Patents by Inventor Dominik Patrick Ehberger

Dominik Patrick Ehberger has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Charged particle beam apparatus and method of controlling sample charge
    Patent number: 11545338
    Abstract: A charged particle beam apparatus with a charged particle source to generate a primary charged particle beam, a sample holder to hold a sample for impingement of the primary charged particle beam on the sample, a pulsed laser configured to generate a pulsed light beam for impingement onto an area on the sample, and an electrode to collect electrons emitted from the sample in a non-linear photoemission.
    Type: Grant
    Filed: May 5, 2021
    Date of Patent: January 3, 2023
    Assignee: ICT Integrated Circuit Testing Gesellschaft für Halbleiterriftechnik mbH
    Inventors: Dominik Patrick Ehberger, John Breuer, Alex Goldenshtein
  • CHARGED PARTICLE BEAM APPARATUS AND METHOD OF CONTROLLING SAMPLE CHARGE
    Publication number: 20220359152
    Abstract: A charged particle beam apparatus with a charged particle source to generate a primary charged particle beam, a sample holder to hold a sample for impingement of the primary charged particle beam on the sample, a pulsed laser configured to generate a pulsed light beam for impingement onto an area on the sample, and an electrode to collect electrons emitted from the sample in a non-linear photoemission.
    Type: Application
    Filed: May 5, 2021
    Publication date: November 10, 2022
    Inventors: Dominik Patrick Ehberger, John Breuer, Alex Goldenshtein