Abstract: A method of purging a substrate carrier at a load port includes: opening a door of a substrate carrier that is delivered to a load port; spraying the substrate carrier with a gas flow responsive to the opening the door; mapping substrates within the substrate carrier to generate a substrate map; determining a process purge state based on the substrate map; and activating one or more inter-substrate nozzle arrays and one or more curtain nozzle arrays using a predefined spray status configuration for the process purge state.

Abstract: A method of purging a substrate carrier at a load port includes: opening a door of a substrate carrier that is delivered to a load port; spraying the substrate carrier with a gas flow responsive to the opening the door; mapping substrates within the substrate carrier to generate a substrate map; determining a process purge state based on the substrate map; and activating one or more inter-substrate nozzle arrays and one or more curtain nozzle arrays using a predefined spray status configuration for the process purge state.

Abstract: Embodiments of the present invention provide systems, apparatus, and methods for purging a substrate carrier. Embodiments include a frame configured to sit proximate to a load port door without interfering with operation of a factory interface or equipment front end module robot; one or more inter-substrate nozzle arrays supported by the frame and configured to spray gas into a substrate carrier; and one or more curtain nozzle arrays supported by the frame and configured to spray gas across an opening of the substrate carrier. Numerous additional aspects are disclosed.

Abstract: A method for operating a smart tool monitoring system is described. The method includes monitoring, by a controller within a smart tool monitoring system, a first parameter associated with a first component internal to the smart tool monitoring system. The method also includes determining, by the controller, whether the first parameter satisfies a first criterion. The method also includes performing a first action in response to a determination that the first parameter satisfies the first criterion. The method also includes receiving a measurement value from a sensor of an article of manufacturing equipment that includes a second component external to the smart tool monitoring system. The method also includes determining, by the controller, whether the measurement value satisfies a second criterion. The method also includes performing a second action in response to a determination that the measurement value satisfies the second criterion.

Abstract: A method for operating a smart tool monitoring system is described. The method includes monitoring, by a controller within a smart tool monitoring system, a first parameter associated with a first component internal to the smart tool monitoring system. The method also includes determining, by the controller, whether the first parameter satisfies a first criterion. The method also includes performing a first action in response to a determination that the first parameter satisfies the first criterion. The method also includes receiving a measurement value from a sensor of an article of manufacturing equipment that includes a second component external to the smart tool monitoring system. The method also includes determining, by the controller, whether the measurement value satisfies a second criterion. The method also includes performing a second action in response to a determination that the measurement value satisfies the second criterion.

Abstract: Embodiments of the present invention provide systems, apparatus, and methods for purging a substrate carrier. Embodiments include a frame configured to sit proximate to a load port door without interfering with operation of a factory interface or equipment front end module robot; one or more inter-substrate nozzle arrays supported by the frame and configured to spray gas into a substrate carrier; and one or more curtain nozzle arrays supported by the frame and configured to spray gas across an opening of the substrate carrier. Numerous additional aspects are disclosed.