Patents by Inventor Delvin A. Lindley

Delvin A. Lindley has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method, system, and software for evaluating characteristics of a surface with reference to its edge
    Patent number: 7324917
    Abstract: A method and software is disclosed for evaluating characteristics, such as flatness, of a surface of a sample having an edge, comprising selecting an evaluation area having an area surface and a boundary, at least one portion of which is definable with reference to the edge, and evaluating characteristics of the area surface. Edge-specific evaluation conditions are used with edge-specific metrics to quantify parameters for said evaluation area. A system for evaluating such characteristics comprises a data collection system for generating data values for selected locations on said surface; and a data analyzing system for analyzing data values to determine such characteristics. A data interpolation system may be provided to interpolate data values collected with reference to a first coordinate system for analyzing with reference to a second coordinate system.
    Type: Grant
    Filed: July 1, 2005
    Date of Patent: January 29, 2008
    Assignee: KLA-Tencor Technologies Corporation
    Inventors: Chris L. Koliopoulos, Jaydeep K. Sinha, Delvin A. Lindley, John F. Valley, Noel Poduje
  • Method, system, and software for evaluating characteristics of a surface with reference to its edge
    Publication number: 20060004542
    Abstract: A method and software is disclosed for evaluating characteristics, such as flatness, of a surface of a sample having an edge, comprising selecting an evaluation area having an area surface and a boundary, at least one portion of which is definable with reference to the edge, and evaluating characteristics of the area surface. Edge-specific evaluation conditions are used with edge-specific metrics to quantify parameters for said evaluation area. A system for evaluating such characteristics comprises a data collection system for generating data values for selected locations on said surface; and a data analyzing system for analyzing data values to determine such characteristics. A data interpolation system may be provided to interpolate data values collected with reference to a first coordinate system for analyzing with reference to a second coordinate system.
    Type: Application
    Filed: July 1, 2005
    Publication date: January 5, 2006
    Inventors: Chris Koliopoulos, Jaydeep Sinha, Delvin Lindley, John Valley, Noel Poduje