Abstract: In an apparatus for surface analysis microscopy, a number of analysis device are mounted on an ultra-high vacuum chamber. The devices include a beam source of locally heating a selected region of a specimen and a temperature-detector for monitoring the heating of the selected region, as well as an electron gun and an analyzer for detecting emission from a specimen region subjected to electron bombardment. An ion gun may also be provided. The apparatus enables thermal microscopy of a specimen to be carried out in conjunction with other surface analysis techniques including, inter alia, scanning electron microscopy and Auger electron microscopy, within a single apparatus and during a single experimental operation. A novel configuration of cylindrical mirror analyser facilitates mounting a multiplicity of analysis devices on the chamber in a compact manner for studying a specimen at a single position.

Abstract: A manipulator for handling objects within a sealed environment, such as an ultra-high vacuum chamber, is mounted on a port of the chamber so that an active portion of the manipulator terminating in a set of gripping jaws is located within the chamber, while an operating portion of the manipulator is located externally of the chamber. The gripping jaws are mounted at one extremity of a shaft for rotation through at least 360.degree. irrespective of whether they are in an open or closed configuration. The jaws are opened and closed from the exterior of the chamber by means of a sleeve which is axially slidable on the shaft by means of a drive ring located on the operating portion of the manipulator.