Patents by Inventor Dorian Heimanson
Dorian Heimanson has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 6774339Abstract: The interfacial joint area of a target/backing plate assembly is sealed so as to inhibit the migration of air and/or water vapor that may be present or trapped along the interfacial surfaces. A pool or bead of molten solder is placed along the interfacial joint and moved continuously around the full 360° circumference of the assembly so as to cover and seal the boundary area. The solder is melted, preferably, by e-beam welding in a vacuum or the like.Type: GrantFiled: August 19, 2002Date of Patent: August 10, 2004Assignee: Tosoh SMD, Inc.Inventors: David B. Smathers, Dorian Heimanson, Michael Gutkin
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Patent number: 6592728Abstract: A dual collimation deposition apparatus and method are disclosed in which the dual collimation apparatus includes at least a long-throw collimator in combination with one or more physical collimators. A new physical collimator and shield design are also disclosed for improved process uniformity and increased equipment productivity.Type: GrantFiled: August 4, 1998Date of Patent: July 15, 2003Assignee: Veeco-CVC, Inc.Inventors: Ajit Paranjpe, Peter Schwartz, Jacques Kools, Kang Song, Dorian Heimanson, Mehrdad Moslehi
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Patent number: 6572744Abstract: A dual collimation deposition apparatus and method are disclosed in which the dual collimation apparatus includes at least a long-throw collimator in combination with one or more physical collimators. A new physical collimator and shield design are also disclosed for improved process uniformity and increased equipment productivity.Type: GrantFiled: January 22, 2001Date of Patent: June 3, 2003Assignee: Veeco Instruments, Inc.Inventors: Ajit Paranjpe, Peter Schwartz, Jacques Kools, Kang Song, Dorian Heimanson, Mehrdad Moslehi
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Patent number: 6235164Abstract: A sputtering apparatus for depositing a thin film (66) of magnetic material on a substrate (26) is modified to include a plate-shaped electromagnet (34, 44, or 70) for orienting magnetic domains within the film (66). The electromagnet (34, 44, or 70) has conductive windings (38; 46, 48, and 50; or 72) that are arranged for producing a magnetic field (42 or 52) within a plane (60) corresponding to a surface of the substrate (26). Field strength vectors (68) vary in absolute magnitude between points located along a first axis (62), but have substantially uniform components of magnitude at the same points measured in a common direction along the first axis (62).Type: GrantFiled: March 18, 1999Date of Patent: May 22, 2001Assignee: CVC Products, Inc.Inventors: Kevin S. Gerrish, Paul H. Ballentine, Dorian Heimanson, Alan T. Stephens, II
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Patent number: 6221217Abstract: A magnetron sputtering system is provided that uses cooling channels in the magnetron assembly to cool the target. The magnetron sputtering system also generates low pressure region in the magnetron assembly such that the backing plate sees a pressure differential much lower than atmospheric pressure. In one embodiment, the backing plate includes a center post to support the backing plate during operation. The backing plate is reduced in thickness and provides less of a barrier to the generated magnetic field.Type: GrantFiled: December 3, 1998Date of Patent: April 24, 2001Assignee: CVC, Inc.Inventors: Mehrdad M. Moslehi, Dorian Heimanson, Cecil J. Davis, Thomas R. Omstead
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Patent number: 6126790Abstract: An electromagnet assembly magnetically orients a thin magnetic film deposited onto a surface of a substrate. The magnetic orientation can take place in a low-pressure processing environment such as during the deposition of the thin magnetic film or during a subsequent operation such as annealing. The electromagnet assembly includes a plate-shaped core located adjacent to the substrate and two or more electromagnetic coils that are wrapped in different directions around the core. Electrical currents conveyed through the electromagnetic coils are controlled for orienting a substantially uniaxial magnetic field throughout a range of angular positions in a plane of the substrate surface.Type: GrantFiled: February 7, 2000Date of Patent: October 3, 2000Assignee: CVC Products, Inc.Inventors: Mehrdad M. Moslehi, Shiyuan Cheng, Cecil J. Davis, Dorian Heimanson
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Patent number: 6042707Abstract: An electromagnet assembly magnetically orients a thin magnetic film deposited onto a surface of a substrate. The magnetic orientation can take place in a low-pressure processing environment such as during the deposition of the thin magnetic film or during a subsequent operation such as annealing. The electromagnet assembly includes a plate-shaped core located adjacent to the substrate and two or more electromagnetic coils that are wrapped in different directions around the core. Electrical currents conveyed through the electromagnetic coils are controlled for orienting a substantially uniaxial magnetic field throughout a range of angular positions in a plane of the substrate surface.Type: GrantFiled: May 22, 1998Date of Patent: March 28, 2000Assignee: CVC Products, Inc.Inventors: Mehrdad M. Moslehi, Shiyuan Cheng, Cecil J. Davis, Dorian Heimanson
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Patent number: 6039848Abstract: A magnetron sputtering system is provided that uses a backing plate assembly having an insulating spacer ring coupled between and hermetically sealed to the backing plate and an extender ring. The insulating spacer ring can be constructed from a ceramic material, and the extender ring can be constructed from a metal material. The use of this backing plate assembly allows the backing plate assembly to be coupled directly to the chamber walls with a metal-to-metal contact, while the backing plate remains electrically isolated from the chamber walls. This allows the sealing of a vacuum chamber in the magnetron sputtering system using a seal suitable for creating an ultra-high vacuum in the vacuum chamber.Type: GrantFiled: October 27, 1997Date of Patent: March 21, 2000Assignee: CVC Products, Inc.Inventors: Mehrdad M. Moslehi, Cecil J. Davis, Dorian Heimanson
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Patent number: 5950723Abstract: A temperature controlled chuck (20) includes a heating unit (24) and a cooling unit (34). A first cavity (30) separates the heating unit (24) from a wafer substrate (18), and a second cavity (50) separates the cooling unit (34) from the heating unit (24). A first fluid delivery system (60) conducts fluid to the first cavity (30) to facilitate exchanges of heat between the heating unit (24) and the substrate (18). A second fluid delivery system (70) conducts fluid to the second cavity (50) to facilitate exchanges of heat between the heating unit (24) and the cooling unit (34). A control system (90) raises the temperature of the substrate (18) by increasing power to the heating unit (24) and by evacuating fluid from the second cavity (50) and lowers the temperature of the substrate (18) by reducing power to the heating unit (24) and by conducting fluid to the second cavity (50).Type: GrantFiled: November 14, 1997Date of Patent: September 14, 1999Assignee: CVC Products, Inc.Inventors: Dorian Heimanson, Thomas R. Omstead
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Patent number: 5902466Abstract: A sputtering apparatus for depositing a thin film (66) of magnetic material on a substrate (26) is modified to include a plate-shaped electromagnet (34, 44, or 70) for orienting magnetic domains within the film (66). The electromagnet (34, 44, or 70) has conductive windings (38; 46, 48, and 50; or 72) that are arranged for producing a magnetic field (42 or 52) within a plane (60) corresponding to a surface of the substrate (26). Field strength vectors (68) vary in absolute magnitude between points located along a first axis (62), but have substantially uniform components of magnitude at the same points measured in a common direction along the first axis (62).Type: GrantFiled: April 25, 1997Date of Patent: May 11, 1999Assignee: CVC Products, Inc.Inventors: Kevin S. Gerrish, Paul H. Ballentine, Dorian Heimanson, Alan T. Stephens, II
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Patent number: 5876573Abstract: A magnetron sputtering system is provided that uses cooling channels in the magnetron assembly to cool the target. The magnetron sputtering system also generates low pressure region in the magnetron assembly such that the backing plate sees a pressure differential much lower than atmospheric pressure. The backing plate is reduced in thickness and provides less of a barrier to the generated magnetic field.Type: GrantFiled: July 10, 1996Date of Patent: March 2, 1999Assignee: CVC, Inc.Inventors: Mehrdad M. Moslehi, Dorian Heimanson, Cecil J. Davis, Thomas R. Omstead
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Patent number: 5775416Abstract: A temperature controlled chuck (20) includes a heating unit (24) and a cooling unit (34). A first cavity (30) separates the heating unit (24) from a wafer substrate (18), and a second cavity (50) separates the cooling unit (34) from the heating unit (24). A first fluid delivery system (60) conducts fluid to the first cavity (30) to facilitate exchanges of heat between the heating unit (24) and the substrate (18). A second fluid delivery system (70) conducts fluid to the second cavity (50) to facilitate exchanges of heat between the heating unit (24) and the cooling unit (34). A control system (90) raises the temperature of the substrate (18) by increasing power to the heating unit (24) and by evacuating fluid from the second cavity (50) and lowers the temperature of the substrate (18) by reducing power to the heating unit (24) and by conducting fluid to the second cavity (50).Type: GrantFiled: November 17, 1995Date of Patent: July 7, 1998Assignee: CVC Products, Inc.Inventors: Dorian Heimanson, Thomas R. Omstead
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Patent number: 5746897Abstract: A high magnetic flux permanent magnet array apparatus and method for high productivity physical vapor deposition includes a magnetron array with a plurality of magnet assemblies disposed proximate to a target. Each assembly comprises a first portion magnetized perpendicularly to the target, a second portion magnetized perpendicularly to the target and opposite the first portion, and a third portion positioned intermediate the first and second portions, the third portion magnetized parallel to the target.Type: GrantFiled: July 10, 1996Date of Patent: May 5, 1998Assignee: CVC Products, Inc.Inventors: Dorian Heimanson, Mehrdad M. Moslehi, Paul E. Spronz, Thomas R. Omstead
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Patent number: 5630916Abstract: A sputtering apparatus for depositing a thin film (66) of magnetic material on a substrate (26) is modified to include a plate-shaped electromagnet (34, 44, or 70) for orienting magnetic domains within the film (66). The electromagnet (34, 44, or 70) has conductive windings (38; 46, 48, and 50; or 72) that are arranged for producing a magnetic field (42 or 52) within a plane (60) corresponding to a surface of the substrate (26). Field strength vectors (68) vary in absolute magnitude between points located along a first axis (62), but have substantially uniform components of magnitude at the same points measured in a common direction along the first axis (62).Type: GrantFiled: January 6, 1995Date of Patent: May 20, 1997Assignee: CVC Products, Inc.Inventors: Kevin S. Gerrish, Paul H. Ballentine, Dorian Heimanson, Alan T. Stephens, II
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Patent number: 5248402Abstract: A sputtering system magnetron formed of an array of permanent magnets rotated in proximity to a plane of a target disposed in a vacuum chamber has an improved shape resembling a cross section of an apple. The magnetic path established between oppositely poled pairs of magnets is inturned in a stem region proximate to the axis of rotation for the array and has a pair of opposed lobes extending outward from the stem region in a generally semi-circular form. The lobes lead to and join each other in an indent region opposite the stem region. The maximum distance across the path between the lobes is about double the minimum distance across the path between the stem region and the indent region.Type: GrantFiled: July 29, 1992Date of Patent: September 28, 1993Assignee: CVC Products, Inc.Inventors: Paul H. Ballentine, Dorian Heimanson, Alan T. Stephens, II