by which a more accurate calculation of the percentage of contaminants in an ammonia sample may be made.