Abstract: A method of improving pattern loading in a deposition of a silicon oxide film is described. The method may include providing a deposition substrate to a deposition chamber, and adjusting a temperature of the deposition substrate to about 250° C. to about 325° C. An ozone containing gas may be introduced to the deposition chamber at a first flow rate of about 1.5 slm to about 3 slm, where the ozone concentration in the gas is about 6% to about 12%, by wt. TEOS may also be introduced to the deposition chamber at a second flow rate of about 2500 mgm to about 4500 mgm. The deposition rate of the silicon oxide film is controlled by a reaction rate of a reaction of the ozone and TEOS at a deposition surface of the substrate.

Abstract: An apparatus (10) and method for fabricating metal tubing of generally elliptical shape by cold pressing round tubing stock into the desired shape. The apparatus (10) includes a first pair of opposing dies (16 and 18) secured to the platens (12and 14) of a press for forming the substantially flattened sides of the tubing. A second pair of opposing dies, positioned substantially between and on either side of the first pair of dies, is provided for forming the substantially rounded sides of the elliptical tubing. Means (52) for providing a preselected rate of resistance to movement of the second pair of opposing dies as they are engaged by the substantially rounded sides of the tubing, such that the tubing can be pressed into the desired substantially elliptical shape defined by the die faces of the first and second pairs of opposing dies by operating the press to move the platens (12 and 14) toward one another, are provided.

Abstract: A hydraulic press for compacting materials with a large platen area has a platen support comprising of four hydraulic cylinders, one at each corner of a rectangular or square shaped platen. The cylinders are supplied with near equal fluid flows from commercially available hydraulic flow dividers. When an off-centered platen loading is encountered, the cylinders will respond with a higher restraining force from the cylinders nearest the load with relatively small bending moments transferred to the cylinder rods. The resulting platen structural load resembles a beam supported with pinned connections. The resulting press capacity can be significantly higher than that achievable with guided type platen supports of similar costs where the bending moment is restrained by the stiffness of the guides.

Abstract: An attachable riser used in material handling is held in place by spring clips. At least two such risers are attached to the underside of an object allowing clearance for the forks of a machine such as a forktruck to move under the object. When the object is picked up, moved, and set down the risers remain attached to the object thus eliminating the manual moving or placement of ordinary risers such as timbers. The risers are easily removed from the object when desired.

Abstract: A container used for compacting materials such as low level radioactive waste has a device used to keep the compacted material from springing out of the container when the compacting force is removed, thus resulting in a significant increase in the final compacted density. The device develops its restraining force by using the beam strength of its members. The device includes a louvre attached to the container, enabling the cross beams to be snapped into place with a wedge shape of the cross beam end or a hydraulic clamping device external to the container.

Abstract: A box type container used in a press for compacting materials is supported by a floating clamp arrangement that protects the container during compaction and allows significantly higher compaction pressures to be used. The clamps are supported with spherical connections and are pressed to the container with hydraulic cylinders. A container that is fabricated out of square with generous dimensional tolerances is protected as the clamps float to conform to the container being used. All sides and bottom of the box type container are protected with this arrangement.