Patents by Inventor David Y. Pui

David Y. Pui has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Real-time monitoring of particles in semiconductor vacuum environment
    Patent number: 7655945
    Abstract: An apparatus includes semiconductor processing equipment. A particle detecting integrated circuit is positioned in a vacuum environment, the particle detecting integrated circuit containing a device having a pair of conductive lines exposed to the vacuum environment. The pair of conductive lines is spaced at a critical pitch corresponding to diameters of particles of interest. A computer system is linked to the particle detecting integrated circuit to detect a change in an electrical property of the conductive lines when a particle becomes lodged between or on the lines.
    Type: Grant
    Filed: July 3, 2007
    Date of Patent: February 2, 2010
    Assignee: Regents of the University of Minnesota
    Inventors: David Y. Pui, Yi Liu, Christof Asbach, Heinz Fissan
  • REAL-TIME MONITORING OF PARTICLES IN SEMICONDUCTOR VACUUM ENVIRONMENT
    Publication number: 20090206820
    Abstract: An apparatus includes semiconductor processing equipment. A particle detecting integrated circuit is positioned in a vacuum environment, the particle detecting integrated circuit containing a device having a pair of conductive lines exposed to the vacuum environment. The pair of conductive lines is spaced at a critical pitch corresponding to diameters of particles of interest. A computer system is linked to the particle detecting integrated circuit to detect a change in an electrical property of the conductive lines when a particle becomes lodged between or on the lines.
    Type: Application
    Filed: July 3, 2007
    Publication date: August 20, 2009
    Inventors: David Y. Pui, Yi Liu, Christof Asbach, Heinz Fissan