Patents by Inventor DHRITIMAN S. KASHYAP

DHRITIMAN S. KASHYAP has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Cascade design showerhead for transient uniformity
    Patent number: 9353439
    Abstract: An apparatus for use in semiconductor processing operations to distribute process gases across a semiconductor wafer. The apparatus may include one or more annular baffles arranged in a stack of annular baffle layers within a plenum volume of the apparatus. Each annular baffle may have a mid-diameter substantially equal to and inner diameter or outer diameter of a baffle in the annular baffle layer above it. The annular baffles may be arranged in a cascading fashion.
    Type: Grant
    Filed: April 5, 2013
    Date of Patent: May 31, 2016
    Assignee: Lam Research Corporation
    Inventors: Dhritiman S. Kashyap, David G. Cohen, Davinder Sharma
  • CASCADE DESIGN SHOWERHEAD FOR TRANSIENT UNIFORMITY
    Publication number: 20140299681
    Abstract: An apparatus for use in semiconductor processing operations to distribute process gases across a semiconductor wafer. The apparatus may include one or more annular baffles arranged in a stack of annular baffle layers within a plenum volume of the apparatus. Each annular baffle may have a mid-diameter substantially equal to and inner diameter or outer diameter of a baffle in the annular baffle layer above it. The annular baffles may be arranged in a cascading fashion.
    Type: Application
    Filed: April 5, 2013
    Publication date: October 9, 2014
    Inventors: DHRITIMAN S. KASHYAP, DAVID G. COHEN, DAVINDER SHARMA