Abstract: One embodiment relates to a method for automated review of defects detected in a defective die on the target substrate. The method includes: performing an automated review of the defects using an secondary electron microscope (SEM) so as to obtain electron-beam images of the defects; performing an automated classification of the defects into types based on morphology of the defects as determined from the electron-beam images; selecting defects of a specific type for automated energy-dispersive x-ray (EDX) review; and performing the automated EDX review on the defects of the specific type. In addition, automated techniques are disclosed for obtaining an accurate reference so as to improve the usefulness of the EDX results. Furthermore, an automated method of classifying the defects based on the EDX results is disclosed which provides a final pareto that combines both morphological and elemental information. Other embodiments, aspects and features are also disclosed.

Abstract: One embodiment relates to a method for automated review of defects detected in a defective die on the target substrate. The method includes: performing an automated review of the defects using an secondary electron microscope (SEM) so as to obtain electron-beam images of the defects; performing an automated classification of the defects into types based on morphology of the defects as determined from the electron-beam images; selecting defects of a specific type for automated energy-dispersive x-ray (EDX) review; and performing the automated EDX review on the defects of the specific type. In addition, automated techniques are disclosed for obtaining an accurate reference so as to improve the usefulness of the EDX results. Furthermore, an automated method of classifying the defects based on the EDX results is disclosed which provides a final pareto that combines both morphological and elemental information. Other embodiments, aspects and features are also disclosed.

Abstract: Improvements to base beams and self-propelled derrick rigs are described. The base beam can have two or more stabilizer arms which can be deployed. The base beam is also designed to support the derrick rig. An optional counterweight assembly can be connected to the front of the rig. The self-propelled derrick rig can be easily and quickly mounted to the base beam, and when mounted, the assembly will be able to withstand high hook loads and wind loading without the danger of the rig coming off of its wheels or falling over.

Abstract: Improvements to base beams and self-propelled derrick rigs are described. The base beam can have two or more stabilizer arms which can be deployed. The base beam is also designed to support the derrick rig. An optional counterweight assembly can be connected to the front of the rig. The self-propelled derrick rig can be easily and quickly mounted to the base beam, and when mounted, the assembly will be able to withstand high hook loads and wind loading without the danger of the rig coming off of its wheels or falling over.

Abstract: Improvements to base beams and self-propelled derrick rigs are described. The base beam can have two or more stabilizer arms which can be deployed. The base beam is also designed to support the derrick rig. An optional counterweight assembly can be connected to the front of the rig. The self-propelled derrick rig can be easily and quickly mounted to the base beam, and when mounted, the assembly will be able to withstand high hook loads and wind loading without the danger of the rig coming off of its wheels or falling over.

Abstract: Improvements to base beams and self-propelled derrick rigs are described. The base beam can have two or more stabilizer arms which can be deployed. The base beam is also designed to support the derrick rig. An optional counterweight assembly can be connected to the front of the rig. The self-propelled derrick rig can be easily and quickly mounted to the base beam, and when mounted, the assembly will be able to withstand high hook loads and wind loading without the danger of the rig coming off of its wheels or falling over.

Abstract: Improvements to base beams and self-propelled derrick rigs are described. The base beam can have two or more stabilizer arms which can be deployed. The base beam is also designed to support the derrick rig. An optional counterweight assembly can be connected to the front of the rig. The self-propelled derrick rig can be easily and quickly mounted to the base beam, and when mounted, the assembly will be able to withstand high hook loads and wind loading without the danger of the rig coming off of its wheels or falling over.