Patents by Inventor DONGMING IU
DONGMING IU has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20200149968Abstract: Examples described herein generally relate to apparatus and methods for rapid thermal processing (RTP) of a substrate. In one or more embodiments, a process chamber includes chamber body, a window disposed on a first portion of the chamber body, a chamber bottom, and a shield disposed on a second portion of the chamber body. The shield has a flat surface facing the window to reduce reflected radiant energy to a back side of a substrate disposed in the process chamber during operation. The process chamber further includes an edge support for supporting the substrate and a cooling member disposed on the chamber bottom. The cooling member is disposed in proximity of the edge support to cool the edge support during low temperature operation in order to improve the temperature uniformity of the substrate.Type: ApplicationFiled: January 14, 2020Publication date: May 14, 2020Inventors: Lara HAWRYLCHAK, Samuel C. HOWELLS, Wolfgang R. ADERHOLD, Leonid M. TERTITSKI, Michael LIU, Dongming IU, Norman L. TAM, Ji-Dih HU
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Patent number: 10571337Abstract: Examples described herein generally relate to apparatus and methods for rapid thermal processing (RTP) of a substrate. In one example, a process chamber includes chamber body, a window disposed on a first portion of the chamber body, a chamber bottom, and a shield disposed on a second portion of the chamber body. The shield has a flat surface facing the window to reduce reflected radiant energy to a back side of a substrate disposed in the process chamber during operation. The process chamber further includes an edge support for supporting the substrate and a cooling member disposed on the chamber bottom. The cooling member is disposed in proximity of the edge support to cool the edge support during low temperature operation in order to improve the temperature uniformity of the substrate.Type: GrantFiled: July 28, 2017Date of Patent: February 25, 2020Assignee: APPLIED MATERIALS, INC.Inventors: Lara Hawrylchak, Samuel C. Howells, Wolfgang R. Aderhold, Leonid M. Tertitski, Michael Liu, Dongming Iu, Norman L. Tam, Ji-Dih Hu
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Patent number: 10405375Abstract: The embodiments described herein generally relate to a flexible standoff for use with a lamphead assembly in a thermal processing chamber. In one embodiment, the lamphead assembly can include a lamphead with one or more fixed lamphead positions, a lamp bulb, a lamp base with a standoff contact adaptor and a flexible standoff capable of attaching and positioning the lamp assembly. The flexible standoff can include a socket configured to receive a lamp base of a lamp assembly, a housing configured to position a lamp bulb of a lamp assembly in thermal connection with a processing chamber, a contact adaptor configured to electrically connect to a power supply and a conductive material to electrically connect the socket and the contact adaptor.Type: GrantFiled: February 7, 2014Date of Patent: September 3, 2019Assignee: APPLIED MATERIALS, INC.Inventors: Joseph M. Ranish, Oleg Serebryanov, Dongming Iu
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Patent number: 10202707Abstract: Apparatus for processing a substrate are provided herein. In some embodiments, a lamphead for use in substrate processing includes a monolithic member having a contoured surface; a plurality of reflector cavities disposed in the contoured surface, wherein each reflector cavity is shaped to act as a reflector or to receive a replaceable reflector for a lamp; and a plurality of lamp passages, wherein each lamp passage extends into the monolithic member from one of the plurality of reflector cavities.Type: GrantFiled: April 18, 2013Date of Patent: February 12, 2019Assignee: APPLIED MATERIALS, INC.Inventors: Joseph M. Ranish, Paul Brillhart, Satheesh Kuppurao, Dongming Iu
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Publication number: 20180340832Abstract: Examples described herein generally relate to apparatus and methods for rapid thermal processing (RTP) of a substrate. In one example, a process chamber includes chamber body, a window disposed on a first portion of the chamber body, a chamber bottom, and a shield disposed on a second portion of the chamber body. The shield has a flat surface facing the window to reduce reflected radiant energy to a back side of a substrate disposed in the process chamber during operation. The process chamber further includes an edge support for supporting the substrate and a cooling member disposed on the chamber bottom. The cooling member is disposed in proximity of the edge support to cool the edge support during low temperature operation in order to improve the temperature uniformity of the substrate.Type: ApplicationFiled: July 28, 2017Publication date: November 29, 2018Inventors: Lara HAWRYLCHAK, Samuel C. HOWELLS, Wolfgang R. ADERHOLD, Leonid M. TERTITSKI, Michael LIU, Dongming IU, Norman L. TAM, Ji-Dih HU
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Publication number: 20180337075Abstract: Embodiments of the disclosure generally relate to a semiconductor processing chamber. In one embodiment, semiconductor processing chamber is disclosed and includes a chamber body having a bottom and a sidewall defining an interior volume, the sidewall having a substrate transfer port formed therein, and one or more absorber bodies positioned in the interior volume in a position opposite of the substrate transfer port.Type: ApplicationFiled: May 17, 2018Publication date: November 22, 2018Inventors: Dongming IU, Kartik SHAH, Norman L. TAM, Matthew SPULLER, Jau-Jiun CHEN, Kong Lung Samuel CHAN, Elizabeth NEVILLE, Preetham RAO, Abhilash J. MAYUR, Gia Pham
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Patent number: 10026630Abstract: Embodiments of the present disclosure generally relate to an improved retention and insulation features for lamps used as a source of heat radiation in a thermal processing chamber. In one embodiment, a process chamber is provided. The process chamber includes a lamp assembly for thermal processing of semiconductor substrates, the lamp assembly has a lamp electrical connector and a first laterally operative element, a lamp assembly housing having a passage for receiving the lamp assembly, a power distribution assembly having a receptacle for receiving the lamp electrical connector and delivering power to the lamp electrical connector, and a spacer plate disposed between the lamp assembly housing and the power distribution assembly, wherein the spacer plate has a passage contoured to allow passage of the lamp electrical connector therethrough, and the spacer plate has a retention feature configured to engage or disengage the first laterally operative element.Type: GrantFiled: May 27, 2014Date of Patent: July 17, 2018Assignee: APPLIED MATERIALS, INC.Inventors: Dongming Iu, Joseph M. Ranish, Oleg V. Serebryanov
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Publication number: 20180005856Abstract: Embodiments of the invention relate to a dome assembly. The dome assembly includes an upper dome comprising a central window, and an upper peripheral flange engaging the central window at a circumference of the central window, wherein a tangent line on an inside surface of the central window that passes through an intersection of the central window and the upper peripheral flange is at an angle of about 8° to about 16° with respect to a planar upper surface of the peripheral flange, a lower dome comprising a lower peripheral flange and a bottom connecting the lower peripheral flange with a central opening, wherein a tangent line on an outside surface of the bottom that passes through an intersection of the bottom and the lower peripheral flange is at an angle of about 8° to about 16° with respect to a planar bottom surface of the lower peripheral flange.Type: ApplicationFiled: September 18, 2017Publication date: January 4, 2018Inventors: Anzhong CHANG, Paul BRILLHART, Surajit KUMAR, Satheesh KUPPURAO, Mehmet Tugrul SAMIR, David K. CARLSON, Steve ABOAGYE, Anh N. NGUYEN, Kailash Kiran PATALAY, Joseph M. RANISH, Oleg V. SEREBRYANOV, Dongming IU, Shu-Kwan LAU, Zuoming ZHU, Herman DINIZ
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Publication number: 20170294292Abstract: Implementations described herein provide for thermal substrate processing apparatus including two thermal process chambers, each defining a process volume, and a substrate support disposed within each process volume. One or more remote plasma sources may be in fluid communication with the process volumes and the remote plasma sources may be configured to deliver a plasma to the process volumes. Various arrangements of remote plasma sources and chambers are described.Type: ApplicationFiled: April 5, 2017Publication date: October 12, 2017Inventors: Lara HAWRYLCHAK, Matthew D. SCOTNEY-CASTLE, Norman L. TAM, Matthew SPULLER, Kong Lung Samuel CHAN, Dongming IU
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Publication number: 20170294333Abstract: Implementations described herein relate to pressure control for vacuum chuck substrate supports. In one implementation, a process chamber defines a process volume and a vacuum chuck support is disposed within the process volume. A pressure controller is disposed on a fluid flow path upstream from the vacuum chuck and a flow restrictor is disposed on the fluid flow path downstream from the vacuum chuck. Each of the pressure controller and flow restrictor are in fluid communication with a control volume of the vacuum chuck.Type: ApplicationFiled: March 21, 2017Publication date: October 12, 2017Inventors: Dongming IU, Mehran BEHDJAT
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Publication number: 20170294325Abstract: A semiconductor processing apparatus is described that has a body with a wall defining two processing chambers within the body; a passage through the wall forming a fluid coupling between the two processing chambers; a lid removably coupled to the body, the lid having a portal in fluid communication with the passage; a gas activator coupled to the lid outside the processing chambers, the gas activator having an outlet in fluid communication with the portal of the lid; a substrate support disposed in each processing chamber, each substrate support having at least two heating zones, each with an embedded heating element; a gas distributor coupled to the lid facing each substrate support; and a thermal control member coupled to the lid at an edge of each gas distributor.Type: ApplicationFiled: January 27, 2017Publication date: October 12, 2017Inventors: Aaron Muir HUNTER, Mehran BEHDJAT, Niraj MERCHANT, Douglas R. MCALLISTER, Dongming IU, Kong Lung CHAN, Lara HAWRYLCHAK
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Patent number: 9768043Abstract: Embodiments of the present disclosure relate to a dome assembly. The dome assembly includes an upper dome including a central window, and an upper peripheral flange engaging the central window at a circumference of the central window, wherein a tangent line on an inside surface of the central window that passes through an intersection of the central window and the upper peripheral flange is at an angle of about 8° to about 16° with respect to a planar upper surface of the peripheral flange, a lower dome comprising a lower peripheral flange and a bottom connecting the lower peripheral flange with a central opening, wherein a tangent line on an outside surface of the bottom that passes through an intersection of the bottom and the lower peripheral flange is at an angle of about 8° to about 16° with respect to a planar bottom surface of the lower peripheral flange.Type: GrantFiled: December 18, 2013Date of Patent: September 19, 2017Assignee: APPLIED MATERIALS, INC.Inventors: Anzhong Chang, Paul Brillhart, Surajit Kumar, Satheesh Kuppurao, Mehmet Tugrul Samir, David K. Carlson, Steve Aboagye, Anh N. Nguyen, Kailash Kiran Patalay, Joseph M. Ranish, Oleg Serebryanov, Dongming Iu, Shu-Kwan Lau, Zuoming Zhu, Herman Diniz
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Publication number: 20150348809Abstract: Embodiments of the present disclosure generally relate to an improved retention and insulation features for lamps used as a source of heat radiation in a thermal processing chamber. In one embodiment, a process chamber is provided. The process chamber includes a lamp assembly for thermal processing of semiconductor substrates, the lamp assembly has a lamp electrical connector and a first laterally operative element, a lamp assembly housing having a passage for receiving the lamp assembly, a power distribution assembly having a receptacle for receiving the lamp electrical connector and delivering power to the lamp electrical connector, and a spacer plate disposed between the lamp assembly housing and the power distribution assembly, wherein the spacer plate has a passage contoured to allow passage of the lamp electrical connector therethrough, and the spacer plate has a retention feature configured to engage or disengage the first laterally operative element.Type: ApplicationFiled: May 27, 2014Publication date: December 3, 2015Inventors: Dongming IU, Joseph M. RANISH, Oleg V. SEREBRYANOV
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Publication number: 20140255013Abstract: The embodiments described herein generally relate to a flexible standoff for use with a lamphead assembly in a thermal processing chamber. In one embodiment, the lamphead assembly can include a lamphead with one or more fixed lamphead positions, a lamp bulb, a lamp base with a standoff contact adaptor and a flexible standoff capable of attaching and positioning the lamp assembly. The flexible standoff can include a socket configured to receive a lamp base of a lamp assembly, a housing configured to position a lamp bulb of a lamp assembly in thermal connection with a processing chamber, a contact adaptor configured to electrically connect to a power supply and a conductive material to electrically connect the socket and the contact adaptor.Type: ApplicationFiled: February 7, 2014Publication date: September 11, 2014Inventors: Joseph M. RANISH, Oleg SEREBRYANOV, Dongming IU
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Publication number: 20140199056Abstract: Embodiments of the invention relate to a dome assembly. The dome assembly includes an upper dome comprising a central window, and an upper peripheral flange engaging the central window at a circumference of the central window, wherein a tangent line on an inside surface of the central window that passes through an intersection of the central window and the upper peripheral flange is at an angle of about 8° to about 16° with respect to a planar upper surface of the peripheral flange, a lower dome comprising a lower peripheral flange and a bottom connecting the lower peripheral flange with a central opening, wherein a tangent line on an outside surface of the bottom that passes through an intersection of the bottom and the lower peripheral flange is at an angle of about 8° to about 16° with respect to a planar bottom surface of the lower peripheral flange.Type: ApplicationFiled: December 18, 2013Publication date: July 17, 2014Inventors: Anzhong CHANG, Paul BRILLHART, Surajit KUMAR, Satheesh KUPPURAO, Mehmet Tugrul SAMIR, David K. CARLSON, Steve ABOAGYE, Anh N. NGUYEN, Kailash Kiran PATALAY, Joseph M. RANISH, Oleg SEREBRYANOV, Dongming IU, Shu-Kwan LAU, Zuoming ZHU, Herman DINIZ
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Publication number: 20130298832Abstract: Apparatus for processing a substrate are provided herein. In some embodiments, a lamphead for use in substrate processing includes a monolithic member having a contoured surface; a plurality of reflector cavities disposed in the contoured surface, wherein each reflector cavity is shaped to act as a reflector or to receive a replaceable reflector for a lamp; and a plurality of lamp passages, wherein each lamp passage extends into the monolithic member from one of the plurality of reflector cavities.Type: ApplicationFiled: April 18, 2013Publication date: November 14, 2013Inventors: JOSEPH M. RANISH, PAUL BRILLHART, SATHEESH KUPPURAO, DONGMING IU
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Patent number: D796562Type: GrantFiled: April 11, 2016Date of Patent: September 5, 2017Assignee: APPLIED MATERIALS, INC.Inventor: Dongming Iu
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Patent number: D807481Type: GrantFiled: April 8, 2016Date of Patent: January 9, 2018Assignee: APPLIED MATERIALS, INC.Inventors: Dongming Iu, Mehran Behdjat
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Patent number: D877784Type: GrantFiled: April 13, 2018Date of Patent: March 10, 2020Assignee: APPLIED MATERIALS, INC.Inventors: Dongming Iu, Yanjun Xia, Kartik Shah