Abstract: An apparatus for measuring an electromagnetic wave stress of an article includes an electromagnetic wave irradiation unit comprising a plurality of radiation probes being adjacent to each other along a surface of the article at least on one side thereof so as to permit the probes to irradiate independently electromagnetic waves on divided local areas on a surface of the article corresponding to the locations of the probes. The apparatus also includes a control unit electrically connected to the article for receiving output signals having information as to existences of any abnormalities in individual divided local areas in the article exposed to an electromagnetic wave irradiation, the control unit being electrically connected to the transmitted unit for controlling operations of the transmitter unit to control independently an excitation of each radiation probe.