Patents by Inventor Deck Won Moon

Deck Won Moon has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Substrate processing system and substrate transferring method
    Patent number: 9252034
    Abstract: A substrate processing system and substrate transferring method is capable of improving substrate-transferring efficiency by transferring a substrate bi-directionally through a substrate transferring device between two rows of processing chambers, and transferring the substrate to a precise position by rotating the substrate transferring device. The processing system includes a transfer chamber, a bi-directional substrate transferring device; and processing chambers which apply a semiconductor-manufacturing process to the substrate. The processing chambers are linearly arranged along two confronting rows, and the transfer chamber is between the two rows of processing chambers.
    Type: Grant
    Filed: February 17, 2011
    Date of Patent: February 2, 2016
    Assignee: Jusung Engineering Co., LTD.
    Inventors: Kyoo Hwan Lee, Deck Won Moon, Jae Hwan Jang
  • Substrate Processing System and Substrate Transferring Method
    Publication number: 20130051957
    Abstract: A substrate processing system and substrate transferring method is capable of improving substrate-transferring efficiency by transferring a substrate bi-directionally through a substrate transferring device between two rows of processing chambers, and transferring the substrate to a precise position by rotating the substrate transferring device. The processing system includes a transfer chamber, a bi-directional substrate transferring device; and processing chambers which apply a semiconductor-manufacturing process to the substrate. The processing chambers are linearly arranged along two confronting rows, and the transfer chamber is between the two rows of processing chambers.
    Type: Application
    Filed: February 17, 2011
    Publication date: February 28, 2013
    Inventors: Kyoo Hwan Lee, Deck Won Moon, Jae Hwan Jang