Patents by Inventor Donald R. Nichols

Donald R. Nichols has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for depositing continuous pinhole free silicon nitride films and products produced thereby
    Patent number: 4089992
    Abstract: A substrate article coated with a pinhole free film of silicon nitride produced by reacting silane with a nitrogen containing compound which upon decomposition produces nascent nitrogen and sufficient amounts of a carrier gas that is inert to the reactants and heating said substrate to a temperature above about 500.degree. C to cause the deposition of silicon nitride film on said substrate.
    Type: Grant
    Filed: August 30, 1976
    Date of Patent: May 16, 1978
    Assignee: International Business Machines Corporation
    Inventors: Ven Y. Doo, Donald R. Nichols, Gene A. Silvey