Abstract: Apparatus and method for producing fibrous materials in which the apparatus includes an extrusion element configured to electrospin a substance from which the fibers are to be composed by an electric field extraction of the substance from a tip of the extrusion element, a collector disposed from the extrusion element and configured to collect the fibers, a chamber enclosing the collector and the extrusion element, and a control mechanism configured to control a gaseous environment in which the fibers are to be electrospun. The method includes providing a substance from which the fibers are to be composed to a tip of an extrusion element, applying an electric field to the extrusion element in a direction of the tip, controlling a gaseous environment about where the fibers are to be electrospun, and electrospinning the substance from the tip of the extrusion element by an electric field extraction of the substance from the tip into the controlled gaseous environment.

Abstract: Apparatus and method for electrospinning fibers in which the apparatus includes a spray head having a longitudinal axis and including at least one electrospinning element disposed in a peripheral wall of the spray head surrounding the longitudinal axis. The electrospinning element includes a passage by which a substance from which the fibers are to be electrospun is provided to a tip of the extrusion electrospinning element. The electrospinning element extends from the peripheral wall in a direction from the longitudinal axis and is configured to electrospin the fibers by electric field extraction of the substance from the tip of the extrusion electrospinning element.

Abstract: A device for controlling the motion of particles suspended in a gas stream is provided, including a pipe, through which at least a fraction of the gas stream flows, a source of AC voltage, a source of DC voltage, and a plurality of electrode sets positioned within the pipe in series, generating an inhomogeneous electric field to cause the particles suspended in the gas stream to concentrate into a narrow axial region in the center of the pipe. Each electrode set includes a first pair of opposed hyperboloidally shaped electrodes connected to the AC voltage source and a second pair of opposed hyperboloidally shaped electrodes connected to the DC voltage. The first and second pairs of opposed electrodes are positioned at spaced apart intervals around the circumference of the pipe to define an opening through which at least a fraction of the gas stream flows. The electrode sets are positioned within the pipe in series such that the gas stream flows through the openings defined by each successive electrode set.

Abstract: The concentration of non-volatile residue in a test solvent is determined by generating multiple liquid droplets from a liquid stream including the solvent and ultrapure water. The droplets are dried to form a stream of multiple particles of the non-volatile residue. A supply of ultrapure deionized water is caused to flow continuously toward a non-volatile residue monitor, at a constant fluid flow rate. Upstream of the residue monitor, a syringe is provided for intermittently injecting a test solvent into the fluid stream. In one case, the solvent is injected for several minutes at a constant flow rate substantially less than that of the ultrapure water. A mixing valve, downstream of the point of solvent introduction, causes turbulent flow to thoroughly mix the solvent and water. In an alternative approach, a syringe is used to instantaneously inject solvent in the form of bursts.

Abstract: An apparatus and method including a droplet coating generator for generating a stream of electrically charged coating droplets within an evacuable chamber towards a substrate positioned within the evacuable chamber. A piezoelectric vibrator and orifice plate coupled thereto generate the stream of coating droplets. The coating droplets are urged to move in a sweeping motion across the substrate by at least one pair of opposing spaced apart electrodes powered by an electrical power supply. A uniform coating is thus produced while the evacuable chamber is maintained at subatmospheric pressure as required during typical semiconductor processing. Multiple applications of a photoresist coating may be applied by the coating apparatus without requiring that the evacuable chamber be repeatedly vented and pumped down to subatmospheric pressure.

Abstract: A measurement system for microelectronic clean rooms to measure ultrafine particle size distribution in the range of 0.002 to 0.2 micrometers is provided which includes four screen diffusion stages each connected in series with a condensation nucleus detector. The input to each screen diffusion stage is connected to a localized area to be measured, and the output of each condensation nucleus detector is connected to a vacuum system which simultaneously draws particle bearing air through the four channels. The output signals of the condensation nucleus detectors present particle size distributiion. In one embodiment of the present invention, one or more optical particle detectors are connected in parallel with the diffusion stage-condensation nucleus detectors to expand the distribution measurements to larger sizes.