Patents by Inventor Dirk Karel Margaretha BRODDIN

Dirk Karel Margaretha BRODDIN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Focus control arrangement and method
    Patent number: 10551308
    Abstract: An inspection apparatus includes an optical system, which has a radiation beam delivery system for delivering radiation to a target, and a radiation beam collection system for collecting radiation after scattering from the target. Both the delivery system and the collection system comprise optical components that control the characteristics of the radiation and the collected radiation. By controlling the characteristics of one or both of the radiation and collected radiation, the depth of focus of the optical system may be increased.
    Type: Grant
    Filed: December 14, 2016
    Date of Patent: February 4, 2020
    Assignee: ASML Netherlands B.V.
    Inventors: Martin Jacobus Johan Jak, Armand Eugene Albert Koolen, Gerbrand Van Der Zouw, Dirk Karel Margaretha Broddin
  • FOCUS CONTROL ARRANGEMENT AND METHOD
    Publication number: 20170176328
    Abstract: An inspection apparatus includes an optical system, which has a radiation beam delivery system for delivering radiation to a target, and a radiation beam collection system for collecting radiation after scattering from the target. Both the delivery system and the collection system comprise optical components that control the characteristics of the radiation and the collected radiation. By controlling the characteristics of one or both of the radiation and collected radiation, the depth of focus of the optical system may be increased.
    Type: Application
    Filed: December 14, 2016
    Publication date: June 22, 2017
    Applicant: ASML Netherlands B.V.
    Inventors: Martin Jacobus Johan JAK, Armand Eugene Albert KOOLEN, Gerbrand VAN DER ZOUW, Dirk Karel Margaretha BRODDIN