Patents by Inventor Edward P. Holtaway

Edward P. Holtaway has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 7006547
    Abstract: A method and apparatus for producing a very high repetition rate gas discharge laser system in a MOPA configuration is disclosed which may comprise a master oscillator gas discharge layer system producing a beam of oscillator laser output light pulses at a very high pulse repetition rate; at least two power amplification gas discharge laser systems receiving laser output light pulses from the master oscillator gas discharge laser system and each of the at least two power amplification gas discharge laser systems amplifying some of the received laser output light pulses at a pulse repetition that is a fraction of the very high pulse repetition rate equal to one over the number of the at least two power amplification gas discharge laser systems to form an amplified output laser light pulse beam at the very high pulse repetition rate, which may be positioned in series with respect to the oscillator laser output light pulse beam.
    Type: Grant
    Filed: March 31, 2004
    Date of Patent: February 28, 2006
    Assignee: Cymer, Inc.
    Inventors: Thomas D. Steiger, Edward P. Holtaway, Bryan Moosman, Rajasekhar M. Rao
  • Patent number: D699145
    Type: Grant
    Filed: June 28, 2012
    Date of Patent: February 11, 2014
    Inventors: Benjamin J. Gudlewski, Edward P. Holtaway