Abstract: Described are a process and method to synthesize ultrafine materials such as metal oxides and highly dispersed mixed metal oxides. A process for forming an ultrafine material comprises mixing two or more liquid precursor compositions in a mixing apparatus to form a precursor mixture, wherein the mixing apparatus is in fluid communication with an atomizer; atomizing the precursor mixture in the atomizer to form droplets; directing the droplets to a reaction chamber in communication with a volumetric heating source, wherein the a reaction chamber is in fluid communication with the atomizer; volumetrically heating the droplets to produce the ultrafine material; and isolating the ultrafine material.