Patents by Inventor Dirk-Roger Schmitt

Dirk-Roger Schmitt has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Microscope and method of measurement of a surface topography
    Publication number: 20060023225
    Abstract: The invention relates to a microscope and a method for measuring the surface topography of a workpiece in a quantitative and optical manner. The invention includes a differential interference contrast microscope embodiment according to Nomarski, comprising a light source, a polariser, a changeable Nomarski prism and an analyser. The light source has a narrow frequency spectrum and/or is provided with a special filter having a narrow frequency spectrum; and the microscope is provided with a phase displacement interferometry evaluation unit.
    Type: Application
    Filed: August 31, 2005
    Publication date: February 2, 2006
    Inventors: Helmut Tobben, Dirk-Roger Schmitt, Gabriele Ringel
  • Microscope and method for measuring surface topography in a quantitative and optical manner
    Publication number: 20030161038
    Abstract: The invention relates to a microscope and a method for measuring the surface topography of a workpiece in a quantitative and optical manner. The invention includes a differential interference contrast microscope embodiment according to Nomarski, comprising a light source, a polariser, a changeable Nomarski prism and an analyser. The light source has a narrow frequency spectrum and/or is provided with a special filter having a narrow frequency spectrum; and the microscope is provided with a phase displacement interferometry evaluation unit.
    Type: Application
    Filed: February 19, 2003
    Publication date: August 28, 2003
    Inventors: Helmut Tobben, Dirk-Roger Schmitt, Gabriele Ringel
  • Apparatus for determining the effective surface roughness of polished optical samples by measuring the integral scattered radiation
    Patent number: 4972092
    Abstract: Apparatus for determining the effective surface roughness of polished optical samples, by measuring the total integrated scattering, only operates for non-light-transmissive samples. For a transmissive sample, the invention adds a light trap behind the sample for transmitted light, and a diaphragm in front of the sample. The rear surface of the diaphragm is provided with a non-reflective wafing which traps secondary light reflected or scattered by the inside rear surface of the sample.
    Type: Grant
    Filed: September 15, 1989
    Date of Patent: November 20, 1990
    Assignee: Deutsche Forschungsanstalt fur Luftund Raumfahrt
    Inventors: Dirk-Roger Schmitt, Helmut T. A. Rosteck