Patents by Inventor Edward Teng
Edward Teng has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 9929304Abstract: An apparatus for forming a solar cell includes a housing defining a vacuum chamber, a rotatable substrate support, at least one inner heater and at least one outer heater. The substrate support is inside the vacuum chamber configured to hold a substrate. The at least one inner heater is between a center of the vacuum chamber and the substrate support, and is configured to heat a back surface of a substrate on the substrate support. The at least one outer heater is between an outer surface of the vacuum chamber and the substrate support, and is configured to heat a front surface of a substrate on the substrate support.Type: GrantFiled: April 14, 2015Date of Patent: March 27, 2018Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Edward Teng, Ying-Chen Chao, Chih-Jen Yang
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Patent number: 9103032Abstract: Apparatus for forming a solar cell comprises a housing defining a chamber including a substrate support. A sputtering source is configured to deposit particles of a first type over at least a portion of a surface of a substrate on the substrate support. An evaporation source is configured to deposit a plurality of particles of a second type over the portion of the surface of the substrate. A cooling unit is provided between the sputtering source and the evaporation source. A control system is provided for controlling the evaporation source based on a rate of mass flux emitted by the evaporation source.Type: GrantFiled: November 9, 2012Date of Patent: August 11, 2015Assignee: TSMC Solar Ltd.Inventors: Edward Teng, Ying-Chen Chao, Chih-Jen Yang
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Publication number: 20150221811Abstract: An apparatus for forming a solar cell includes a housing defining a vacuum chamber, a rotatable substrate support, at least one inner heater and at least one outer heater. The substrate support is inside the vacuum chamber configured to hold a substrate. The at least one inner heater is between a center of the vacuum chamber and the substrate support, and is configured to heat a back surface of a substrate on the substrate support. The at least one outer heater is between an outer surface of the vacuum chamber and the substrate support, and is configured to heat a front surface of a substrate on the substrate support.Type: ApplicationFiled: April 14, 2015Publication date: August 6, 2015Applicant: TSMC SOLAR LTD.Inventors: Edward TENG, Ying-Chen CHAO, Chih-Jen YANG
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Patent number: 9029737Abstract: An apparatus for forming a solar cell includes a housing defining a vacuum chamber, a rotatable substrate support, at least one inner heater and at least one outer heater. The substrate support is inside the vacuum chamber configured to hold a substrate. The at least one inner heater is between a center of the vacuum chamber and the substrate support, and is configured to heat a back surface of a substrate on the substrate support. The at least one outer heater is between an outer surface of the vacuum chamber and the substrate support, and is configured to heat a front surface of a substrate on the substrate support.Type: GrantFiled: January 4, 2013Date of Patent: May 12, 2015Assignee: TSMC Solar Ltd.Inventors: Edward Teng, Ying-Chen Chao, Chih-Jen Yang
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Publication number: 20140302634Abstract: A method and apparatus for forming a solar cell. The apparatus includes a housing defining a vacuum chamber and a rotatable substrate apparatus configured to hold a plurality of substrates on a plurality of surfaces. A first sputtering source is configured to deposit a plurality of absorber layer atoms of a first type over at least a portion of a surface of each one of the plurality of substrates. An evaporation source is configured to deposit a plurality of absorber layer atoms of a second type over at least a portion of the surface of each one of the plurality of substrates.Type: ApplicationFiled: June 23, 2014Publication date: October 9, 2014Inventors: Edward TENG, Ying-Chen CHAO, Chih-Jen YANG, Kuo-Jui HSIAO
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Patent number: 8785235Abstract: A method and apparatus for forming a solar cell. The apparatus includes a housing defining a vacuum chamber and a rotatable substrate apparatus configured to hold a plurality of substrates on a plurality of surfaces wherein each of the plurality of surfaces are disposed facing an interior surface of the vacuum chamber. A first sputtering source is configured to deposit a plurality of absorber layer atoms of a first type over at least a portion of a surface of each one of the plurality of substrates. An evaporation source is disposed in a first subchamber of the vacuum chamber and configured to deposit a plurality of absorber layer atoms of a second type over at least a portion of the surface of each one of the plurality of substrates. A first isolation source is configured to isolate the evaporation source from the first sputtering source.Type: GrantFiled: June 1, 2012Date of Patent: July 22, 2014Assignee: TSMC Solar Ltd.Inventors: Edward Teng, Ying-Chen Chao, Chih-Jen Yang, Kuo-Jui Hsiao
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Publication number: 20140193939Abstract: An apparatus for forming a solar cell includes a housing defining a vacuum chamber, a rotatable substrate support, at least one inner heater and at least one outer heater. The substrate support is inside the vacuum chamber configured to hold a substrate. The at least one inner heater is between a center of the vacuum chamber and the substrate support, and is configured to heat a back surface of a substrate on the substrate support. The at least one outer heater is between an outer surface of the vacuum chamber and the substrate support, and is configured to heat a front surface of a substrate on the substrate support.Type: ApplicationFiled: January 4, 2013Publication date: July 10, 2014Applicant: TSMC SOLAR LTD.Inventors: Edward TENG, Ying-Chen CHAO, Chih-Jen YANG
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Publication number: 20140131198Abstract: Apparatuses for forming material films on a solar cell substrate of substantially uniform thickness and processes for forming the same are disclosed. The process performed in the apparatuses is physical vapor deposition (PVD) in some embodiments. In one embodiment, an apparatus includes a specially configured flow aperture. In another embodiment, an apparatus includes moveable shutters which open and close in synchronization with a rotating drum on which substrates are mounted for processing. In other embodiments, the apparatus includes a variable power supply or drum speed control which automatically vary the power supply to the apparatus or drum speed respectively in synchronization with the rotating drum.Type: ApplicationFiled: November 9, 2012Publication date: May 15, 2014Applicant: TSMC SOLAR LTD.Inventors: Edward TENG, Ying-Chen CHAO, Chih-Jen YANG
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Publication number: 20140131193Abstract: Apparatus for forming a solar cell comprises a housing defining a chamber including a substrate support. A sputtering source is configured to deposit particles of a first type over at least a portion of a surface of a substrate on the substrate support. An evaporation source is configured to deposit a plurality of particles of a second type over the portion of the surface of the substrate. A cooling unit is provided between the sputtering source and the evaporation source. A control system is provided for controlling the evaporation source based on a rate of mass flux emitted by the evaporation source.Type: ApplicationFiled: November 9, 2012Publication date: May 15, 2014Applicant: TSMC Solar Ltd.Inventors: Edward TENG, Ying-Chen CHAO, Chih-Jen YANG
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Publication number: 20130210190Abstract: A method and apparatus for forming a solar cell. The apparatus includes a housing defining a vacuum chamber and a rotatable substrate apparatus configured to hold a plurality of substrates on a plurality of surfaces wherein each of the plurality of surfaces are disposed facing an interior surface of the vacuum chamber. A first sputtering source is configured to deposit a plurality of absorber layer atoms of a first type over at least a portion of a surface of each one of the plurality of substrates. An evaporation source is disposed in a first subchamber of the vacuum chamber and configured to deposit a plurality of absorber layer atoms of a second type over at least a portion of the surface of each one of the plurality of substrates. A first isolation source is configured to isolate the evaporation source from the first sputtering source.Type: ApplicationFiled: June 1, 2012Publication date: August 15, 2013Applicant: TSMC SOLAR, LTD.Inventors: Edward TENG, Ying-Chen CHAO, Chih-Jen YANG, Kuo-Jui HSIAO
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Publication number: 20110030794Abstract: A method and apparatus for depositing a CIGS film and a buffer layer on to a flexible substrate. Deposition of the CIGS film occurs in monolayers due to rotation of the flexible substrate. A roll of substrate is placed on a loading roller within a flexible solar cell coating apparatus. A section of the substrate unwinds and advances around a rotating drum. The CIGS film is deposited as the section is rotated and heated. Deposition is a hybrid sputtering and evaporation process. Deposition continues until a predetermined thickness is met and the roll is completely coated. The buffer layer is then deposited on to the CIGS film. The deposition of the CIGS film utilizes elemental selenium and sodium doped indium. The elemental selenium may be ionized to increase monolayer reaction reactivity. The buffer layer is a non-toxic ZnS-O layer.Type: ApplicationFiled: August 9, 2010Publication date: February 10, 2011Inventor: Edward Teng
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Publication number: 20070131423Abstract: A mixture of liquefied carbon dioxide (above about 20 percent) and methanol (less than about 80 percent) is injected into an oil and gas well to fracture the oil bearing formation at suitable pressures. In a second and other following stages, a proppant mixed with a polymer is injected to prop open the fracture. Thereafter the oil and gas is again extracted.Type: ApplicationFiled: November 27, 2006Publication date: June 14, 2007Applicant: GMT Exploration Company, LLCInventor: Edward Teng
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Patent number: 5482785Abstract: Thin film media characterized by the utilization of a substantially peritectic seed alloy layer which is sputter deposited so as to provide dispersed, substantially peritectic and homogenous globules underlying subsequently deposited media layers. These media layers may include a metal layer such as chrome and a magnetic layer such as an alloy of cobalt, chromium, and platinum and possibly other ingredients.Type: GrantFiled: November 29, 1994Date of Patent: January 9, 1996Assignee: StorMedia, Inc.Inventors: Nader Mahvan, Atef H. Eltoukhy, Edward Teng, Hung-Chang W. Huang
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Patent number: 5462796Abstract: A discontinuous flash chrome interlayer of about 5 to 25 .ANG. is incorporated between the upper and lower magnetic recording alloy layers. This flash non-magnetic separation layer is so thin that it is, in fact, a discontinuous layer, so that while the benefits of having some chrome flashed on the surface of the first portion of the magnetic recording alloy are achieved, yet the upper and lower magnetic recording alloy layers are not completely physically separated as they are in disks made according to known sputtering processes.Type: GrantFiled: May 21, 1992Date of Patent: October 31, 1995Assignee: StorMedia, Inc.Inventors: Edward Teng, Atef H. Eltoukhy
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Patent number: 5421975Abstract: Thin film media characterized by the utilization of a substantially peritectic seed alloy layer which is sputter deposited so as to provide dispersed, substantially peritectic and homogenous globules underlying subsequently deposited media layers. These media layers may include a metal layer such as chrome and a magnetic layer such as an alloy of cobalt, chromium, and platinum and possibly other ingredients.Type: GrantFiled: October 13, 1992Date of Patent: June 6, 1995Inventors: Nader Mahvan, Atef H. Eltoukhy, Edward Teng, Hung-Chang W. Huang