Abstract: A voice coil motor used, for example, in a positioning device associated with either a first object table or a second object table in which the coil is cooled with a cooling jacket in thermal contact with the coil, the cooling jacket comprising at least one channel for circulation of a cooling fluid, the or each channel being arranged such as to be substantially located in a portion of the cooling jacket adjacent to the coil, for use, for example, in a lithographic projection apparatus including a radiation system for supplying a projection beam of radiation, a first object table for holding a mask, a second object table for holding a substrate, a projection system for imaging irradiated portions of the mask onto target portions of the substrate. The cooling jacket may be formed of a ceramic material and may be of a monolithic construction.

Abstract: A voice coil motor used in a positioning means associated with either a first object table or a second object table in which the coil is cooled with a cooling jacket in thermal contact with the coil, the cooling jacket comprising at least one channel for circulation of a cooling fluid, the or each channel being arranged such as to be substantially located in a portion of the cooling jacket adjacent to the coil, for use in a lithographic projection apparatus comprising:

Abstract: A voice coil motor used in a positioning means associated with either a first object table or a second object table in which the coil is cooled with a cooling jacket in thermal contact with the coil, the cooling jacket comprising at least one channel for circulation of a cooling fluid, the or each channel being arranged such as to be substantially located in a portion of the cooling jacket adjacent to the coil, for use in a lithographic projection apparatus comprising: a radiation system for supplying a projection beam of radiation; a first object table for holding a mask; a second object table for holding a substrate; a projection system for imaging irradiated portions of the mask onto target portions of the substrate. The cooling jacket may be formed of a ceramic material and preferably is of a monolithic construction.

Abstract: In a multi-table lithographic apparatus in which substrate tables may be exchanged between a first working zone where substrates are loaded onto and removed from the table and a second working zones where wafers are exposed, collision prevention means are provided to prevent collisions between tables in the exchange process. The collision prevention means may be formed of a labyrinth or a revolving door. The exchange process may be controlled by shuttles, optionally including drive means, that are interlinked so that the tables can only be exchanged between zones together.

Abstract: A voice coil motor used in a positioning means associated with either a first object table or a second object table in which the coil is cooled with a cooling jacket in thermal contact with the coil, the cooling jacket comprising at least one channel for circulation of a cooling fluid, the or each channel being arranged such as to be substantially located in a portion of the cooling jacket adjacent to the coil.

Abstract: In a multi-table lithographic apparatus in which substrate tables may be exchanged between a first working zone where substrates are loaded onto and removed from the table and a second working zones where wafers are exposed, collision prevention means are provided to prevent collisions between tables in the exchange process. The collision prevention means may be formed of a labyrinth or a revolving door. The exchange process may be controlled by shuttles, optionally including drive means, that are interlinked so that the tables can only be exchanged between zones together.

Abstract: An apparatus is provided for transferring a toner image from an endless belt to a receiving material positioned on a flat plate. The toner image is formed by image-forming drums on a part of the belt movable continuously along the drums and is transferred to the receiving material, starting at the leading edge of the toner image and ending at the trailing edge of the toner image. For allowing the latter, an increasable loop is formed in the belt before the image-transfer station and a reducible loop is formed in the belt after the image-transfer station. The loops in the belt are held taut by moving tension rollers in planes forming an acute angle .alpha. with the flat plate, whereby at the image-transfer station the belt forms a constant angle .beta. with the flat plate.

Abstract: An image-forming element including a cylinder having at its outer periphery a dielectric surface layer and, beneath the surface layer, a number of electrodes insulated from one another, the electrodes being connected to elements within the cylinder for selectively controlling the electrodes in accordance with an image pattern to be formed, this connection being established by securing in at least one opening in the wall of the cylinder control device which, on the one hand, are connected to electronic control components within the cylinder and, on the other hand, are connected to the electrodes on the periphery of the cylinder. An image-forming element thus prepared can be used in a printing device for reproducing information.

Abstract: A driving mechanism having a driving shaft, which is rotatable about a first axis and on which a pressure member is located. The pressure member has a first roller segment which engages a fixed support and a second roller segment which engages an adjustment member. The adjustment member can be coupled to a load displaceable parallel to a second axis. The driving mechanism is particularly suitable for comparatively small and accurate displacements of a load, such as, for example, a mask table in an opto-lithographic apparatus.