Patents by Inventor Dinesh N. Khanna
Dinesh N. Khanna has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 7582127Abstract: The invention provides a method of chemically-mechanically polishing a substrate comprising tungsten through use of a composition comprising a tungsten etchant, an inhibitor of tungsten etching, and water, wherein the inhibitor of tungsten polishing is a polymer, copolymer, or polymer blend comprising at least one repeating group comprising at least one nitrogen-containing heterocyclic ring or a tertiary or quaternary nitrogen atom. The invention further provides a chemical-mechanical polishing composition particularly useful in polishing tungsten-containing substrates.Type: GrantFiled: February 1, 2007Date of Patent: September 1, 2009Assignee: Cabot Microelectronics CorporationInventors: Robert Vacassy, Dinesh N. Khanna, Alexander Simpson
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Patent number: 7247567Abstract: The invention provides a method of chemically-mechanically polishing a substrate comprising tungsten through use of a composition comprising a tungsten etchant, an inhibitor of tungsten etching, and water, wherein the inhibitor of tungsten polishing is a polymer, copolymer, or polymer blend comprising at least one repeating group comprising at least one nitrogen-containing heterocyclic ring or a tertiary or quaternary nitrogen atom. The invention further provides a chemical-mechanical polishing composition particularly useful in polishing tungsten-containing substrates.Type: GrantFiled: June 16, 2004Date of Patent: July 24, 2007Assignee: Cabot Microelectronics CorporationInventors: Robert Vacassy, Dinesh N. Khanna, Alexander Simpson
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Publication number: 20020061473Abstract: A method of coupling a diazonium salt with an organic polymer comprising, on order, the steps of: providing a polymer in one liquid phase; providing a diazonium salt in a separate liquid phase; contacting the separate phases, and thereby reacting the polymer and the diazonium salt.Type: ApplicationFiled: November 9, 2001Publication date: May 23, 2002Inventors: Jianhui Shan, Shuji Ding, Eleazar B. Gonzalez, Dinesh N. Khanna
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Patent number: 6368421Abstract: The invention relates to the field of microelectronics, such as integrated circuits, and more particularly to compositions and methods of removing photoresists or other organic materials from the surfaces of substrates used in the fabrication of integrated circuits. In particular the present invention relates to amine-free stripping compositions comprising solvent and surfactant that can effectively remove organic materials without corroding the underlying substrate, and the invention also relates to methods for removing these organic materials with the novel stripping composition.Type: GrantFiled: July 10, 1998Date of Patent: April 9, 2002Assignee: Clariant Finance (BVI) LimitedInventors: Joseph E. Oberlander, Mark S. Slezak, Dinesh N. Khanna, Dana L. Durham, Lawrence F. Spinicelli
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Patent number: 6346361Abstract: A method of coupling a diazonium salt with an organic polymer comprising, on order, the steps of: providing a polymer in one liquid phase; providing an diazonium salt in a separate liquid phase; contacting the separate phases, and thereby reacting the polymer and the diazonium salt.Type: GrantFiled: October 6, 1999Date of Patent: February 12, 2002Assignee: Clariant Finance (BVI) LimitedInventors: Jianhui Shan, Shuji Ding, Eleazar B. Gonzalez, Dinesh N. Khanna
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Patent number: 6187506Abstract: The present invention relates to a novel antireflective coating solution and a process for its use in photolithography. The antireflective coating solution comprises a novel polymer and an organic solvent or mixture of solvents, where the novel polymer comprises a unit containing a dye that absorbs from about 180 nm to about 450 nm and does not contain a crosslinking group.Type: GrantFiled: August 5, 1999Date of Patent: February 13, 2001Assignee: Clariant Finance (BVI) LimitedInventors: Shuji Ding, Dinesh N. Khanna, Mark A. Spak, Dana L. Durham, Jianhui Shan, Eleazer Gonzalez
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Patent number: 6106995Abstract: The present invention relates to an antireflective coating composition comprising an admixture of:a) a polymer defined by the following structure: ##STR1## where, R.sub.1 & R.sub.2 are independently hydrogen, or C.sub.1 to C.sub.5 alkylR.sub.3 is a methyl, ethyl, propyl or butyl groupR.sub.4 -R.sub.7 are independently hydrogen, or C.sub.1 to C.sub.5 alkyln=10 to 50,000(b) a fluorine-containing, sparingly water-soluble (0.1%-10% by weight in water) organic C.sub.3 -C.sub.13 aliphatic carboxylic acid;(c) a non-metallic hydroxide; and(d) a solvent.The invention also relates to a method for producing such an antireflective coating composition and to a method for producing a microelectronic device using such an antireflective coating composition in conjunction with a photoresist composition.Type: GrantFiled: August 12, 1999Date of Patent: August 22, 2000Assignee: Clariant Finance (BVI) LimitedInventors: Sunit S. Dixit, M. Dalil Rahman, Dinesh N. Khanna, Joseph E. Oberlander, Dana L. Durham
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Patent number: 5994430Abstract: The present invention relates to an antireflective coating composition comprising a novel polymer in a solvent composition. The invention further comprises processes for using the antireflective coating composition in photolithography. The antireflective coating composition comprises a novel polymer and a solvent composition, where the novel polymer of the antireflective coating comprises at least one unit containing a dye that absorbs from about 180 nm to about 450 nm and at least one unit that contains no aromatic funtionality. The solvent may be organic, preferrably, a solvent of low toxicity, or it may be water, which may additionally contain other water miscible organic solvents.Type: GrantFiled: April 30, 1997Date of Patent: November 30, 1999Assignee: Clariant Finance BVI) LimitedInventors: Shuji Ding, Ping-Hung Lu, Dinesh N. Khanna, Jianhui Shan, Dana L. Durham, Ralph R. Dammel, M. Dalil Rahman
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Patent number: 5981145Abstract: The present invention relates to a novel polymer suitable for use as an antireflective coating or as an additive in photoresist for absorption of reflected light. The novel polymer comprises at least one unit containing a dye that absorbs from about 180 nm to about 450 nm and at least one unit that contains no aromatic funtionality. The polymer is soluble in organic solvents, preferrably solvents of low toxicity, or it may be soluble in water, which may additionally contain other water miscible organic solvents.Type: GrantFiled: April 30, 1997Date of Patent: November 9, 1999Assignee: Clariant Finance (BVI) LimitedInventors: Shuji Ding, Dinesh N. Khanna, Ping-Hung Lu, Jianhui Shan, Ralph R. Dammel, Dana L. Durham, M. Dalil Rahman, Iain McCulloch
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Patent number: 5976761Abstract: A process for producing a water insoluble, aqueous alkali soluble, film forming novolak resin having low metal ions, made by the fractionation of a phenol formaldehyde condensation product, a process for producing a resin a photoresist composition of superior quality containing such novolak resin, and a method for producing a semiconductor device using such photoresist composition.Type: GrantFiled: March 25, 1998Date of Patent: November 2, 1999Assignee: Clariant Finance (BVI) LimitedInventors: M. Dalil Rahman, Daniel P. Aubin, Dinesh N. Khanna, Sunit S. Dixit
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Patent number: 5876897Abstract: A light sensitive positive composition comprising an alkali soluble resin, a novel photoactive compound represented by the structure ##STR1## where, X is O, S or N--R', where R' is H, alkyl, substituted alkyl, aryl or aralkyl,Y is a connecting group such as SO.sub.2, CO, O or NR',Z is a carbon containing organic ballast moiety having a molecular weight greater than about 75 and can form a bond with the connecting group,R is independently H, alkyl, alkoxy, aryl, aralkyl, halo or fluoroalkyl,m=1-3, and n.gtoreq.1;and a solvent or mixture of solvents. The invention further comprises a process for imaging the composition of this invention to give positive image. The light sensitive composition is especially useful as a positive deep-uv photoresist.Type: GrantFiled: March 7, 1997Date of Patent: March 2, 1999Assignee: Clariant Finance (BVI) LimitedInventors: Dana L. Durham, Ping-Hung Lu, Joseph E. Oberlander, Dinesh N. Khanna
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Patent number: 5866295Abstract: The present invention relates to novel photosensitive quinolone compounds, specifically novel 3-diazo 2,4-quinolinedione compounds, that may be used in a variety of applications, such as, photosensitive coating compositions, pharmaceuticals, agricultural, amongst others. The invention further relates to a process for making the novel photosensitive 3-diazo 2,4-quinolinedione compounds. These compounds are particularity useful as a photoactive component in a positive working photoresist composition, particularity for use as a deep ultraviolet (UV) photoresist.Type: GrantFiled: March 7, 1997Date of Patent: February 2, 1999Assignee: Clariant Finance (BVI) LimitedInventors: Joseph E. Oberlander, Dana L. Durham, Dinesh N. Khanna
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Patent number: 5858627Abstract: Process for producing a photosensitizer comprising a diazo ester of a p-cresol oligomer where at least one of the hydroxy groups on the p-cresol ring has been esterified with diazo-sulfonyl chloride comprising from about 60 to 100 mole % 2,1,4 or 2,1,5-diazo sulfonyl chloride, or a mixture thereof; and a photoresist comprising an admixture of the photosensitizer, which is present in the photoresist composition in an amount sufficient to uniformly photosensitive the photoresist composition, a water insoluble, aqueous alkali soluble novolak resin, the novolak resin being present in the photoresist composition in an amount sufficient to form a substantially uniform photoresist composition, and a suitable solvent.Type: GrantFiled: August 29, 1997Date of Patent: January 12, 1999Assignee: Clariant Finance (BVI) LimitedInventors: M. Dalil Rahman, Dinesh N. Khanna, Daniel Aubin, Douglas McKenzie
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Patent number: 5853947Abstract: A photosensitive positive working photosensitive composition suitable for use as a photoresist, which comprises an admixture of at least one water insoluble, aqueous alkali soluble, film forming novolak resin; at least one o-diazonaphthoquinone photosensitizer; and a photoresist solvent mixture comprising a propylene glycol alkyl ether acetate and 3-methyl-3-methoxy butanol and process for producing such a composition.Type: GrantFiled: December 21, 1995Date of Patent: December 29, 1998Assignee: Clariant Finance (BVI) LimitedInventors: Stanley F. Wanat, M. Dalil Rahman, Dinesh N. Khanna, Daniel P. Aubin, Sunit S. Dixit
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Patent number: 5837417Abstract: Process for producing a photosensitizer comprising a diazo ester of a p-cresol oligomer where at least one of the hydroxy groups on the p-cresol ring has been esterified with diazo-sulfonyl chloride comprising from about 60 to 100 mole % 2,1,4 or 2,1,5-diazo sulfonyl chloride, or a mixture thereof; and a photoresist comprising an admixture of the photosensitizer, which is present in the photoresist composition in an amount sufficient to uniformly photosensitive the photoresist composition, a water insoluble, aqueous alkali soluble novolak resin, the novolak resin being present in the photoresist composition in an amount sufficient to form a substantially uniform photoresist composition, and a suitable solvent.Type: GrantFiled: December 30, 1994Date of Patent: November 17, 1998Assignee: Clariant Finance (BVI) LimitedInventors: M. Dalil Rahman, Dinesh N. Khanna, Daniel Aubin, Douglas McKenzie
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Patent number: 5763135Abstract: A light-sensitive positive photoresist composition containing a film forming resin, a photoactive compound, a solvent, and an arylhydrazo dye. The dyed photoresist reduces the linewidth variation of the resist pattern on a reflective substrate while giving good lithographic performance.Type: GrantFiled: September 30, 1996Date of Patent: June 9, 1998Assignee: Clariant Finance (BVI) LimitedInventors: Shuji Ding, Ping-Hung Lu, Dinesh N. Khanna, Anthony J. Corso
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Patent number: 5739265Abstract: A process for producing a water insoluble, aqueous alkali soluble, film forming novolak resin having low metal ions, made by the fractionation of a phenol formaldehyde condensation product, a process for producing a resin a photoresist composition of superior quality containing such novolak resin, and a method for producing a semiconductor device using such photoresist composition.Type: GrantFiled: September 20, 1995Date of Patent: April 14, 1998Assignee: Clariant Finance (BVI) Ltd.Inventors: M. Dalil Rahman, Daniel P. Aubin, Dinesh N. Khanna, Sunit S. Dixit
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Patent number: 5733714Abstract: The present invention relates to a novel antireflective coating solution and a process for its use in photolithography. The antireflective coating solution comprises a novel polymer and an organic solvent or a mixture of organic solvents, where the novel polymer comprises a unit containing a dye that absorbs from about 180 nm to about 450 nm and a unit containing a crosslinking group.Type: GrantFiled: September 30, 1996Date of Patent: March 31, 1998Assignee: Clariant Finance (BVI) LimitedInventors: Iain McCulloch, Ralph R. Dammel, Anthony J. Corso, Shuji Ding, Dana L. Durham, Ping-Hung Lu, Ming Kang, Dinesh N. Khanna
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Patent number: 5693749Abstract: A process for producing a water insoluble, aqueous alkali soluble, film forming novolak resin fraction having a low metal ion content, made by the fractionation of a phenol formaldehyde condensation product, a process for producing a photoresist compositions containing such a novolak resin, and a method for producing a semiconductor device using such a photoresist composition.Type: GrantFiled: September 20, 1995Date of Patent: December 2, 1997Assignee: Hoechst Celanese CorporationInventors: M. Dalil Rahman, Daniel P. Aubin, Dinesh N. Khanna, Sunit S. Dixit
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Patent number: 5652297Abstract: The present invention relates to a novel aqueous antireflective coating solution and a process for its use in photolithography. The antireflective coating solution comprises a novel polymer and water, where the novel polymer of the antireflective coating comprises at least one unit containing a dye that absorbs from about 180 nm to about 450 nm, at least one unit containing a crosslinking group and at least one unit derived from a hydrophilic vinyl monomer or a vinyl monomer capable of becoming hydrophilic.Type: GrantFiled: August 16, 1996Date of Patent: July 29, 1997Assignee: Hoechst Celanese CorporationInventors: Iain McCulloch, Ralph R. Dammel, Dana L. Durham, Ping-Hung Lu, Ming Kang, Dinesh N. Khanna, Shuji Ding