Abstract: A portable particle detector assembly for detecting particle contamination in the reaction chamber of a plasma processing tool used in semiconductor manufacture. The detector is comprised of a scanner assembly for providing a scanned laser beam and a video camera placed opposite the scanner assembly for monitoring light scattered by particles within the volume of the reaction chamber.

Abstract: The liquid nephelometer has an elongate, tubular housing for containing a liquid sample to be measured for the concentration of foreign materials, a light source located adjacent one or both ends of the housing for directing a beam of light along an axial path through the housing, a light restrictor having a aperture of reduced cross sectional area to divide the interior of the housing into a first or sensing chamber having a known volume and a second chamber and to limit the passage of the scattered light between the two chambers, and light detecting means for detecting light scattered by foreign material in the liquid present in one or both of the chambers and producing a signal representative of the concentration of such foreign material.

Abstract: A fluid particle sensor for measuring and counting particles contained in a fluid. The fluid particle sensor comprises a first bundle of generally parallel elongated fiber optics, the first bundle having a longitudinal axis and opposite inside and outside ends, and a second bundle of generally parallel elongated fiber optics, the second bundle also having a longitudinal axis and opposite inside and outside ends. The sensor also comprises means for supporting the first and second bundles such that the longitudinal axes of the first and second bundles are approximately colinear, and such that the inside end of the second bundle is closely spaced apart from the inside end of the first bundle to form a gap through which the particle containing fluid flows. The sensor further comprises means for transmitting light to the outside end of the first bundle, and means for sensing the amount of light emitted from the outside end of the second bundle.