Patents by Inventor Edward Teng

Edward Teng has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9929304
    Abstract: An apparatus for forming a solar cell includes a housing defining a vacuum chamber, a rotatable substrate support, at least one inner heater and at least one outer heater. The substrate support is inside the vacuum chamber configured to hold a substrate. The at least one inner heater is between a center of the vacuum chamber and the substrate support, and is configured to heat a back surface of a substrate on the substrate support. The at least one outer heater is between an outer surface of the vacuum chamber and the substrate support, and is configured to heat a front surface of a substrate on the substrate support.
    Type: Grant
    Filed: April 14, 2015
    Date of Patent: March 27, 2018
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Edward Teng, Ying-Chen Chao, Chih-Jen Yang
  • Patent number: 9103032
    Abstract: Apparatus for forming a solar cell comprises a housing defining a chamber including a substrate support. A sputtering source is configured to deposit particles of a first type over at least a portion of a surface of a substrate on the substrate support. An evaporation source is configured to deposit a plurality of particles of a second type over the portion of the surface of the substrate. A cooling unit is provided between the sputtering source and the evaporation source. A control system is provided for controlling the evaporation source based on a rate of mass flux emitted by the evaporation source.
    Type: Grant
    Filed: November 9, 2012
    Date of Patent: August 11, 2015
    Assignee: TSMC Solar Ltd.
    Inventors: Edward Teng, Ying-Chen Chao, Chih-Jen Yang
  • Publication number: 20150221811
    Abstract: An apparatus for forming a solar cell includes a housing defining a vacuum chamber, a rotatable substrate support, at least one inner heater and at least one outer heater. The substrate support is inside the vacuum chamber configured to hold a substrate. The at least one inner heater is between a center of the vacuum chamber and the substrate support, and is configured to heat a back surface of a substrate on the substrate support. The at least one outer heater is between an outer surface of the vacuum chamber and the substrate support, and is configured to heat a front surface of a substrate on the substrate support.
    Type: Application
    Filed: April 14, 2015
    Publication date: August 6, 2015
    Applicant: TSMC SOLAR LTD.
    Inventors: Edward TENG, Ying-Chen CHAO, Chih-Jen YANG
  • Patent number: 9029737
    Abstract: An apparatus for forming a solar cell includes a housing defining a vacuum chamber, a rotatable substrate support, at least one inner heater and at least one outer heater. The substrate support is inside the vacuum chamber configured to hold a substrate. The at least one inner heater is between a center of the vacuum chamber and the substrate support, and is configured to heat a back surface of a substrate on the substrate support. The at least one outer heater is between an outer surface of the vacuum chamber and the substrate support, and is configured to heat a front surface of a substrate on the substrate support.
    Type: Grant
    Filed: January 4, 2013
    Date of Patent: May 12, 2015
    Assignee: TSMC Solar Ltd.
    Inventors: Edward Teng, Ying-Chen Chao, Chih-Jen Yang
  • Publication number: 20140302634
    Abstract: A method and apparatus for forming a solar cell. The apparatus includes a housing defining a vacuum chamber and a rotatable substrate apparatus configured to hold a plurality of substrates on a plurality of surfaces. A first sputtering source is configured to deposit a plurality of absorber layer atoms of a first type over at least a portion of a surface of each one of the plurality of substrates. An evaporation source is configured to deposit a plurality of absorber layer atoms of a second type over at least a portion of the surface of each one of the plurality of substrates.
    Type: Application
    Filed: June 23, 2014
    Publication date: October 9, 2014
    Inventors: Edward TENG, Ying-Chen CHAO, Chih-Jen YANG, Kuo-Jui HSIAO
  • Patent number: 8785235
    Abstract: A method and apparatus for forming a solar cell. The apparatus includes a housing defining a vacuum chamber and a rotatable substrate apparatus configured to hold a plurality of substrates on a plurality of surfaces wherein each of the plurality of surfaces are disposed facing an interior surface of the vacuum chamber. A first sputtering source is configured to deposit a plurality of absorber layer atoms of a first type over at least a portion of a surface of each one of the plurality of substrates. An evaporation source is disposed in a first subchamber of the vacuum chamber and configured to deposit a plurality of absorber layer atoms of a second type over at least a portion of the surface of each one of the plurality of substrates. A first isolation source is configured to isolate the evaporation source from the first sputtering source.
    Type: Grant
    Filed: June 1, 2012
    Date of Patent: July 22, 2014
    Assignee: TSMC Solar Ltd.
    Inventors: Edward Teng, Ying-Chen Chao, Chih-Jen Yang, Kuo-Jui Hsiao
  • Publication number: 20140193939
    Abstract: An apparatus for forming a solar cell includes a housing defining a vacuum chamber, a rotatable substrate support, at least one inner heater and at least one outer heater. The substrate support is inside the vacuum chamber configured to hold a substrate. The at least one inner heater is between a center of the vacuum chamber and the substrate support, and is configured to heat a back surface of a substrate on the substrate support. The at least one outer heater is between an outer surface of the vacuum chamber and the substrate support, and is configured to heat a front surface of a substrate on the substrate support.
    Type: Application
    Filed: January 4, 2013
    Publication date: July 10, 2014
    Applicant: TSMC SOLAR LTD.
    Inventors: Edward TENG, Ying-Chen CHAO, Chih-Jen YANG
  • Publication number: 20140131198
    Abstract: Apparatuses for forming material films on a solar cell substrate of substantially uniform thickness and processes for forming the same are disclosed. The process performed in the apparatuses is physical vapor deposition (PVD) in some embodiments. In one embodiment, an apparatus includes a specially configured flow aperture. In another embodiment, an apparatus includes moveable shutters which open and close in synchronization with a rotating drum on which substrates are mounted for processing. In other embodiments, the apparatus includes a variable power supply or drum speed control which automatically vary the power supply to the apparatus or drum speed respectively in synchronization with the rotating drum.
    Type: Application
    Filed: November 9, 2012
    Publication date: May 15, 2014
    Applicant: TSMC SOLAR LTD.
    Inventors: Edward TENG, Ying-Chen CHAO, Chih-Jen YANG
  • Publication number: 20140131193
    Abstract: Apparatus for forming a solar cell comprises a housing defining a chamber including a substrate support. A sputtering source is configured to deposit particles of a first type over at least a portion of a surface of a substrate on the substrate support. An evaporation source is configured to deposit a plurality of particles of a second type over the portion of the surface of the substrate. A cooling unit is provided between the sputtering source and the evaporation source. A control system is provided for controlling the evaporation source based on a rate of mass flux emitted by the evaporation source.
    Type: Application
    Filed: November 9, 2012
    Publication date: May 15, 2014
    Applicant: TSMC Solar Ltd.
    Inventors: Edward TENG, Ying-Chen CHAO, Chih-Jen YANG
  • Publication number: 20130210190
    Abstract: A method and apparatus for forming a solar cell. The apparatus includes a housing defining a vacuum chamber and a rotatable substrate apparatus configured to hold a plurality of substrates on a plurality of surfaces wherein each of the plurality of surfaces are disposed facing an interior surface of the vacuum chamber. A first sputtering source is configured to deposit a plurality of absorber layer atoms of a first type over at least a portion of a surface of each one of the plurality of substrates. An evaporation source is disposed in a first subchamber of the vacuum chamber and configured to deposit a plurality of absorber layer atoms of a second type over at least a portion of the surface of each one of the plurality of substrates. A first isolation source is configured to isolate the evaporation source from the first sputtering source.
    Type: Application
    Filed: June 1, 2012
    Publication date: August 15, 2013
    Applicant: TSMC SOLAR, LTD.
    Inventors: Edward TENG, Ying-Chen CHAO, Chih-Jen YANG, Kuo-Jui HSIAO
  • Publication number: 20110030794
    Abstract: A method and apparatus for depositing a CIGS film and a buffer layer on to a flexible substrate. Deposition of the CIGS film occurs in monolayers due to rotation of the flexible substrate. A roll of substrate is placed on a loading roller within a flexible solar cell coating apparatus. A section of the substrate unwinds and advances around a rotating drum. The CIGS film is deposited as the section is rotated and heated. Deposition is a hybrid sputtering and evaporation process. Deposition continues until a predetermined thickness is met and the roll is completely coated. The buffer layer is then deposited on to the CIGS film. The deposition of the CIGS film utilizes elemental selenium and sodium doped indium. The elemental selenium may be ionized to increase monolayer reaction reactivity. The buffer layer is a non-toxic ZnS-O layer.
    Type: Application
    Filed: August 9, 2010
    Publication date: February 10, 2011
    Inventor: Edward Teng
  • Publication number: 20070131423
    Abstract: A mixture of liquefied carbon dioxide (above about 20 percent) and methanol (less than about 80 percent) is injected into an oil and gas well to fracture the oil bearing formation at suitable pressures. In a second and other following stages, a proppant mixed with a polymer is injected to prop open the fracture. Thereafter the oil and gas is again extracted.
    Type: Application
    Filed: November 27, 2006
    Publication date: June 14, 2007
    Applicant: GMT Exploration Company, LLC
    Inventor: Edward Teng
  • Patent number: 5482785
    Abstract: Thin film media characterized by the utilization of a substantially peritectic seed alloy layer which is sputter deposited so as to provide dispersed, substantially peritectic and homogenous globules underlying subsequently deposited media layers. These media layers may include a metal layer such as chrome and a magnetic layer such as an alloy of cobalt, chromium, and platinum and possibly other ingredients.
    Type: Grant
    Filed: November 29, 1994
    Date of Patent: January 9, 1996
    Assignee: StorMedia, Inc.
    Inventors: Nader Mahvan, Atef H. Eltoukhy, Edward Teng, Hung-Chang W. Huang
  • Patent number: 5462796
    Abstract: A discontinuous flash chrome interlayer of about 5 to 25 .ANG. is incorporated between the upper and lower magnetic recording alloy layers. This flash non-magnetic separation layer is so thin that it is, in fact, a discontinuous layer, so that while the benefits of having some chrome flashed on the surface of the first portion of the magnetic recording alloy are achieved, yet the upper and lower magnetic recording alloy layers are not completely physically separated as they are in disks made according to known sputtering processes.
    Type: Grant
    Filed: May 21, 1992
    Date of Patent: October 31, 1995
    Assignee: StorMedia, Inc.
    Inventors: Edward Teng, Atef H. Eltoukhy
  • Patent number: 5421975
    Abstract: Thin film media characterized by the utilization of a substantially peritectic seed alloy layer which is sputter deposited so as to provide dispersed, substantially peritectic and homogenous globules underlying subsequently deposited media layers. These media layers may include a metal layer such as chrome and a magnetic layer such as an alloy of cobalt, chromium, and platinum and possibly other ingredients.
    Type: Grant
    Filed: October 13, 1992
    Date of Patent: June 6, 1995
    Inventors: Nader Mahvan, Atef H. Eltoukhy, Edward Teng, Hung-Chang W. Huang