Abstract: Embodiments herein are directed to a linear accelerator assembly for an ion implanter. In some embodiments, a LINAC may include a coil resonator and a plurality of drift tubes coupled to the coil resonator by a set of flexible leads.

Abstract: Exemplary substrate processing systems may include a transfer region housing defining an internal volume. A sidewall of the transfer region housing may define a sealable access for providing and receiving substrates. The systems may include a plurality of substrate supports disposed within the transfer region. The systems may also include a transfer apparatus having a central hub including a first shaft and a second shaft concentric with and counter-rotatable to the first shaft. The transfer apparatus may include a first end effector coupled with the first shaft. The first end effector may include a plurality of first arms. The transfer apparatus may also include a second end effector coupled with the second shaft. The second end effector may include a plurality of second arms having a number of second arms equal to the number of first arms of the first end effector.

Abstract: A swivel drawer assembly is provided which finds general utility in automobile pass-through food dispensing establishments, and which comprises a horizontal tray mounted for swivel movement in a rectangular opening in the wall of the establishment about a first vertical axis at one side of the opening. First and second vertical doors are mounted at right angles to one another on one side of the tray with their junction at the first vertical axis, and third and fourth doors are independently swivelly mounted for rotation about a second vertical axis at the other side of the opening. The third and fourth doors are coupled to the tray through a cam action to be turned about the second vertical axis by the tray, and the assembly is such that when the tray is turned to one limiting position the first and third doors close the opening, and when the tray is turned to its second limiting position the second and fourth doors close the opening.