Patents by Inventor Dominik Marcel Vaudrevange
Dominik Marcel Vaudrevange has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 9581392Abstract: An arrangement for cooling a plasma-based radiation source with a metal cooling liquid and a method for starting up a cooling arrangement of this type has a pump unit for conveying the metal cooling liquid from a reservoir to an immersion bath in a pipe portion that is connected to the reservoir in the conveying direction of the cooling circuit has at least one pump for conveying the metal cooling liquid through an external field effect of the at least one pump. A control unit for controlling the at least one pump controls the at least one pump at least temporarily in a pumping direction opposite to the conveying direction of the cooling circuit in order to generate a heating effect through external field effect on metal cooling liquid located in the pipe portion.Type: GrantFiled: February 27, 2015Date of Patent: February 28, 2017Assignee: USHIO Denki Kabushiki KaishaInventors: Gota Niimi, Dominik Marcel Vaudrevange, Ralf Gordon Conrads, Maghiel Jan Kole
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Patent number: 9202659Abstract: An arrangements and methods for cooling a plasma-based radiation source having a revolving element which is to be cooled, particularly for application in EUV radiation sources, is disclosed. The revolving element is immersed in the metal coolant in a first vessel of a primary cooling circuit, and a secondary cooling circuit with a cooling liquid evaporating at the desired operating temperature of the metal coolant has a control unit for controlling at least one atomizing arrangement in a differentiated manner and for selectively controlling a heater in case the determined temperature falls below a minimum operating temperature of the metal coolant. The at least one atomizing arrangement in a cooling section selectively sprays individual wall regions of the first vessel with the cooling liquid depending on the determined temperature of the metal coolant.Type: GrantFiled: October 20, 2014Date of Patent: December 1, 2015Assignee: USHIO Denki Kabushiki KaishaInventors: Gota Niimi, Dominik Marcel Vaudrevange, Ralf Gordon Conrads, Maghiel Jan Kole, Wilhelmus V. J. Van Nunspeet, Johannes W. J. L. Cuijpers, Andre Matthias Prinz
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Publication number: 20150247679Abstract: An arrangement for cooling a plasma-based radiation source with a metal cooling liquid and a method for starting up a cooling arrangement of this type has a pump unit for conveying the metal cooling liquid from a reservoir to an immersion bath in a pipe portion that is connected to the reservoir in the conveying direction of the cooling circuit has at least one pump for conveying the metal cooling liquid through an external field effect of the at least one pump. A control unit for controlling the at least one pump controls the at least one pump at least temporarily in a pumping direction opposite to the conveying direction of the cooling circuit in order to generate a heating effect through external field effect on metal cooling liquid located in the pipe portion.Type: ApplicationFiled: February 27, 2015Publication date: September 3, 2015Inventors: Gota NIIMI, Dominik Marcel VAUDREVANGE, Ralf Gordon CONRADS, Maghiel Jan KOLE
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Publication number: 20150108365Abstract: An arrangements and methods for cooling a plasma-based radiation source having a revolving element which is to be cooled, particularly for application in EUV radiation sources, is disclosed. The revolving element is immersed in the metal coolant in a first vessel of a primary cooling circuit, and a secondary cooling circuit with a cooling liquid evaporating at the desired operating temperature of the metal coolant has a control unit for controlling at least one atomizing arrangement in a differentiated manner and for selectively controlling a heater in case the determined temperature falls below a minimum operating temperature of the metal coolant. The at least one atomizing arrangement in a cooling section selectively sprays individual wall regions of the first vessel with the cooling liquid depending on the determined temperature of the metal coolant.Type: ApplicationFiled: October 20, 2014Publication date: April 23, 2015Inventors: Gota NIIMI, Dominik Marcel VAUDREVANGE, Ralf Gordon CONRADS, Maghiel Jan KOLE, Wilhelmus V. J. VAN NUNSPEET, Johannes W. J. L. CUIJPERS, Andre Matthias PRINZ
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Patent number: 8519368Abstract: The present invention relates to a method and device for generating optical radiation, in particular EUV radiation or soft x-rays, by means of an electrically operated discharge. A plasma (15) is ignited in a gaseous medium between at least two electrodes (1, 2), wherein said gaseous medium is produced at least partly from a liquid material (6) which is applied to a surface moving in the discharge space and is at least partially evaporated by one or several pulsed energy beams. In the proposed method and device the pulses (9) of said pulsed energy beams are directed to at least two different lateral locations with respect to a moving direction of said surface. With this measure, the radiation emission volume is expanded, less sensitive to spatial fluctuations and can be adapted better to the requirements of optical systems of any applications. Furthermore, the optical output power can be increased by this measure.Type: GrantFiled: July 21, 2009Date of Patent: August 27, 2013Assignee: Koninklijke Philips N.V.Inventors: Jakob Willi Neff, Dominik Marcel Vaudrevange, Peter Zink
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Patent number: 8040030Abstract: The present invention relates to a method of increasing the conversion efficiency of an EUV and/or soft X-ray lamp, in which a discharge plasma (8) emitting EUV radiation or soft X-rays is generated in a gaseous medium formed by an evaporated liquid material in a discharge space, said liquid material being provided on a surface in the discharge space and being at least partially evaporated by an energy beam (9). The invention also refers to a corresponding apparatus for producing EUV radiation and/or soft X-rays. In the method, a gas (11) composed of chemical elements having a lower mass number than chemical elements of the liquid material is supplied through at least one nozzle (10) in a directed manner to the discharge space and/or to the liquid material on a supply path to the discharge space in order to reduce the density of the evaporated liquid material in the discharge space. With the present method and corresponding apparatus the conversion efficiency of the lamp is increased.Type: GrantFiled: May 8, 2007Date of Patent: October 18, 2011Assignee: Koninklijke Philips Electronics N.V.Inventors: Jeroen Jonkers, Dominik Marcel Vaudrevange
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Publication number: 20110127442Abstract: The present invention relates to a method and device for generating optical radiation, in particular EUV radiation or soft x-rays, by means of an electrically operated discharge. A plasma (15) is ignited in a gaseous medium between at least two electrodes (1, 2), wherein said gaseous medium is produced at least partly from a liquid material (6) which is applied to a surface moving in the discharge space and is at least partially evaporated by one or several pulsed energy beams. In the proposed method and device the pulses (9) of said pulsed energy beams are directed to at least two different lateral locations with respect to a moving direction of said surface. With this measure, the radiation emission volume is expanded, less sensitive to spatial fluctuations and can be adapted better to the requirements of optical systems of any applications. Furthermore, the optical output power can be increased by this measure.Type: ApplicationFiled: July 21, 2009Publication date: June 2, 2011Applicant: Koninklijke Philips Electronics N.V.Inventors: Jakob Willi Neff, Dominik Marcel Vaudrevange, Peter Zink
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Publication number: 20100194313Abstract: The present invention relates to a high voltage electrical connection line (11), in particular for electrically connecting a gas discharge source (10) to a high voltage power source (9). The connection line is formed of a stack of two electrically conductive plates (2) separated by an electrically isolating layer (1). An electrically conductive layer (8) of a material having a higher electrical resistivity than the material of the conductive plates (2) is arranged between said isolating layer (1) and said conductive plates (2). The proposed connection line provides a higher life time when used for connecting a high voltage power source and a pulsed discharge lamp.Type: ApplicationFiled: September 25, 2008Publication date: August 5, 2010Applicant: KONINKLIJKE PHILIPS ELECTRONICS N.V.Inventors: Dominik Marcel Vaudrevange, Jakob Willi Neff, Christof Metzmacher
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Patent number: 7688948Abstract: A method and an apparatus generate radiation in the wavelength range from about 1 nm to about 30 nm by an electrically operated discharge, which can be used in lithography or in metrology. A working gas is provided between two electrodes. Plasma is ignited in the working gas to generate radiation which is forwarded via an opening for further use. Debris particles are produced in at least one region of at least one of the electrodes. To retain the debris particles, the region is arranged with respect to the opening in such a way that movement paths of the debris particles run at least predominantly outside an area delimited by the opening.Type: GrantFiled: November 18, 2005Date of Patent: March 30, 2010Assignee: Koninklijke Philips Electronics N.V.Inventors: Jeroen Jonkers, Dominik Marcel Vaudrevange
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Publication number: 20090206268Abstract: The present invention relates to a method of increasing the conversion efficiency of an EUV and/or soft X-ray lamp, in which a discharge plasma (8) emitting EUV radiation or soft X-rays is generated in a gaseous medium formed by an evaporated liquid material in a discharge space, said liquid material being provided on a surface in the discharge space and being at least partially evaporated by an energy beam (9). The invention also refers to a corresponding apparatus for producing EUV radiation and/or soft X-rays. In the method, a gas (11) composed of chemical elements having a lower mass number than chemical elements of the liquid material is supplied through at least one nozzle (10) in a directed manner to the discharge space and/or to the liquid material on a supply path to the discharge space in order to reduce the density of the evaporated liquid material in the discharge space. With the present method and corresponding apparatus the conversion efficiency of the lamp is increased.Type: ApplicationFiled: May 8, 2007Publication date: August 20, 2009Inventors: Jeroen Jonkers, Dominik Marcel Vaudrevange
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Publication number: 20090168967Abstract: A description is given of a method and an apparatus for generating radiation (12) in the wavelength range from about 1 nm to about 30 nm by means of an electrically operated discharge, which can be used in lithography or in metrology. Use is made of at least one first electrode (14) and at least one second electrode (16) at a distance therefrom, wherein at least one working gas (22) is provided between the electrodes (14, 16). A plasma is ignited in the working gas (22), the generated radiation (12) of which plasma is forwarded via a first opening (30) for further use, and wherein debris particles (28) are produced in at least one region (26) of at least one of the electrodes (14, 16). In order to retain the debris particles (28), the method is configured such that at least the region (26) is arranged with respect to the first opening (30) in such a way that the movement paths (32) of the debris particles (28) run at least predominantly outside an area delimited by the first opening (30).Type: ApplicationFiled: November 18, 2005Publication date: July 2, 2009Applicant: Koninklijke Philips Electronics, N.V.Inventors: Jeroen Jonkers, Dominik Marcel Vaudrevange
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Patent number: 7427766Abstract: A method of producing extreme ultraviolet radiation (EUV) or soft X-ray radiation by means of an electrically operated discharge, in particular for EUV lithography or for metrology, in which a plasma (22) is ignited in a gaseous medium between at least two electrodes (14, 16) in a discharge space (12), said plasma emitting said radiation that is to be produced. The gaseous medium is produced from a metal melt (24), which is applied to a surface in said discharge space (12) and at least partially evaporated by an energy beam, in particular by a laser beam (20).Type: GrantFiled: September 1, 2004Date of Patent: September 23, 2008Assignee: Koninklijke Philips Electronics N.V.Inventors: Jeroen Jonkers, Dominik Marcel Vaudrevange, Willi Neff