Abstract: A method of cleaning a collector of an extreme ultraviolet light source system includes introducing the collector separated from the extreme ultraviolet light source system into a chamber; capturing an optical image of a reflective surface of the collector; measuring a contamination level of the reflective surface by comparing the optical image with a prestored standard image; performing a first cleaning operation if the contamination level exceeds a preset first reference value, the first cleaning operation including cleaning the reflective surface by spraying dry ice particles onto the reflective surface; and performing a second cleaning operation if the contamination level is less than or equal to the preset first reference value. The second cleaning operation includes cleaning the reflective surface by radiating atmospheric plasma onto the reflective surface and measuring a microcontamination level and a damage level of the reflective surface.

Abstract: A micro projector driving device and a driving method are provided, where pixels of the first and last images at a specified location are compared, and the light intensity of the light sources is then adjusted according to the compared results so as to avoid the continual display of images with different contrast requirements at the highest light intensity, thus saving power under a guaranteed visual effect, and prolonging the battery life of a portable micro projector. A higher power drive light source should be used for a static image rather than for a video image. Images are divided into sections, and then the pixels from each section are selected at random for comparison, therefore greatly reducing the amount of computing but still having a rather high accuracy.

Abstract: A micro projector driving device and a driving method are provided, where pixels of the first and last images at a specified location are compared, and the light intensity of the light sources is then adjusted according to the compared results so as to avoid the continual display of images with different contrast requirements at the highest light intensity, thus saving power under a guaranteed visual effect, and prolonging the battery life of a portable micro projector. A higher power drive light source should be used for a static image rather than for a video image. Images are divided into sections, and then the pixels from each section are selected at random for comparison, therefore greatly reducing the amount of computing but still having a rather high accuracy.