Abstract: This patent relates to the fabrication of diaphragm-based microstructures used primarily for sensing physical phenomena by detecting a change in deflection, resonance, or curvature of the diaphragm. The methods of fabrication described and claimed herein relate primarily to diaphragm-based diaphragms made of silicon, either single crystal or polycrystalline in form, although other materials may be used.

Abstract: Low temperature wafer bonding process enhancement makes a wafer surface hydrophobic, preparing it with a buffered oxide etchant and then exposing it to H.sub.2 O.sub.2 before thermoelectric bonding. Has particular application to diaphragm-based pressure sensor construction.

Abstract: The formation of diaphragms by silicon wafer bonding provides for a structure having at least two such diaphragms with cavities in the wafers to which the diaphragm layer is bonded. Passageways through the wafers provide for communication of a fluid to the diaphragms. In some locations less than all of a plurality of diaphragms may be bonded to only one wafter having a cavity adjacent the diaphragm.

Abstract: The discharge rate and internal conductivity of electrochemical cell including a lithium anode, and a cathode and an electrolyte including LiAlCl.sub.4 and SOCl.sub.2 is improved by the addition of an amount of a mixture containing AlCl.sub.3 and Butyl Pyridinium Chloride.

Abstract: An electrolyte for use in rechargeable electrochemical cells having a lithium electrode and a depolarizer which includes an electrochemically active amount of LiAsF.sub.6 dissolved in tetrahydrofuran and a rechargeability improving amount of LiI contained therein to form an electrolyte solution, said solution being capable of passing through a molecular sieve of less than 5 Angstroms. A preferred embodiment includes a 1 molar solution of the LiAsF.sub.6 and from about 0.8 to 1.4 molar solution of LiI.

Abstract: An electrolyte solution for use in rechargeable electrochemical cells having nickel substrate as working electrode and lithium counter electrode and an electrochemically active amount of LiAsF.sub.6 dissolved in dimethyl sulfite and a rechargeability improving amount of lithium carbonate, Li.sub.2 CO.sub.3, contained therein to form electrolyte solution, said solution being capable of passing through a molecular sieve of less than about 5 Angstroms has been developed. A preferred embodiment includes a one molar solution of the LiAsF.sub.6 and from about 0.07 to 0.14 molar solution of Li.sub.2 CO.sub.3. The electrolyte solution has 85-90 percent efficiency for cycling lithium on nickel substrate.