Patents by Inventor Dorothea Buechel
Dorothea Buechel has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11848218Abstract: Exemplary semiconductor chamber component cleaning systems may include a receptacle. The receptacle may include a bottom lid that may be an annulus. The annulus may be characterized by an inner annular wall and an outer annular wall. A plurality of recessed annular ledges may be defined between the inner annular wall and the outer annular wall. Each recessed annular ledge of the plurality of recessed annular ledges may be formed at a different radial position along the bottom lid. The cleaning systems may include a top lid removably coupled with the bottom lid about an exterior region of the top lid. The cleaning systems may include a tank defining a volume to receive the receptacle.Type: GrantFiled: October 22, 2020Date of Patent: December 19, 2023Assignee: Applied Materials, Inc.Inventors: Katty Guyomard, Chidambara A. Ramalingam, Shawyon Jafari, Palash Joshi, Moin Ahmed Khan, Kirubanandan Naina Shanmugam, Subhaschandra Shreepad Salkod, Avishek Ghosh, David W. Groechel, Li Wu, Dorothea Buechel-Rimmel
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Publication number: 20220130692Abstract: Exemplary semiconductor chamber component cleaning systems may include a receptacle. The receptacle may include a bottom lid that may be an annulus. The annulus may be characterized by an inner annular wall and an outer annular wall. A plurality of recessed annular ledges may be defined between the inner annular wall and the outer annular wall. Each recessed annular ledge of the plurality of recessed annular ledges may be formed at a different radial position along the bottom lid. The cleaning systems may include a top lid removably coupled with the bottom lid about an exterior region of the top lid. The cleaning systems may include a tank defining a volume to receive the receptacle.Type: ApplicationFiled: October 22, 2020Publication date: April 28, 2022Applicant: Applied Materials, Inc.Inventors: Katty Guyomard, Chidambara A. Ramalingam, Shawyon Jafari, Palash Joshi, Moin Ahmed Khan, Kirubanandan Naina Shanmugam, Subhaschandra Shreepad Salkod, Avishek Ghosh, David W. Groechel, Li Wu, Dorothea Buechel-Rimmel
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Publication number: 20220108907Abstract: Exemplary semiconductor processing systems may include a chamber body including sidewalls and a base. The chamber body may define an interior volume. The systems may include a substrate support extending through the base of the chamber body. The substrate support may be configured to support a substrate within the interior volume. The systems may include a faceplate positioned within the interior volume of the chamber body. The faceplate may define a plurality of apertures through the faceplate. The systems may include a leveling apparatus seated on the substrate support. The leveling apparatus may include a plurality of piezoelectric pressure sensors.Type: ApplicationFiled: October 5, 2020Publication date: April 7, 2022Applicant: Applied Materials, Inc.Inventors: Katherine Woo, Paul L. Brillhart, Jian Li, Shinnosuke Kawaguchi, David W. Groechel, Dorothea Buechel-Rimmel, Juan Carlos Rocha-Alvarez, Paul E. Fisher, Chidambara A. Ramalingam, Joseph J. Farah
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Publication number: 20190341276Abstract: Embodiments described herein relate to chamber component cleaning systems and methods for cleaning a chamber component. The chamber component cleaning system includes a spray station, at least a first cleaning station, a dry station, a component transfer mechanism, and one or more enclosures that enclose the spray station, at least the first cleaning station, the dry station, and the component transfer mechanism. The spray station has a holder to position a chamber component in a path of a flow of a cleaning spray and a movable nozzle to provide the flow of the cleaning spray at a first pressure in a path of portions of the chamber component. The first cleaning station has a push mechanism to force a cleaning fluid through features and/or holes of the chamber component and at least one movable transducer to provide ultrasonic energy to the portions of the chamber component.Type: ApplicationFiled: May 1, 2019Publication date: November 7, 2019Inventors: Jenn C. CHOW, David W. GROECHEL, Tuochuan HUANG, Dorothea BUECHEL-RIMMEL, Han WANG, Li WU, Gang PENG
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Patent number: 8828482Abstract: A disk for a hard disk drive is provided. The disk comprises a substrate comprising aluminum, and a coating layer disposed over the substrate. The coating layer comprises an alloy of Ni, X1 and X2, wherein X1 comprises one or more elements selected from the group consisting of Ag, Au, B, Cr, Cu, Ga, In, Mn, Mo, Nb, Pb, Sb, Se, Sn, Te, W, Zn and Zr, and wherein X2 comprises either B or P, and wherein X1 and X2 do not comprise the same elements.Type: GrantFiled: March 4, 2013Date of Patent: September 9, 2014Assignee: WD Media, LLCInventors: Alan J. Ruffini, Lindsey A. Hamilton, Dorothea Buechel-Rimmel, Jean M. Laplante, Ambrose Schaffer, Frederick K. Lowes
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Patent number: 8668953Abstract: A method of manufacturing a disk for a magnetic storage device is provided. The method comprises electroless plating a coating layer over a substrate to produce the disk, the coating layer forming an exterior surface of coating over the substrate, and annealing the coating layer using a heating source, wherein heat radiating from the heating source is directionally focused onto the exterior surface before the exterior surface is polished.Type: GrantFiled: December 28, 2010Date of Patent: March 11, 2014Assignee: WD Media, LLCInventor: Dorothea Buechel-Rimmel
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Patent number: 8404369Abstract: A disk for a hard disk drive is provided. The disk comprises a substrate comprising aluminum, and a coating layer disposed over the substrate. The coating layer comprises an alloy of Ni, X1 and X2, wherein X1 comprises one or more elements selected from the group consisting of Ag, Au, B, Cr, Cu, Ga, In, Mn, Mo, Nb, Pb, Sb, Se, Sn, Te, W, Zn and Zr, and wherein X2 comprises either B or P, and wherein X1 and X2 do not comprise the same elements.Type: GrantFiled: August 3, 2010Date of Patent: March 26, 2013Assignee: WD Media, LLCInventors: Alan J. Ruffini, Lindsey A. Hamilton, Dorothea Buechel-Rimmel, Jean M. LaPlante, Ambrose Schaffer, Frederick Lowes
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Patent number: 8187480Abstract: Methods comprising providing a pre-patterned substrate having an array of thick walls, depositing a conforming layer on the pre-patterned substrate, etching the conforming layer from the top of the thick walls and the space between the walls, and etching the thick walls while leaving thin walls of conforming layer.Type: GrantFiled: November 13, 2008Date of Patent: May 29, 2012Assignee: Seagate Technology, LLCInventors: Kim Yang Lee, David S. Kuo, Dorothea Buechel, Kalman Pelhos
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Publication number: 20120034492Abstract: A disk for a hard disk drive is provided. The disk comprises a substrate comprising aluminum, and a coating layer disposed over the substrate. The coating layer comprises an alloy of Ni, X1 and X2, wherein X1 comprises one or more elements selected from the group consisting of Ag, Au, B, Cr, Cu, Ga, In, Mn, Mo, Nb, Pb, Sb, Se, Sn, Te, W, Zn and Zr, and wherein X2 comprises either B or P, and wherein X1 and X2 do not comprise the same elements.Type: ApplicationFiled: August 3, 2010Publication date: February 9, 2012Applicants: COVENTYA, INC., WD MEDIA, INC.Inventors: ALAN J. RUFFINI, LINDSEY A. HAMILTON, DOROTHEA BUECHEL-RIMMEL, JEAN M. LAPLANTE, AMBROSE SCHAFFER, FREDERICK LOWES
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Patent number: 8098381Abstract: An apparatus for measuring a distance such as, for example, a fly height distance. An apparatus includes a slider having an air bearing surface and an optical condenser assembly spaced apart from the air bearing surface of the slider. The optical condenser assembly includes an optical cap and an optical substrate having a first surface and a second surface. The first surface is spaced apart from the optical cap and the second surface is spaced apart from the air bearing surface of the slider.Type: GrantFiled: October 29, 2007Date of Patent: January 17, 2012Assignee: Seagate Technology LLCInventors: Edward Charles Gage, Duane Clifford Karns, Amit Vasant Itagi, Dorothea Buechel
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Patent number: 8009545Abstract: An apparatus includes a component having a first surface, a first waveguide for directing electromagnetic radiation to a focal point adjacent to the first surface, a storage medium positioned adjacent to the first surface, a detector for detecting electromagnetic radiation reflected from the storage medium, and a structure positioned adjacent to the focal point for collecting the reflected electromagnetic radiation and for transmitting the reflected electromagnetic radiation toward the detector, wherein the structure comprises a second waveguide including a first cladding layer positioned adjacent to a first side of the first waveguide and having a first end positioned adjacent to the first surface and a second cladding layer positioned adjacent to a second side of the first waveguide and having a first end positioned adjacent to the air bearing surface.Type: GrantFiled: August 27, 2009Date of Patent: August 30, 2011Assignee: Seagate Technology LLCInventors: Dorothea Buechel, Dieter Klaus Weller, Edward Charles Gage, William Albert Challener, Christophe Daniel Mihalcea
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Patent number: 7869309Abstract: An apparatus comprises a waveguide, an optical transducer for coupling electromagnetic radiation from the waveguide to a point adjacent to an air bearing surface to heat a portion of a storage medium, and a first wire positioned adjacent to the air bearing surface, wherein current in the wire produces a magnetic field in the heated portion of the storage medium.Type: GrantFiled: August 11, 2005Date of Patent: January 11, 2011Assignee: Seagate Technology LLCInventors: Christophe Daniel Mihalcea, William Albert Challener, Werner Scholz, Kalman Pelhos, Dorothea Buechel, Julius Hohlfeld, Nils Jan Gokemeijer
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Publication number: 20100119778Abstract: Methods comprising providing a pre-patterned substrate having an array of thick walls, depositing a conforming layer on the pre-patterned substrate, etching the conforming layer from the top of the thick walls and the space between the walls, and etching the thick walls while leaving thin walls of conforming layer.Type: ApplicationFiled: November 13, 2008Publication date: May 13, 2010Applicant: Seagate Technology LLCInventors: Kim Yang Lee, David S. Kuo, Dorothea Buechel, Kalman Pelhos
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Publication number: 20100008208Abstract: An apparatus includes a component having a first surface, a first waveguide for directing electromagnetic radiation to a focal point adjacent to the first surface, a storage medium positioned adjacent to the first surface, a detector for detecting electromagnetic radiation reflected from the storage medium, and a structure positioned adjacent to the focal point for collecting the reflected electromagnetic radiation and for transmitting the reflected electromagnetic radiation toward the detector, wherein the structure comprises a second waveguide including a first cladding layer positioned adjacent to a first side of the first waveguide and having a first end positioned adjacent to the first surface and a second cladding layer positioned adjacent to a second side of the first waveguide and having a first end positioned adjacent to the air bearing surface.Type: ApplicationFiled: August 27, 2009Publication date: January 14, 2010Applicant: Seagate Technology LLCInventors: Dorothea Buechel, Dieter Klaus Weller, Edward Charles Gage, William Albert Challener, Christophe Daniel Mihalcea
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Patent number: 7596072Abstract: An apparatus comprises a slider having an air bearing surface, a first waveguide for directing electromagnetic radiation to a focal point adjacent to the air bearing surface, a storage medium position adjacent to the air bearing surface, a detector for detecting electromagnetic radiation reflected from the storage medium, and a structure positioned adjacent to the focal point for collecting the reflected electromagnetic radiation and for transmitted the reflected electromagnetic radiation toward the detector.Type: GrantFiled: December 22, 2004Date of Patent: September 29, 2009Assignee: Seagate Technology LLCInventors: Dorothea Buechel, Dieter Klaus Weller, Edward Charles Gage, William Albert Challener, Christophe Daniel Mihalcea
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Publication number: 20090113464Abstract: An apparatus for measuring a distance such as, for example, a fly height distance. An apparatus includes a slider having an air bearing surface and an optical condenser assembly spaced apart from the air bearing surface of the slider. The optical condenser assembly includes an optical cap and an optical substrate having a first surface and a second surface. The first surface is spaced apart from the optical cap and the second surface is spaced apart from the air bearing surface of the slider.Type: ApplicationFiled: October 29, 2007Publication date: April 30, 2009Applicant: Seagate Technology LLCInventors: Edward Charles Gage, Duane Clifford Karns, Amit Vasant Itagi, Dorothea Buechel
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Publication number: 20070036040Abstract: An apparatus comprises a waveguide, an optical transducer for coupling electromagnetic radiation from the waveguide to a point adjacent to an air bearing surface to heat a portion of a storage medium, and a first wire positioned adjacent to the air bearing surface, wherein current in the wire produces a magnetic field in the heated portion of the storage medium.Type: ApplicationFiled: August 11, 2005Publication date: February 15, 2007Applicant: Seagate Technology LLCInventors: Christophe Mihalcea, William Challener, Werner Scholz, Kalman Pelhos, Dorothea Buechel, Julius Hohlfeld, Nils Gokemeijer
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Publication number: 20060133230Abstract: An apparatus comprises a slider having an air bearing surface, a first waveguide for directing electromagnetic radiation to a focal point adjacent to the air bearing surface, a storage medium position adjacent to the air bearing surface, a detector for detecting electromagnetic radiation reflected from the storage medium, and a structure positioned adjacent to the focal point for collecting the reflected electromagnetic radiation and for transmitted the reflected electromagnetic radiation toward the detector.Type: ApplicationFiled: December 22, 2004Publication date: June 22, 2006Applicant: Seagate Technology LLCInventors: Dorothea Buechel, Dieter Weller, Edward Gage, William Challener, Christophe Mihalcea
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Patent number: 6707549Abstract: A molecular sensor comprising a sensor film containing a metal compound wherein Raman spectroscopic analysis is carried out utilizing the amplification of Raman light by the localized plasmons that fine particles resulting from reduction of the metal compound generate has a small size and a very high sensitivity. A high sensitivity Raman spectroscopic process is provided.Type: GrantFiled: March 13, 2002Date of Patent: March 16, 2004Assignees: TDK Corporation, National Institute of Advanced Industrial Science and TechnologyInventors: Junji Tominaga, Masashi Kuwahara, Christophe Mihalcea, Dorothea Buechel, Takashi Kikukawa, Hiroshi Fuji
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Publication number: 20020145735Abstract: A molecular sensor comprising a sensor film containing a metal compound wherein Raman spectroscopic analysis is carried out utilizing the amplification of Raman light by the localized plasmons that fine particles resulting from reduction of the metal compound generate has a small size and a very high sensitivity. A high sensitivity Raman spectroscopic process is provided.Type: ApplicationFiled: March 13, 2002Publication date: October 10, 2002Inventors: Junji Tominaga, Masashi Kuwahara, Christophe Mihalcea, Dorothea Buechel, Takashi Kikukawa, Hiroshi Fuji