Patents by Inventor Deepak Doddabelavangala Srikantaia

Deepak Doddabelavangala Srikantaia has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SEMICONDUCTOR CHAMBER COMPONENTS WITH MULTI-LAYER COATING
    Publication number: 20230290616
    Abstract: Exemplary semiconductor processing chambers may include a chamber body. The chambers may include a showerhead. The chambers may include a substrate support. The substrate support may include a platen characterized by a first surface facing the showerhead. The substrate support may include a shaft coupled with the platen along a second surface of the platen opposite the first surface of the platen. The shaft may extend at least partially through the chamber body. A coating may extend conformally about the first surface of the platen. The coating may include a first layer of silicon proximate the first surface of the platen, and may include a second layer of material overlying the first layer of silicon.
    Type: Application
    Filed: March 11, 2022
    Publication date: September 14, 2023
    Applicant: Applied Materials, Inc.
    Inventors: Laksheswar Kalita, Joseph F. Behnke, Deepak Doddabelavangala Srikantaia, Son T. Nguyen