Abstract: Apparatuses, systems and methods associated with a metrology system for high-speed, non-contact coordinate measurements of parts are disclosed herein. In embodiments, the metrology system includes a metrology bridge to be coupled to a measurement assembly. The measurement assembly may include a stage moveable across multiple independent axes. The bridge may include a housing, mounting members coupled to the housing, and a plurality of sensors mounted within the housing. The mounting members may rotatably couple the housing to the measurement assembly. Further, sensor elements of the plurality of sensor devices may be aligned along a length of the housing and may be directed out of the housing.

Abstract: Apparatuses, systems and methods associated with a metrology system for high-speed, non-contact coordinate measurements of parts are disclosed herein. In embodiments, the metrology system includes a metrology bridge to be coupled to a measurement assembly. The measurement assembly may include a stage moveable across multiple independent axes. The bridge may include a housing, mounting members coupled to the housing, and a plurality of sensors mounted within the housing. The mounting members may rotatably couple the housing to the measurement assembly. Further, sensor elements of the plurality of sensor devices may be aligned along a length of the housing and may be directed out of the housing.

Abstract: Apparatuses, systems and methods associated with a metrology system for high-speed, non-contact coordinate measurements of parts are disclosed herein. In embodiments, the metrology system includes a metrology bridge to be coupled to a measurement assembly. The measurement assembly may include a stage moveable across multiple independent axes. The bridge may include a housing, mounting members coupled to the housing, and a plurality of sensors mounted within the housing. The mounting members may rotatably couple the housing to the measurement assembly. Further, sensor elements of the plurality of sensor devices may be aligned along a length of the housing and may be directed out of the housing.

Abstract: Apparatuses, systems and methods associated with a metrology system for high-speed, non-contact coordinate measurements of parts are disclosed herein. In embodiments, the metrology system includes a metrology bridge to be coupled to a measurement assembly. The measurement assembly may include a stage moveable across multiple independent axes. The bridge may include a housing, mounting members coupled to the housing, and a plurality of sensors mounted within the housing. The mounting members may rotatably couple the housing to the measurement assembly. Further, sensor elements of the plurality of sensor devices may be aligned along a length of the housing and may be directed out of the housing.

Abstract: Apparatuses, systems and methods associated with a metrology system for high-speed, non-contact coordinate measurements of parts are disclosed herein. In embodiments, the metrology system includes a metrology bridge to be coupled to a measurement assembly. The measurement assembly may include a stage moveable across multiple independent axes. The bridge may include a housing, mounting members coupled to the housing, and a plurality of sensors mounted within the housing. The mounting members may rotatably couple the housing to the measurement assembly. Further, sensor elements of the plurality of sensor devices may be aligned along a length of the housing and may be directed out of the housing.

Abstract: Simultaneous-view object insertion systems, apparatuses and methods are described herein. In various embodiments, an object insertion device may be configured to be moveable along a path to insert an object through a defined space that lies along the path. In various embodiments, a mirror assembly may be positioned between the object insertion device and the defined space to simultaneously direct, from one or more perspectives along the path, first light from a direction of the defined space towards a first vantage point for viewing and second light from a direction of the object towards a second vantage point for viewing, wherein the direction of the defined space is different from the direction of the object. In various embodiments, the mirror assembly may be configured to move away from the path to allow the object insertion device to pass toward the defined space.

Abstract: The present invention generally provides a batch substrate processing system, or cluster tool, for in-situ processing of a film stack used to form regions of a solar cell device. In one configuration, the film stack formed on each of the substrates in the batch contains one or more silicon-containing layers and one or more metal layers that are deposited and further processed within the various chambers contained in the substrate processing system. In one embodiment, a batch of solar cell substrates is simultaneously transferred in a vacuum or inert environment to prevent contamination from affecting the solar cell formation process.

Abstract: An apparatus and method for processing the solar cell substrates is provided. In one embodiment, a laser firing chamber for processing solar cell substrates placed in a carrier, comprising a laser module located at a side of the carrier, the laser module being adapted to generate and direct multiple laser beams over an entire surface of a plurality of solar cell substrates, and a transport adapted to convey the carrier through an outputting region of the laser beams.

Abstract: An apparatus and method for processing the solar cell substrates is provided. In one embodiment, a laser firing chamber for processing solar cell substrates placed in a carrier, comprising a laser module located at a side of the carrier, the laser module being adapted to generate and direct multiple laser beams over an entire surface of a plurality of solar cell substrates, and a transport adapted to convey the carrier through an outputting region of the laser beams.

Abstract: The present invention generally provides a batch substrate processing system, or cluster tool, for in-situ processing of a film stack used to form regions of a solar cell device. In one configuration, the film stack formed on each of the substrates in the batch contains one or more silicon-containing layers and one or more metal layers that are deposited and further processed within the various chambers contained in the substrate processing system.

Abstract: A system and a method provide a vacuum seal to be used when mounting an optical device onto a process chamber or a pump line removing exhaust gas from a process chamber. The system of the present invention includes: (a) a threaded nipple, having an internal mating surface and a threaded external surface, that is attached to the process chamber or to the pump line; (b) an internally threaded coupling, provided for accommodating the optical device, that is screwed onto the threaded external surface of the nipple, and having internally a first mating surface touching the internal mating surface of the nipple and a second mating surface; (c) a window placed on the second mating surface of the coupling; (d) means for creating a vacuum seal, e.g. an elastomer O-ring, between the first mating surface of the coupling and the mating surface of the nipple; and (e) means for creating a vacuum seal, e.g. an elastomer O-ring, between the second mating surface of the coupling and the mating surface of the window.

Abstract: A structure and a method provide a quasi bright field particle sensor for the detection of non-spherical particles, using a laser beam of predetermined polarization. A phase shift caused by non-spherical particles passing through the laser beam is utilized to detect the presence of such particles. In one embodiment, a single laser beam is used to detect the concentration of non-spherical particles in the pump line receiving the exhaust gas from a process chamber.