Abstract: A method and apparatus is disclosed for producing fluorine by providing a contained fluorine precursor source located proximate to or remotely from an adsorbent bed, optionally in a replaceable unit that may be a replaceable module comprising both the fluorine source and the adsorbent bed. Fluorine derived preferably from a nitrogen trifluoride source and used to remove deposited silicon-containing impurities in reaction chambers is reclaimed from an adsorbent bed, and made available to the reaction chamber as a supplemental fluorine source to reduce the total required amount of nitrogen trifluoride source gas. The separation column adsorbent is regenerated in cyclical intervals using a reverse flow of inert gas.

Abstract: A method and apparatus is disclosed for producing fluorine by providing a contained fluorine precursor source located proximate to or remotely from an adsorbent bed, optionally in a replaceable unit that may be a replaceable module comprising both the fluorine source and the adsorbent bed. Fluorine derived preferably from a nitrogen trifluoride source and used to remove deposited silicon-containing impurities in reaction chambers is reclaimed from an adsorbent bed, and made available to the reaction chamber as a supplemental fluorine source to reduce the total required amount of nitrogen trifluoride source gas. The separation column adsorbent is regenerated in cyclical intervals using a reverse flow of inert gas.

Abstract: An apparatus and method for purifying boron trichloride by removal of phosgene. In accordance with the invention, phosgene is photolytically decomposed into carbon monoxide and chlorine and liquid vapor phase in equilibrium with one another and in solution with the boron trichloride. This equilibrium is disturbed preferably by sparging a vapor stream that rises through the boron trichloride and is composed of the substance, such as nitrogen, to disturb the equilibrium and thereby cause the carbon monoxide and chlorine to be carried out of solution and collect in the overhead space. The decomposition product of chlorine and carbon monoxide can then be removed from the vapor space so that the carbon monoxide and chlorine to not recombine and contaminant the boron trichloride with phosgene.

Abstract: An apparatus and method for purifying boron trichloride by removal of phosgene. In accordance with the invention, phosgene is photolytically decomposed into carbon monoxide and chlorine and liquid vapor phase in equilibrium with one another and in solution with the boron trichloride. This equilibrium is disturbed preferably by sparging a vapor stream that rises through the boron trichloride and is composed of the substance, such as nitrogen, to disturb the equilibrium and thereby cause the carbon monoxide and chlorine to be carried out of solution and collect in the overhead space. The decomposition product of chlorine and carbon monoxide can then be removed from the vapor space so that the carbon monoxide and chlorine does not recombine and contaminate the boron trichloride with phosgene.