Patents by Inventor Du B. Nguyen
Du B. Nguyen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 7692439Abstract: A structure representative of a conductive interconnect of a microelectronic element is provided, which may include a conductive metallic plate having an upper surface, a lower surface, and a plurality of peripheral edges extending between the upper and lower surfaces, the upper surface defining a horizontally extending plane. The structure may also include a lower via having a top end in conductive communication with the metallic plate and a bottom end vertically displaced from the top end. A lower conductive or semiconductive element can be in contact with the bottom end of the lower via. An upper metallic via can lie in at least substantial vertical alignment with the lower conductive via, the upper metallic via having a bottom end in conductive communication with the metallic plate and a top end vertically displaced from the bottom end. The upper metallic via may have a width at least about ten times than the length of the metallic plate and about ten times smaller than the width of the metallic plate.Type: GrantFiled: May 22, 2008Date of Patent: April 6, 2010Assignee: International Business Machines CorporationInventors: Kaushik Chanda, Birendra Agarwala, Lawrence A. Clevenger, Andrew P. Cowley, Ronald G. Filippi, Jason P. Gill, Tom C. Lee, Baozhen Li, Paul S. McLaughlin, Du B. Nguyen, Hazara S. Rathore, Timothy D. Sullivan, Chih-Chao Yang
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Patent number: 7639032Abstract: A microelectronic element such as a chip or microelectronic wiring substrate is provided which includes a plurality of conductive interconnects for improved resistance to thermal stress. At least some of the conductive interconnects include a metallic plate, a metallic connecting line and an upper metallic via. The metallic connecting line has an upper surface at least substantially level with an upper surface of the metallic plate, an inner end connected to the metallic plate at one of the peripheral edges, and an outer end horizontally displaced from the one peripheral edge. The metallic connecting line has a width much smaller than the width of the one peripheral edge of the metallic plate and has length greater than the width of the one peripheral edge. The upper metallic via has a bottom end in contact with the metallic connecting line at a location that is horizontally displaced from the one peripheral edge by at least about 3 microns (?m).Type: GrantFiled: December 19, 2007Date of Patent: December 29, 2009Assignee: International Business Machines CorporationInventors: Kaushik Chanda, Birendra Agarwala, Lawrence A. Clevenger, Andrew P. Cowley, Ronald G. Filippi, Jason P. Gill, Tom C. Lee, Baozhen Li, Paul S. McLaughlin, Du B. Nguyen, Hazara S. Rathore, Timothy D. Sullivan, Chih-Chao Yang
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Publication number: 20080231312Abstract: A structure representative of a conductive interconnect of a microelectronic element is provided, which may include a conductive metallic plate having an upper surface, a lower surface, and a plurality of peripheral edges extending between the upper and lower surfaces, the upper surface defining a horizontally extending plane. The structure may also include a lower via having a top end in conductive communication with the metallic plate and a bottom end vertically displaced from the top end. A lower conductive or semiconductive element can be in contact with the bottom end of the lower via. An upper metallic via can lie in at least substantial vertical alignment with the lower conductive via, the upper metallic via having a bottom end in conductive communication with the metallic plate and a top end vertically displaced from the bottom end. The upper metallic via may have a width at least about ten times than the length of the metallic plate and about ten times smaller than the width of the metallic plate.Type: ApplicationFiled: May 22, 2008Publication date: September 25, 2008Inventors: Kaushik Chanda, Birendra Agarwala, Lawrence A. Clevenger, Andrew P. Cowley, Ronald G. Filippi, Jason P. Gill, Tom C. Lee, Baozhen Li, Paul S. McLaughlin, Du B. Nguyen, Hazara S. Rathore, Timothy D. Sullivan, Chih-Chao Yang
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Patent number: 7397260Abstract: A microelectronic element such as a chip or microelectronic wiring substrate is provided which includes a plurality of conductive interconnects for improved resistance to thermal stress. At least some of the conductive interconnects include a metallic plate, a metallic connecting line and an upper metallic via. The metallic connecting line has an upper surface at least substantially level with an upper surface of the metallic plate, an inner end connected to the metallic plate at one of the peripheral edges, and an outer end horizontally displaced from the one peripheral edge. The metallic connecting line has a width much smaller than the width of the one peripheral edge of the metallic plate and has length greater than the width of the one peripheral edge. The upper metallic via has a bottom end in contact with the metallic connecting line at a location that is horizontally displaced from the one peripheral edge by at least about 3 microns (?m).Type: GrantFiled: November 4, 2005Date of Patent: July 8, 2008Assignee: International Business Machines CorporationInventors: Kaushik Chanda, Birendra Agarwala, Lawrence A. Clevenger, Andrew P. Cowley, Ronald G. Filippi, Jason P. Gill, Tom C. Lee, Baozhen Li, Paul S. McLaughlin, Du B. Nguyen, Hazara S. Rathore, Timothy D. Sullivan, Chih-Chao Yang
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Patent number: 7138714Abstract: The present invention provides an interconnect structure that includes a diffusion barrier which is positioned within the structure in a fashion that increases the reliability and lifetime of the interconnect structure.Type: GrantFiled: February 11, 2005Date of Patent: November 21, 2006Assignee: International Business Machines CorporationInventors: Du B. Nguyen, Birendra N. Agarwala, Conrad A Barile, Jawahar P. Nayak, Hazara S. Rathore
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Patent number: 6972209Abstract: A multilevel semiconductor integrated circuit (IC) structure including a first interconnect level including a layer of dielectric material over a semiconductor substrate, the layer of dielectric material comprising a dense material for passivating semiconductor devices and local interconnects underneath; multiple interconnect layers of dielectric material formed above the layer of dense dielectric material, each layer of dielectric material including at least a layer of low-k dielectric material; and, a set of stacked via-studs in the low-k dielectric material layers, each of said set of stacked via studs interconnecting one or more patterned conductive structures, a conductive structure including a cantilever formed in the low-k dielectric material.Type: GrantFiled: November 27, 2002Date of Patent: December 6, 2005Assignee: International Business Machines CorporationInventors: Birendra N. Agarwala, Conrad A. Barile, Hormazdyar M. Dalal, Brett H. Engle, Michael Lane, Ernest Levine, Xiao Hu Liu, Vincent McGahay, John F. McGrath, Conal E. Murray, Jawahar P. Nayak, Du B. Nguyen, Hazara S. Rathore, Thomas M. Shaw
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Publication number: 20040256729Abstract: An interconnect structure for a semiconductor device includes a metallization line formed within a low-k dielectric material, the metallization line being surrounded on bottom and side surfaces thereof by a liner material. An embedded dielectric cap is formed over a top surface of the metallization line, wherein the embedded dielectric cap has a sufficient thickness so as to separate a top surface of the liner material from a hardmask layer formed over the low-k dielectric material.Type: ApplicationFiled: June 19, 2003Publication date: December 23, 2004Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Birendra N. Agarwala, Du B. Nguyen, Hazara S. Rathore
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Patent number: 6825561Abstract: An interconnect structure for a semiconductor device includes a metallization line formed within a low-k dielectric material, the metallization line being surrounded on bottom and side surfaces thereof by a liner material. An embedded dielectric cap is formed over a top surface of the metallization line, wherein the embedded dielectric cap has a sufficient thickness so as to separate a top surface of the liner material from a hardmask layer formed over the low-k dielectric material.Type: GrantFiled: June 19, 2003Date of Patent: November 30, 2004Assignee: International Business Machines CorporationInventors: Birendra N. Agarwala, Du B. Nguyen, Hazara S. Rathore
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Publication number: 20040101663Abstract: A multilevel semiconductor integrated circuit (IC) structure including a first interconnect level including a layer of dielectric material over a semiconductor substrate, the layer of dielectric material comprising a dense material for passivating semiconductor devices and local interconnects underneath; multiple interconnect layers of dielectric material formed above the layer of dense dielectric material, each layer of dielectric material including at least a layer of low-k dielectric material; and, a set of stacked via-studs in the low-k dielectric material layers, each of said set of stacked via studs interconnecting one or more patterned conductive structures, a conductive structure including a cantilever formed in the low-k dielectric material.Type: ApplicationFiled: November 27, 2002Publication date: May 27, 2004Inventors: Birendra N. Agarwala, Conrad A. Barile, Hormazdyar M. Dalal, Brett H. Engel, Michael Lane, Ernest Levine, Xiao Hu Liu, Vincent McGahay, John F. McGrath, Conal E. Murray, Jawahar P. Nayak, Du B. Nguyen, Hazara S. Rathore, Thomas M. Shaw
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Patent number: 6258710Abstract: A method of providing sub-half-micron copper interconnections with improved electromigration and corrosion resistance. The method includes double damascene using electroplated copper, where the seed layer is deposited by chemical vapor deposition, or by physical vapor deposition in a layer less than about 800 angstroms.Type: GrantFiled: December 10, 1999Date of Patent: July 10, 2001Assignee: International Business Machines CorporationInventors: Hazara S. Rathore, Hormazdyar M. Dalal, Paul S. McLaughlin, Du B. Nguyen, Richard G. Smith, Alexander J. Swinton, Richard A. Wachnik
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Patent number: 6069068Abstract: A method of providing sub-half-micron copper interconnections with improved electromigration and corrosion resistance. The method includes double damascene using electroplated copper, where the seed layer is deposited by chemical vapor deposition, or by physical vapor deposition in a layer less than about 800 angstroms.Type: GrantFiled: October 8, 1997Date of Patent: May 30, 2000Assignee: International Business Machines CorporationInventors: Hazara S. Rathore, Hormazdyar M. Dalal, Paul S. McLaughlin, Du B. Nguyen, Richard G. Smith, Alexander J. Swinton, Richard A. Wachnik
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Patent number: 6069051Abstract: A method of fabricating on chip metal-to-metal capacitors (MMCAP) uses planar processing with a flexible choice of dielectric, thickness and capacitor shape. The method provides a simpler process which has a better yield and more reliable structure by creating a metal-to-metal capacitor on a planar surface, not in deep trenches. In addition to the process simplicity, the method also allows the use of any dielectric materials which are needed by the product designer; e.g., higher or lower dielectric constant and also not limited by high etch rate difference. Because the inventive process is a planar process, there are no corners in the bottom of deep trenches to cause yield and reliability problems. The capacitor area can be adjusted to any shape because there are no edge effects.Type: GrantFiled: June 17, 1996Date of Patent: May 30, 2000Assignee: International Business Machines CorporationInventors: Du B. Nguyen, Hazara S. Rathore, George S. Prokop, Richard A. Wachnik, Craig R. Gruszecki
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Patent number: 6033939Abstract: A method is provided for the fabrication of fuses within a semiconductor IC structure, which fuses are delectable by a laser pulse or a low voltage electrical pulse typically below 3.5 V to reroute the electrical circuitry of the structure to remove a faulty element. The fuses are formed on the surface of circuitry which is coplanar with a surrounding dielectric such as the circuitry formed by a Damascene method. A preferred fuse material is silicon-chrome-oxygen and the preferred circuitry is copper.Type: GrantFiled: April 21, 1998Date of Patent: March 7, 2000Assignee: International Business Machines CorporationInventors: Birendra N. Agarwala, Hormazdyar M. Dalal, Du B. Nguyen, Hazara S. Rathore
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Patent number: 5252516Abstract: Metallized level is covered with a relatively thick non-conformal oxide layer, such as sputtered quartz (SiO.sub.2). This layer is, in turn, covered with a relatively thin oxide blanket resistant to RIE, such as aluminum oxide (Al.sub.2 O.sub.3) or Yttrium Oxide (Y.sub.2 O.sub.3). A mask, with exposed via opening, is formed in a conventional manner on the aluminum oxide surface and the aluminum oxide in the open areas is removed, for example Al.sub.2 O.sub.3 is etched with BCl.sub.3 and O.sub.2 gases or wet etch with H.sub.3 PO.sub.4. An RIE process is used to form vias.Type: GrantFiled: February 20, 1992Date of Patent: October 12, 1993Assignee: International Business Machines CorporationInventors: Du B. Nguyen, Hazara S. Rathore