Abstract: A method of processing a substrate, including supporting a substrate using an air bearing produced via an air bearing assembly, the air bearing assembly having: an upper portion having a plurality of air supply and vacuum holes therethrough; a lower portion; and a plurality of spacers disposed between and maintaining the upper and lower portions in spaced relation, wherein a density of the air supply and vacuum holes is high enough to provide an air bearing for a substrate, but low enough such that at least one of: (i) a sufficient number of the spacers are employed, and (ii) the spacers are located in close enough proximity, to maintain a substantially uniform flatness of the upper portion relative to the lower portion.

Abstract: Systems, methods, and apparatus relate to a glass reference plate panel; to a modular glass reference plate assembly; and to creation of the modular glass reference plate assembly, which may include providing a plurality of glass reference plate panels, arranging the plurality of glass reference plate panels into an array of adjoining glass reference plate panels, and adhering together the adjoining glass reference plate panels. One or more embodiments may include 6.8 mm-thick borosilicate glass, ground, and polished, with reference marks on a top side and a PVD aluminum coating on a bottom side, perforated with holes, arranged in a 4×4 array of 16 glass reference plate panels, each approximately 810 mm2 in size, abutting at interfaces formed by lap joints, and bonded together with a UV-curable adhesive into a contiguous piece.

Abstract: An air bearing assembly includes: an upper portion having a plurality of air supply and vacuum holes therethrough; a lower portion; and a plurality of spacers disposed between and maintaining the upper and lower portions in spaced relation, wherein a density of the air supply and vacuum holes is high enough to provide an air bearing for a substrate, but low enough such that at least one of: (i) a sufficient number of the spacers are employed, and (ii) the spacers are located in close enough proximity, to maintain a substantially uniform flatness of the upper portion relative to the lower portion.

Abstract: An air bearing assembly includes: an upper portion having a plurality of air supply and vacuum holes therethrough; a lower portion; and a plurality of spacers disposed between and maintaining the upper and lower portions in spaced relation, wherein a density of the air supply and vacuum holes is high enough to provide an air bearing for a substrate, but low enough such that at least one of: (i) a sufficient number of the spacers are employed, and (ii) the spacers are located in close enough proximity, to maintain a substantially uniform flatness of the upper portion relative to the lower portion.

Abstract: Systems, methods, and apparatus relate to a glass reference plate panel; to a modular glass reference plate assembly; and to creation of the modular glass reference plate assembly, which may include providing a plurality of glass reference plate panels, arranging the plurality of glass reference plate panels into an array of adjoining glass reference plate panels, and adhering together the adjoining glass reference plate panels. One or more embodiments may include 6.8 mm-thick borosilicate glass, ground, and polished, with reference marks on a top side and a PVD aluminum coating on a bottom side, perforated with holes, arranged in a 4×4 array of 16 glass reference plate panels, each approximately 810 mm2 in size, abutting at interfaces formed by lap joints, and bonded together with a UV-curable adhesive into a contiguous piece.

Abstract: An air bearing assembly includes: an upper portion having a plurality of air supply and vacuum holes therethrough; a lower portion; and a plurality of spacers disposed between and maintaining the upper and lower portions in spaced relation, wherein a density of the air supply and vacuum holes is high enough to provide an air bearing for a substrate, but low enough such that at least one of: (i) a sufficient number of the spacers are employed, and (ii) the spacers are located in close enough proximity, to maintain a substantially uniform flatness of the upper portion relative to the lower portion.

Abstract: A lathe base assembly is disclosed that decreases vibration and increases thermal stability in a lathe utilizing either a cast iron or composite base. Two separate pairs of rails mounted offset from each other are provided for mounting a secondary spindle and a tool turret, respectively. Vibration from the tool turret caused by the machining operation is thus isolated from the secondary spindle (and vice-versa). If a second tool turret is provided with the lathe, a third separate pair of rails can also be provided for mounting the second tool turret to increase vibration isolation. If a cast iron base is provided, cavities can be provided in the base for filling with a vibration damping material, such as a polymer composite. Alternatively, the base can be constructed from a composite material, and especially a polymer composite.

Abstract: A collet assembly comprises a collet head, a collet body and a mount for securing the collet head and the collet body to the spindle of a machine. The collet head has inside and outside surfaces and front and rear faces and the outside surface includes an outwardly flaring surface. The collet head includes an external annular groove and a hook portion adjacent the rear face. The hook portion extends radially outwardly from the axis of the collet head. The collet body has inside and outside surfaces, a tubular portion and a flange portion extending radially outwardly from the outside surface and axially beyond the collet head hook portion. The flange portion has an outside diameter substantially larger than the outside diameter of the tubular portion of the collet body. The flange portion has an inner annular groove and an adjacent hook portion. The collet head hook portion is positioned within the flange portion annular groove and the hook portion of the flange portion within the collet head annular groove.