Patents by Inventor Dennis M. Brabender

Dennis M. Brabender has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Sputtering apparatus including target mounting and control
    Patent number: 9738967
    Abstract: A sputtering chamber includes at least two sputtering targets, one of the at least two targets disposed on a first side a substrate conveyor extending within the chamber, and another of the at least two targets disposed on a second side of the conveyor. The at least two targets may be independently operable, and at least one of the targets, if inactivated, may be protected by a shielding apparatus. Both of the at least two targets may be mounted to a first wall of a plurality of walls enclosing the sputtering chamber.
    Type: Grant
    Filed: September 25, 2012
    Date of Patent: August 22, 2017
    Assignee: CARDINAL CG COMPANY
    Inventors: Dennis M Brabender, Jeffrey L Kokoschke
  • Sputtering apparatus including novel target mounting and/or control
    Publication number: 20080011599
    Abstract: A sputtering chamber includes at least two sputtering targets, one of the at least two targets disposed on a first side a substrate conveyor extending within the chamber, and another of the at least two targets disposed on a second side of the conveyor. The at least two targets may be independently operable, and at least one of the targets, if inactivated, may be protected by a shielding apparatus. Both of the at least two targets may be mounted to a first wall of a plurality of walls enclosing the sputtering chamber.
    Type: Application
    Filed: July 12, 2006
    Publication date: January 17, 2008
    Inventors: Dennis M. Brabender, Jeffrey L. Kokoshke