Abstract: A test glass changer for optically measuring layer properties in a vacuum coating system including a movable substrate holder for guiding a substrate through a stream of coating material; a mount connected to a rotary spindle and rotatable relative to the substrate holder about the rotary spindle; and a control device directing a test glass element into a ray path of an optical measuring device and into a stream of the coating material. The mount has at least two recesses offset eccentrically with respect to the spindle for one test glass element in each case. The control device can induce a rotational movement of the mount about the spindle. The centering device can exert a torque and holding moment on the mount to bring a test glass element arranged in one of the recesses into a measuring position of the measuring device. Related methods are also provided.

Abstract: A test glass changer for optically measuring layer properties in a vacuum coating system including a movable substrate holder for guiding a substrate through a stream of coating material; a mount connected to a rotary spindle and rotatable relative to the substrate holder about the rotary spindle; and a control device directing a test glass element into a ray path of an optical measuring device and into a stream of the coating material. The mount has at least two recesses offset eccentrically with respect to the spindle for one test glass element in each case. The control device can induce a rotational movement of the mount about the spindle. The centering device can exert a torque and holding moment on the mount to bring a test glass element arranged in one of the recesses into a measuring position of the measuring device. Related methods are also provided.

Abstract: The invention relates to a media injector for transporting a particularly fluid medium into a processing chamber, preferably consisting of a supply device and at least one gap acting as a transport opening for the medium, wherein said gap comprises at least two gap defining surfaces with a gap arranged therebetween. According to the invention, at least one gap defining surface is defined by at least one part of at least one front surface of a first tubular element.

Abstract: The invention relates to an apparatus for devices for determining properties of thin layers applied on a substrate. This apparatus comprises two changing magazines wherein one magazine is provided for crystal resonators and the other magazine for test glasses. The changing magazine for crystal resonators has the form of a disk and is encompassed by the annular magazine for test glasses. Both can be rotated independently of one another. Each position of the magazines can be reproduced with the aid of sensors and evaluation devices. Consequently, it is possible to carry out multiple coatings.

Abstract: The invention relates to an apparatus for devices for determining properties of thin layers applied on a substrate. This apparatus comprises two changing magazines wherein one magazine is provided for crystal resonators and the other magazine for test glasses. The changing magazine for crystal resonators has the form of a disk and is encompassed by the annular magazine for test glasses. Both can be rotated independently of one another. Each position of the magazines can be reproduced with the aid of sensors and evaluation devices. Consequently, it is possible to carry out multiple coatings.

Abstract: Disclosed is an electron beam evaporator for installation in a vacuum apparatus which provides for variable positioning during or between applications of a coating. The apparatus has a carrier plate which is a flat hollow body, the top cover plate of which supports the evaporator. The hollow body is disposed over the bore in the tank such that it can be turned about the main axis of the bore. The component assemblies of the electron beam evaporator are vacuum-tight on the cover plate and the connecting lines are carried through the interior of the hollow body to the component assemblies.

Abstract: An electron beam evaporator, which is formed of the component assemblies: beam generator, deflection system and water-cooled crucible/rotary crucible, is fastened on the cover plate of a flat hollow body.

Abstract: Planetary gear system including one set of gearwheels 11, in particular for devices for coating substrates 3, 3', . . . in a high-vacuum coating chamber where a drive shaft 9 supported and guided in a stationary bearing 1A is provided with a radially extending carrier plate 10 for planets and where the main axis of the stationary sun gear 8 coincides with the rotating axis of the drive shaft 9 and engages the set of gearwheels, wherein the bearing cage, which includes a top plate 27 and a bottom plate 28, via an axis 23 extending parallel to the rotating axis, engages an opening 16, the latter being provided in an area which is located radially inside the carrier plate 10 and wherein the drive shaft 26 of the set of gearwheels 11 is supported and guided in a slot 17 which is in area radially on the outside of the carrier plate 10 and emerges out of the carrier plate 10 parallel tot he rotating axis.