Patents by Inventor Drew Sinha

Drew Sinha has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Continuously fed single bubbler for epitaxial deposition of silicon
    Patent number: 6123765
    Abstract: A delivery system and method for providing a gaseous chemical is provided. The system comprises a single bubbler 12 having a chamber 13 for containing a liquid chemical, at least one inlet tube 14 for providing a carrier gas to said chamber, and one outlet tube 16 for providing the gaseous chemical. A liquid chemical supply line 25 conveys the liquid chemical to said chamber. A bubbler is in contact with weight measuring device 24 for weighing the bubbler and generating an output signal responsive to the measured weight. A liquid chemical controller 20 is operatively coupled to said bubbler and said supply line for filling and continuously maintaining a preselected level of the liquid chemical in said chamber responsive to said output signal.
    Type: Grant
    Filed: March 27, 1998
    Date of Patent: September 26, 2000
    Assignee: Mitsubishi Silicon America
    Inventors: Drew Sinha, Jack Harlan Coker, Subramania Krishnakumar