Patents by Inventor Do-Sun Ha

Do-Sun Ha has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Electrostatic chuck of an ion implanter
    Publication number: 20030107866
    Abstract: An electrostatic chuck of an ion implanter includes a base, a platen mounted on the base, and a clamp mechanically fixing the platen on the base. The clamp has a fixing member latched to the platen and coupling bolts that fix the fixing member to the base.
    Type: Application
    Filed: November 8, 2002
    Publication date: June 12, 2003
    Inventors: Tae-Won Lee, Hyung-Sik Hong, Do-Sun Ha, Myung-Sik Yun, Gyeong-Su Keum