Abstract: A refrigeration machine, in particular a cryopump for generating a vacuum, having a compressor for compressing a refrigerant substantially comprising helium and oil. Together with the compressor, an oil separator is arranged downstream in the delivery direction of the coolant. Furthermore, a cooling device in which the refrigeration medium expands. In order to adsorb harmful gases, an adsorption device is arranged upstream of the cooling device in the delivery direction.

Abstract: A vacuum pump arrangement, especially a turbomolecular pump arrangement, comprises a rotor (14) and a stator (16) in a pump housing (10). The pump housing (10) is connected to a vacuum chamber housing (26) through a pump flange (10). Retaining elements (34) are provided for this connection. To avoid a twisting of the retaining elements (34) in the event of a damage, such as the blocking of the rotor (14) and the high moments occurring thereby, the retaining element (34) comprises an anti-twist structure (40) cooperating with the vacuum chamber housing (26).

Abstract: A Holweck vacuum pump includes a pump rotor (16) having a rotating tube (24), a respective pump stator (12,14) comprising a helical thread groove (21,23) on the radial inside and outside of said rotor tube (24), and an inlet-side rotor blade disk (28) provided with a supporting ring (30) which supports said rotor tube (24). The blades (18) of said blade disk include rotor-side shoulders (40) which support the supporting ring (30).

Abstract: A friction vacuum pump (10) comprises a housing (12) defining a vaneless pump stator (30), a rotor drive and a rotor support which rotatably supports a pump rotor (16) provided with a vane (18). The housing (12) surrounds the overall axial length of the pump rotor (16), the rotor drive and the rotor support. Prior art housings are of multipart configuration and thus comprise seals between the housing portions. The seals are difficult to coat and may be or become locations where leaks occur. In contrast, the housing (12) is of one-piece configuration such that, in any case, the region of the housing (12) which is in contact with the vacuum gas is free of seals.

Abstract: A device (1), for evacuating a chamber to pressures in the high vacuum range includes a suction-side vacuum pump (2) and an atmospheric-pressure-side vacuum pump (3). The suction-side vacuum pump (2) is a mechanical kinetic vacuum pump with a rotor (11) and a stator (10). The stator (10) has a rotationally-symmetrical inner surface which matches the outer rotor geometry. The rotor (11) in the mechanical kinetic vacuum pump (2) is provided with a structure (13) carrying out the gas pumping. Said gas pumping structure comprises webs (14), the angle and width of which decrease from the suction side to the pressure side. The gas throughflow is improved. The outer diameter of the rotor (11) and the inner diameter of the stator (10) of the suctnion-side pump decrease from the suction side to the pressure side.

Abstract: A device (1), for evacuating a chamber to pressures in the high vacuum range includes a suction-side vacuum pump (2) and an atmospheric-pressure-side vacuum pump (3). The suction-side vacuum pump (2) is a mechanical kinetic vacuum pump with a rotor (11) and a stator (10). The stator (10) has a rotationally-symmetrical inner surface which matches the outer rotor geometry. The rotor (11) in the mechanical kinetic vacuum pump (2) is provided with a structure (13) carrying out the gas pumping. Said gas pumping structure comprises webs (14), the angle and width of which decrease from the suction side to the pressure side. The gas throughflow is improved. The outer diameter of the rotor (11) and the inner diameter of the stator (10) of the suctnion-side pump decrease from the suction side to the pressure side.

Abstract: A friction vacuum pump for use in a system for regulating the pressure in a vacuum chamber includes a multistage turbomolecular vacuum pump section (6) whose stages each consist of a row of stator vanes and rotor vanes (14 or 13). The pump regulates the pressure of heavy gases or of a gas mixture containing heavy gases. To this end, the friction vacuum pump (1) is equipped with a molecular pump section (11) located on the fore-vacuum side and a space (21, 22, 23), in which the pump action is interrupted. The space is provided in the transition area from the turbomolecular vacuum pump section (6) to the molecular pump section (11) or in the transition area from the molecular flow to viscous flow.

Abstract: During the pumping of corrosive gases, it is advantageous to admit a seal gas to endangered pumping chambers at a lower flow rate and a higher pressure than the corrosive gases. Inert gas from a supply (3) has its pressure reduced by a pressure reducer (6). An on/off valve (7) controls a flow of the inert gas through a flow restriction (8) which restricts the flow of inert gas to appropriate sealing gas rates at an outlet (4). After pumping the corrosive gas, a control valve (12) in a bypass line (11) causes the inert gas to be supplied to the outlet (4) at a higher flow rate for purging the pump.