Abstract: A sensor includes a micromechanical functional part and an electronic evaluation circuit which are in electrical connection to each other using electrical conductors. An arrangement for carrying out an auto-test of the sensor is provided in such a way that fault identification of at least one electrical connection is implemented.

Abstract: A circuit for converting the capacitive signal change of a differential capacitor into digital signals, the circuit including a sigma delta modulator. The differential capacitor is a component of the signal feed structure and the reference feedback structure of the sigma delta modulator.

Abstract: A circuit for converting the capacitive signal change of a differential capacitor into digital signals, the circuit including a sigma delta modulator. The differential capacitor is a component of the signal feed structure and the reference feedback structure of the sigma delta modulator.

Abstract: A sensor having a seismic mass and having an arrangement for detecting the deflection of the mass and converting it into an electrical signal; in at least one operating mode of the sensor, a mechanical stop asymmetrically limiting the deflection of the seismic mass with respect to a vibrational center position. An arrangement for symmetrical limiting of the signal provided on the sensor.

Abstract: A sensor includes a micromechanical functional part and an electronic evaluation circuit which are in electrical connection to each other using electrical conductors. An arrangement for carrying out an auto-test of the sensor is provided in such a way that fault identification of at least one electrical connection is implemented.

Abstract: A sensor having a seismic mass and having means for detecting the deflection of the mass and converting it into an electrical signal; in at least one operating mode of the sensor, a mechanical stop asymmetrically limiting the deflection of the seismic mass with respect to a vibrational center position. Means for symmetrical limiting of the signal are provided on the sensor.

Abstract: A device for detecting a wavefront that is defined by a plurality of contiguous light beams includes an array of lenslets for isolating the individual light beams and focusing each individual light beam to a focal point in an x-y plane. The device also has a plurality of clusters which are positioned in the x-y plane, and each cluster includes a plurality of pixels that are arranged in rows aligned in an x-direction, and columns aligned in a y-direction. Additionally, each pixel of a cluster includes both a first photocell for generating an x-signal and a second photocell for generating a y-signal, respectively, in response to an illumination of the pixel by a light beam. Further, the device includes circuitry for converting the x and y signals to digital signals and then using the digital signals to determine an x-y position for the focal point of the particular light beam that is incident on the cluster.