Patents by Inventor Diane M. King

Diane M. King has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Stable, oxide-free silicon surface preparation
    Patent number: 6620743
    Abstract: Methods are provided for producing a hydrogen-terminated silicon wafer surface with high stability against oxidation. The silicon wafer is cleaned with ammonium hydroxide/hydrogen peroxide/water, etched with high purity, heated dilute hydrofluoric acid, rinsed in-situ with ultrapure water at room temperature, and is spin-dried with heat ionized purge gas. The stability of the surface of the silicon wafer is assured by optimizing to minimize particle addition at each step. The silicon wafer produced by the method is stable in a normal clean room environment for greater than 3 days and has been demonstrated to last without significant oxide regrowth for greater than 7 days.
    Type: Grant
    Filed: March 26, 2001
    Date of Patent: September 16, 2003
    Assignee: ASM America, Inc.
    Inventors: Robert H. Pagliaro, Jr., Mitchell L. Doty, Diane M. King
  • Stable, oxide-free silicon surface preparation
    Publication number: 20030005944
    Abstract: Methods are provided for producing a hydrogen-terminated silicon wafer surface with high stability against oxidation. The silicon wafer is cleaned with ammonium hydroxide/hydrogen peroxide/water, etched with high purity, heated dilute hydrofluoric acid, rinsed in-situ with ultrapure water at room temperature, and is spin-dried with heat ionized purge gas. The stability of the surface of the silicon wafer is assured by optimizing to minimize particle addition at each step. The silicon wafer produced by the method is stable in a normal clean room environment for greater than 3 days and has been demonstrated to last without significant oxide regrowth for greater than 7 days.
    Type: Application
    Filed: March 26, 2001
    Publication date: January 9, 2003
    Inventors: Robert H. Pagliaro, Mitchell L. Doty, Diane M. King