Patents by Inventor Eduard G. Metaal

Eduard G. Metaal has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of manufacturing sharp waveguide branches in integrated optical components
    Patent number: 5364495
    Abstract: To manufacture a channel-type waveguide pattern (1.1) having Y-shaped branches and a sharp vertex (V) on or in a substrate (1), masks (6 and 7) which partially overlap one another are used for two different etching steps, which successively define a part of the Y-shaped pattern. In this process, use is made of only one auxiliary mask layer (2) made of suitably chosen material which can be etched in the first etching step but is resistant in a second etching step involving dry etching.
    Type: Grant
    Filed: November 19, 1993
    Date of Patent: November 15, 1994
    Assignee: Koninklijke PTT Nederland N.V.
    Inventors: Johannes J. G. M. Van Der Tol, Eduard G. Metaal, Jorgen W. Pedersen