Patents by Inventor Don G. Klein

Don G. Klein has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Thin-film deposition evaporator
    Publication number: 20100043711
    Abstract: A material source evaporator for use with an evacuable interior deposition chamber in which evaporated materials are deposited on substrates comprising a container with an associated heater that can heat an vaporizable material provided in the container to provide a vapor thereof. A manifold having a plurality of output apertures also has an associated heater that can heat the material vapor provided in the manifold to remain sufficiently vaporous to pass out of output apertures which are in a selected pattern to provide a calibrated spatial distribution of material vapor that results in a deposition thereof in a layer on an adjacent substrate in a fixed position. Thus, the layer has a relatively uniform thickness.
    Type: Application
    Filed: October 28, 2009
    Publication date: February 25, 2010
    Inventors: Peter P. Chow, Masahiko Shibata, Don G. Klein, Ralf M. Hartmann
  • Thin-film deposition evaporator
    Patent number: 7611587
    Abstract: A material source evaporator for use with an evacuable interior deposition chamber in which evaporated materials are deposited on substrates comprising a container with an associated heater that can heat an vaporizable material provided in the container to provide a vapor thereof. A manifold having a plurality of output apertures also has an associated heater that can heat the material vapor provided in the manifold to remain sufficiently vaporous to pass out of output apertures which are in a selected pattern to provide a calibrated spatial distribution of material vapor that results in a deposition thereof in a layer on an adjacent substrate in a fixed position. Thus, the layer has a relatively uniform thickness.
    Type: Grant
    Filed: May 17, 2004
    Date of Patent: November 3, 2009
    Inventors: Peter P. Chow, Masahiko Shibata, Don G. Klein, Ralf M. Hartmann
  • Thin-film deposition evaporator
    Publication number: 20040255857
    Abstract: A material source evaporator for use with an evacuable interior deposition chamber in which evaporated materials are deposited on substrates comprising a container with an associated heater that can heat an vaporizable material provided in the container to provide a vapor thereof. A manifold having a plurality of output apertures also has an associated heater that can heat the material vapor provided in the manifold to remain sufficiently vaporous to pass out of output apertures which are in a selected pattern to provide a calibrated spatial distribution of material vapor that results in a deposition thereof in a layer on an adjacent substrate in a fixed position. Thus, the layer has a relatively uniform thickness.
    Type: Application
    Filed: May 17, 2004
    Publication date: December 23, 2004
    Inventors: Peter P. Chow, Masahiko Shibata, Don G. Klein, Ralf M. Hartmann