Patents by Inventor Douglas A. Fernandez

Douglas A. Fernandez has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 6517641
    Abstract: An improved process for cleaning a semiconductor wafer surface during manufacture to remove metallic contaminants without the use of robotics and without risk of scanning droplets falling from the wafer, in a faster time than with a manual process using a vacuum wand, comprising: a) positioning a wafer on a rotating plate pivotably mounted above a platform; b) contacting the wafer with a metals scanning solution droplet from the tip of a drop probe, the solution being adhered in a bottom portion of the drop probe above the wafer in a material of a surface tension sufficiently higher than the surface tension on the wafer, the drop probe being pivotably connected to a pivot arm which upon pivoting or turning one notch enables droplet sweeping of metal contaminants on a concentric circle on the wafer on the rotating plate; c) successively turning the pivot arm a sufficient number of notches to enable completion of wafer droplet sweepings through concentric circles to reach the edge of the wafer until all of t
    Type: Grant
    Filed: May 16, 2001
    Date of Patent: February 11, 2003
    Assignee: Infineon Technologies Richmond, LP
    Inventor: Douglas Fernandez
  • Publication number: 20020170578
    Abstract: An improved process for cleaning a semiconductor wafer surface during manufacture to remove metallic contaminants without the use of robotics and without risk of scanning droplets falling from the wafer, in a faster time than with a manual process using a vacuum wand, comprising:
    Type: Application
    Filed: May 16, 2001
    Publication date: November 21, 2002
    Inventor: Douglas Fernandez