Patents by Inventor Debashis De Munshi

Debashis De Munshi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for beam stabilization and reference correction for EUV inspection
    Patent number: 11293880
    Abstract: An inspection system and a method of using the same are disclosed. The inspection system comprises an illumination source configured to emit an extreme ultraviolet (EUV) illumination beam for illuminating a sample, one or more first multi-cell detectors configured to generate a first illumination intensity distribution signal based on a first photocurrent, one or more second multi-cell detectors configured to generate a second illumination intensity distribution signal based on a second photocurrent, a detector assembly configured to receive the illumination beam and generate images, and a controller configured to: receive the images from the detector assembly, calibrate the second illumination intensity distribution signal to the images by mapping distortions in the second illumination intensity distribution signal to distorted pixels in the images, increase or decrease intensities of the distorted pixels in the images to generate corrected images, and detect defects on the samples.
    Type: Grant
    Filed: December 3, 2020
    Date of Patent: April 5, 2022
    Assignee: KLA Corporation
    Inventors: Larissa Juschkin, Konstantin Tsigutkin, Debashis De Munshi
  • METHOD AND APPARATUS FOR BEAM STABILIZATION AND REFERENCE CORRECTION FOR EUV INSPECTION
    Publication number: 20210262944
    Abstract: An inspection system and a method of using the same are disclosed. The inspection system comprises an illumination source configured to emit an extreme ultraviolet (EUV) illumination beam for illuminating a sample, one or more first multi-cell detectors configured to generate a first illumination intensity distribution signal based on a first photocurrent, one or more second multi-cell detectors configured to generate a second illumination intensity distribution signal based on a second photocurrent, a detector assembly configured to receive the illumination beam and generate images, and a controller configured to: receive the images from the detector assembly, calibrate the second illumination intensity distribution signal to the images by mapping distortions in the second illumination intensity distribution signal to distorted pixels in the images, increase or decrease intensities of the distorted pixels in the images to generate corrected images, and detect defects on the samples.
    Type: Application
    Filed: December 3, 2020
    Publication date: August 26, 2021
    Applicant: KLA Corporation
    Inventors: Larissa Juschkin, Konstantin Tsigutkin, Debashis De Munshi